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41. 发明授权

US08526575B1 Compound X-ray lens having multiple aligned zone plates 有权
标题翻译：具有多个对准区域板的复合X射线透镜
公开(公告)号：US08526575B1
公开(公告)日：2013-09-03
申请号：US12855463
申请日：2010-08-12
申请人： Alan Francis Lyon , Michael Feser , Wenbing Yun , Sharon Chen
发明人： Alan Francis Lyon , Michael Feser , Wenbing Yun , Sharon Chen
IPC分类号： G21K1/00
CPC分类号： G21K1/06 , G01N23/04 , G21K1/067 , G21K7/00
摘要： A compound zone plate comprising a first zone plate frame including a first zone plate, a second zone plate frame including a second zone plate, and a base frame to which the first zone plate frame and the second zone plate frame are bonded. In examples, two more zone plates are added to make a four element optic. In the assembly process, the microbeads are used to ensure the parallelism, dial in the distance precisely between the zone plates by selecting the microbead size, possibly in response to the width of the frames, and ensure low friction lateral movement enabling nanometer precision alignment of the zone plates with respect to each other prior to being fixed by the adhesive. That is, when the frames are pressed together to ensure parallelism, it is still possible to align them to each other since the microbead layer facilitates the inplane movement of the alignment process.
摘要翻译：一种复合区域板，包括第一区域板框架，该第一区域框架包括第一区域板，包括第二区域板的第二区域框架和第一区域板框架和第二区域框架结合到其上的基座框架。在示例中，添加另外两个区域板以制造四元件光学元件。在组装过程中，微珠用于确保平行度，通过选择微珠尺寸，可能是响应于框架的宽度，精确地在区域板之间拨出距离，并确保低摩擦横向运动，使纳米精度对准在通过粘合剂固定之前相对于彼此的区域板。也就是说，当框架被压在一起以确保平行时，仍然可以将它们彼此对准，因为微珠层有助于对准过程的内平面运动。

42. 发明授权

US09142382B2 X-ray source with an immersion lens 有权
标题翻译：具有浸没透镜的X射线源
公开(公告)号：US09142382B2
公开(公告)日：2015-09-22
申请号：US13373556
申请日：2011-11-18
申请人： David L. Adler , Wenbing Yun , Thomas Anthony Case
发明人： David L. Adler , Wenbing Yun , Thomas Anthony Case
IPC分类号： H01J35/14 , H01J35/08 , H05G1/52
CPC分类号： H01J35/08 , H01J35/14 , H01J2235/087 , H01J2235/186 , H05G1/52
摘要： An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.
摘要翻译：描述了x射线源。在x射线源的操作期间，电子源发射电子束。该电子束通过磁聚焦透镜聚焦到目标上的点。特别地，磁聚焦透镜包括浸没透镜，其中相邻磁场的大小的峰出现在目标的平面附近。此外，响应于接收聚焦电子束，目标提供x射线的透射源。

43. 发明申请

US20150260663A1 X-RAY METHOD FOR THE MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES 有权
标题翻译：用于测量，定性和分析周期结构的X射线方法
公开(公告)号：US20150260663A1
公开(公告)日：2015-09-17
申请号：US14712917
申请日：2015-05-15
申请人： Wenbing Yun , Sylvia Jia Yun Lewis
发明人： Wenbing Yun , Sylvia Jia Yun Lewis
IPC分类号： G01N23/20 , G01N23/201
CPC分类号： G01N23/20075 , A61B6/4007 , A61B6/4291 , A61B6/484 , A61B6/508 , G01N23/201 , G21K1/02 , G21K2207/005 , H01J35/08 , H01J2235/086
摘要： Periodic spatial patterns of x-ray illumination are used to gather information about periodic objects. The structured illumination may be created using the interaction of a coherent or partially coherent x-ray source with a beam splitting grating to create a Talbot interference pattern with periodic structure. The object having periodic structures to be measured is then placed into the structured illumination, and the ensemble of signals from the multiple illumination spots is analyzed to determine various properties of the object and its structures. Applications to x-ray absorption/transmission, small angle x-ray scattering, x-ray fluorescence, x-ray reflectance, and x-ray diffraction are all possible using the method of the invention.
摘要翻译：使用x射线照明的周期性空间模式来收集关于周期性物体的信息。可以使用相干或部分相干的x射线源与分束光栅的相互作用来创建结构化照明，以产生具有周期性结构的Talbot干涉图案。然后将具有待测量的周期性结构的对象放置到结构化照明中，并且分析来自多个照明点的信号的集合以确定对象及其结构的各种属性。使用本发明的方法，可以应用于x射线吸收/透射，小角度X射线散射，X射线荧光，X射线反射和X射线衍射。

