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    • 41. 发明授权
    • Method of and apparatus for removing foreign particles
    • 去除异物的方法和设备
    • US5531862A
    • 1996-07-02
    • US277017
    • 1994-07-19
    • Toru OtsuboYasumichi SuzukiShinji SasakiKazuhiro OharaIchirou Sasaki
    • Toru OtsuboYasumichi SuzukiShinji SasakiKazuhiro OharaIchirou Sasaki
    • C23C14/56C23C16/44H01J37/32H01L21/306H01L21/00
    • H01L21/02046C23C14/564C23C16/4407H01J37/32431H01J2237/022Y10S438/906Y10S438/963
    • A method of and apparatus removes foreign particles in a vacuum or in a dry atmosphere before and in continuation to performing a dry process, such as a dry etching or a sputtering process. For this purpose, the foreign particles are separated from a substrate by subjecting the foreign particles to a force for separating the foreign particles from the substrate and a vibrating force for vibrating the foreign particles at the same time, and then the frequency of vibration is changed to match the resonant frequency of a vibration system formed by each of the foreign particles and the substrate, thereby applying a vibration energy to the foreign particles due to resonance. The separated foreign particles floating in a plasma are drawn to an electrode having a potential which is controlled such that a flowing-in of electrons is reduced, and the particles are discharged from the inside of the plasma. In this way, the foreign particles can be reduced and the yield of the product in manufacturing semiconductors and TFTs can be promoted. Further, a cleaning step, a film forming operation, an etching process and the like can continuously be processed, thereby achieving a reduction in steps and a promotion in productivity.
    • 一种和设备的方法和装置在进行干法或干法蚀刻或溅射工艺之前和之后的真空或干燥气氛中去除异物。 为此目的,通过使外来颗粒受到来自基板的异物分离的力和用于同时振动异物的振动力,使外来颗粒与基板分离,然后振动频率发生变化 以匹配由每个异物和衬底形成的振动系统的谐振频率,从而由于共振而向外来颗粒施加振动能。 将等离子体中漂浮的分离的异物吸引到具有被控制的电位的电极,使得电子的流入减少,并且粒子从等离子体的内部排出。 以这种方式,可以减少外来颗粒,并且可以促进制造半导体和TFT的产品的产率。 此外,可以连续地处理清洁步骤,成膜操作,蚀刻处理等,从而实现步骤的降低和生产率的提高。
    • 46. 发明授权
    • Image processing apparatus and method
    • 图像处理装置及方法
    • US06198553B1
    • 2001-03-06
    • US08683704
    • 1996-07-17
    • Nobuo YamamotoYasumichi SuzukiMitsuru KuritaToshiyuki Kitamura
    • Nobuo YamamotoYasumichi SuzukiMitsuru KuritaToshiyuki Kitamura
    • H04N146
    • H04N1/6088H04N1/6011
    • An image processor matches a hue of an output image with a hue of a preview image. The image processor generates preview image data to confirm on a display, an output color image generated by an image forming unit. The image processor incudes an input unit which inputs from the image forming unit density data representative of the output color image, the density data depending on the output characteristics of the image forming unit. A conversion unit converts the input density data into luminance data in a predetermined color space, and a color correction unit corrects color of the luminance data in accordance with the display characteristics and observation conditions of the display. The preview image data is generated dependent on the type of display and color temperature of the display.
    • 图像处理器将输出图像的色调与预览图像的色调相匹配。 图像处理器生成预览图像数据以在显示器上确认由图像形成单元生成的输出彩色图像。 图像处理器包括从表示输出彩色图像的图像形成单元密度数据输入的输入单元,密度数据取决于图像形成单元的输出特性。 转换单元将输入密度数据转换成预定颜色空间中的亮度数据,并且颜色校正单元根据显示器的显示特性和观察条件校正亮度数据的颜色。 预览图像数据根据显示器的类型和显示器的色温来生成。
    • 49. 发明授权
    • Encryption of data in different formats
    • 以不同格式加密数据
    • US5668881A
    • 1997-09-16
    • US126649
    • 1993-09-27
    • Mitsuru KuritaYasumichi SuzukiKoichi Ishimoto
    • Mitsuru KuritaYasumichi SuzukiKoichi Ishimoto
    • G03G21/00G03G15/36G09C5/00H04N1/44H04N1/64
    • H04N1/4486H04N1/2112
    • A plurality of apparatuses can execute an encrypting process on an image signal are connected. The encrypting processes which are executed in those apparatuses are independently performed, so that the connection of an improper apparatus is made impossible and, in this state, a more advanced signal process can be performed, thereby giving no disadvantage to the user. For this purpose, there is disclosed an image processing apparatus comprising a first encrypting circuit for encrypting the image data and supplying to a first apparatus and a second encrypting circuit for encrypting image data and supplying to a second apparatus different from the first apparatus, wherein the first and second encrypting means execute independently the encryption.
    • 多个装置可以对图像信号进行加密处理。 在这些装置中执行的加密处理被独立地执行,使得不适当的装置的连接变得不可能,并且在该状态下可以执行更先进的信号处理,从而不会给用户带来不利影响。 为此,公开了一种图像处理装置,包括:第一加密电路,用于加密图像数据并提供给第一装置;以及第二加密电路,用于加密图像数据并提供给不同于第一装置的第二装置,其中, 第一和第二加密装置独立执行加密。