44. 发明申请

US20150110252A1 X-RAY SOURCES USING LINEAR ACCUMULATION 有权
标题翻译：使用线性累积的X射线源
公开(公告)号：US20150110252A1
公开(公告)日：2015-04-23
申请号：US14490672
申请日：2014-09-19
申请人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
IPC分类号： H01J35/14 , H01J35/18
CPC分类号： H01J35/08 , G21K1/06 , H01J2235/081 , H01J2235/086
摘要： We disclose a compact source for high brightness x-ray generation. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved by aligning discrete x-ray sources, or through the use of novel x-ray targets that comprise a number of microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and in turn allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness.The orientation of the microstructures allows the use of an on-axis collection angle, allowing the accumulation of x-rays from several microstructures to be aligned to appear to have a single origin, also known as “zero-angle” x-ray emission.
摘要翻译：我们公开了一个紧凑的高亮度x射线产生源。通过彼此对准的多个区域的电子束轰击实现较高的亮度，以实现x射线的线性积累。这可以通过对准离散的x射线源或通过使用新的x射线靶来实现，所述X射线靶包括与具有高导热性的基底紧密热接触制造的x射线产生材料的多个微结构。这样可以更有效地将热量从X射线产生材料中拉出，并且进而允许以较高电子密度和/或更高能量的电子轰击x射线产生材料，导致更大的x射线亮度。微结构的方向允许使用轴上收集角，允许来自若干微结构的X射线的积聚被对准以看起来具有单个原点，也称为“零角”x射线发射。

45. 发明授权

US09570265B1 X-ray fluorescence system with high flux and high flux density 有权
标题翻译：具有高通量和高通量密度的X射线荧光系统
公开(公告)号：US09570265B1
公开(公告)日：2017-02-14
申请号：US15269855
申请日：2016-09-19
申请人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz
IPC分类号： G01N23/223 , H01J35/14 , H01J35/18 , H01J35/08
CPC分类号： H01J35/14 , G01N23/223 , G21K1/06 , H01J35/08 , H01J35/18 , H01J2235/081 , H01J2235/086
摘要： We present a micro-x-ray fluorescence (XRF) system having a high-brightness x-ray illumination system with high x-ray flux and high flux density. The higher brightness is achieved in part by using x-ray target designs that comprise a number of microstructures of x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness/high flux x-ray source may then be coupled to an x-ray optical system, which can collect and focus the high flux x-rays to spots that can be as small as one micron, leading to high flux density at the fluorescent sample. Such systems may be useful for a variety of applications, including mineralogy, trace element detection, structure and composition analysis, metrology, as well as forensic science and diagnostic systems.
摘要翻译：我们提出了具有高X射线通量和高通量密度的高亮度x射线照明系统的微X射线荧光（XRF）系统。更高的亮度部分地通过使用包括与具有高导热性的基板紧密热接触制造的x射线产生材料的多个微结构的x射线靶设计来实现。这允许用更高电子密度或更高能量的电子轰击靶，这导致更大的x射线通量。然后可以将高亮度/高通量x射线源耦合到x射线光学系统，其可以将高通量x射线收集并聚焦到可以小到1微米的点，导致高通量密度荧光样品。这些系统可用于各种应用，包括矿物学，微量元素检测，结构和成分分析，计量学以及法医科学和诊断系统。

46. 发明申请

US20160268094A1 X-ray sources using linear accumulation 有权
标题翻译： X射线源使用线性积分
公开(公告)号：US20160268094A1
公开(公告)日：2016-09-15
申请号：US14999147
申请日：2016-04-01
申请人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
发明人： Wenbing Yun , Sylvia Jia Yun Lewis , Janos Kirz , Alan Francis Lyon
IPC分类号： H01J35/10 , H01J35/14 , H01J35/18
CPC分类号： H01J35/106 , G21K1/06 , H01J35/08 , H01J35/12 , H01J35/14 , H01J35/18 , H01J2235/081 , H01J2235/086 , H01J2235/1204 , H01J2235/1291
摘要： A compact source for high brightness x-ray generation is disclosed. The higher brightness is achieved through electron beam bombardment of multiple regions aligned with each other to achieve a linear accumulation of x-rays. This may be achieved by aligning discrete x-ray sub-sources, or through the use of x-ray targets that comprise microstructures of x-ray generating materials fabricated in close thermal contact with a substrate with high thermal conductivity. This allows heat to be more efficiently drawn out of the x-ray generating material, and in turn allows bombardment of the x-ray generating material with higher electron density and/or higher energy electrons, leading to greater x-ray brightness.The orientation of the microstructures allows the use of an on-axis collection angle, allowing the accumulation of x-rays from several microstructures to be aligned to appear to have a single origin, also known as “zero-angle” x-ray radiation.
摘要翻译：微结构的方向允许使用轴上收集角，允许来自若干微结构的X射线的聚集被对准以看起来具有单个原点，也称为“零角”x射线辐射。

47. 发明申请

US20150092924A1 STRUCTURED TARGETS FOR X-RAY GENERATION 审中-公开
标题翻译：用于X射线发生的结构化目标
公开(公告)号：US20150092924A1
公开(公告)日：2015-04-02
申请号：US14465816
申请日：2014-08-21
申请人： Wenbing Yun , Sylvia Yun Lewis , Janos Kirz
发明人： Wenbing Yun , Sylvia Yun Lewis , Janos Kirz
IPC分类号： H01J35/08 , H01J9/14 , H01J35/02 , H01J35/12 , H01J35/10
CPC分类号： H01J35/12 , G03F7/16 , G03F7/36 , H01J35/105 , H01J2235/081 , H01J2235/1204
摘要： We disclose targets for generating x-rays using electron beams, along with their method of fabrication. The targets comprise a number of microstructures fabricated from an x-ray target material arranged in close thermal contact with a substrate such that the heat is more efficiently drawn out of the x-ray target material. This in turn allows irradiation of the x-ray generating substance with higher electron density or higher energy electrons, which leads to greater x-ray brightness, without inducing damage or melting.The microstructures may comprise conventional x-ray target materials (such as tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat.In some embodiments, the target comprising microstructures may be incorporated into a rotating anode geometry, to enhance x-ray generation in such systems.
摘要翻译：我们公开了使用电子束产生X射线的目标及其制造方法。目标包括由与基板紧密热接触设置的x射线靶材料制成的许多微结构，使得热量更有效地从x射线靶材料中拉出。这又允许以更高的电子密度或更高能量的电子照射x射线产生物质，这导致更大的x射线亮度，而不引起损伤或熔化。微结构可以包括在诸如金刚石的导热基底上以微米级尺寸图案化的常规x射线靶材料（例如钨）。微结构可以具有任何数量的几何形状，以最好地产生高亮度的x射线并有效地分散热量。在一些实施例中，包括微结构的靶可以并入到旋转阳极几何中，以增强这种系统中的x射线产生。

48. 发明授权

US08353628B1 Method and system for tomographic projection correction 有权
标题翻译：断层投影校正的方法和系统
公开(公告)号：US08353628B1
公开(公告)日：2013-01-15
申请号：US12631739
申请日：2009-12-04
申请人： Wenbing Yun , Ying Xu , Frederick W. Duewer , Mason Freed , Chao-chih Hsu
发明人： Wenbing Yun , Ying Xu , Frederick W. Duewer , Mason Freed , Chao-chih Hsu
IPC分类号： G01D18/00 , A61B6/00
CPC分类号： H01J37/252 , H01J37/244 , H01J2237/226 , H01J2237/24415 , H01J2237/2446
摘要： The position of the sample is measured and used to correct for any off-axis motion during tomography using x-ray projection microscope system with a rotation stage system. The position is sensed using a precision-machined, low-CTE gold-coated cylinder or disc and three to five capacitive distance sensors. The correction can then be performed purely as image processing in software, by applying an appropriate shift in X and Y of the captured x-ray projections. A calibration is often necessary for each system (gold disc plus sensors plus sample stage) to account for any machining errors of the gold disc or positioning errors of the capacitive sensors. This calibration should also be repeated whenever any maintenance is performed on the metrology setup.
摘要翻译：使用具有旋转平台系统的X射线投影显微镜系统，测量样品的位置并用于校正层析成像期间的任何离轴运动。使用精密加工的低CTE镀金圆柱或圆盘和三到五个电容式距离传感器感测位置。然后，可以通过在捕获的X射线投影的X和Y中应用适当的偏移来纯化地作为软件中的图像处理执行校正。每个系统（金盘加传感器加样品台）通常需要进行校准，以解决金盘的任何加工误差或电容式传感器的定位误差。每当在计量设置上执行任何维护时，也应重复此校准。

49. 发明申请

US20120269325A1 X-ray source with increased operating life 有权
标题翻译： X射线源具有更长的使用寿命
公开(公告)号：US20120269325A1
公开(公告)日：2012-10-25
申请号：US13373554
申请日：2011-11-18
申请人： David L. Adler , Wenbing Yun , Thomas Anthony Case
发明人： David L. Adler , Wenbing Yun , Thomas Anthony Case
IPC分类号： H01J35/14
CPC分类号： H01J35/08 , H01J35/14 , H01J2235/087 , H01J2235/186 , H05G1/52
摘要： An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In response to receiving the beam of focused electrons, the target provides a transmission source of x-rays. Moreover, a repositioning mechanism selectively repositions the beam of focused electrons to different locations on a surface of the target based on a feedback parameter associated with operation of the x-ray source. This feedback parameter may be based on: an intensity of the x-rays output by the x-ray source; a position of the x-rays output by the x-ray source; an elapsed time during operation of the x-ray source; a cross-sectional shape of the x-rays output by the x-ray source; and/or a spot size of the x-rays output by the x-ray source.
摘要翻译：描述了x射线源。在x射线源的操作期间，电子源发射电子束。该电子束通过磁聚焦透镜聚焦到目标上的点。响应于接收聚焦电子束，目标提供x射线的透射源。此外，重新定位机构基于与x射线源的操作相关联的反馈参数，有选择地将聚焦电子束重新定位在目标表面上的不同位置。该反馈参数可以基于：由x射线源输出的x射线的强度; 由x射线源输出的x射线的位置; 在x射线源的操作期间经过的时间; 由x射线源输出的x射线的横截面形状; 和/或由x射线源输出的x射线的斑点大小。

50. 发明申请

US20120269323A1 X-ray source with an immersion lens 有权
标题翻译：具有浸没透镜的X射线源
公开(公告)号：US20120269323A1
公开(公告)日：2012-10-25
申请号：US13373556
申请日：2011-11-18
申请人： David L. Adler , Wenbing Yun , Thomas Anthony Case
发明人： David L. Adler , Wenbing Yun , Thomas Anthony Case
IPC分类号： H01J35/32 , H05G1/08
CPC分类号： H01J35/08 , H01J35/14 , H01J2235/087 , H01J2235/186 , H05G1/52
摘要： An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.
摘要翻译：描述了x射线源。在x射线源的操作期间，电子源发射电子束。该电子束通过磁聚焦透镜聚焦到目标上的点。特别地，磁聚焦透镜包括浸没透镜，其中相邻磁场的大小的峰出现在目标的平面附近。此外，响应于接收聚焦电子束，目标提供x射线的透射源。

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