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    • 46. 发明授权
    • Method and system for changed particle beam exposure
    • 带电粒子束曝光的方法和系统
    • US5910658A
    • 1999-06-08
    • US27470
    • 1998-02-20
    • Soichiro AraiKenichi MiyazawaHidefumi YabaraHiroshi YasudaTakayuki Nakatani
    • Soichiro AraiKenichi MiyazawaHidefumi YabaraHiroshi YasudaTakayuki Nakatani
    • H01J37/305G03F7/20H01J37/04H01J37/317H01L21/027H01J37/302
    • B82Y10/00B82Y40/00G03F7/2059H01J37/045H01J37/3174H01J2237/0435
    • Adjusting variable delay circuit 311, receiving signal S1, is connected to the input of drive circuit 312. A time point t1, when the output potential of drive circuit 312 traverses reference potential VA between the potential Va of traveling wave V1F of the output potential and 0 V, is detected by comparator 52 for detecting the front edge of V1F, detecting variable delay circuit 50 for delaying signal S1 and D flip-flop 51 for holding the output of comparator 52 at the timing of front edge of the signal outputted from delay circuit 50. A time point t2, when the output potential of drive circuit 312 traverses reference potential VB between the superimposed potential of traveling wave V1F and reflected wave V1B and VA, is detected by comparator 62 for detecting the front edge of V1B, detecting variable delay circuit 60 for delaying signal S1 and D flip-flop 61 for holding the output of comparator 62 at the timing of front edge of the signal outputted from delay circuit 60. The delay time of adjusting variable delay circuit 311 is set so that value {t1+(t2-t1)/2} becomes substantially same as to all the output potentials of drive circuit 31 and so on.
    • 调节可变延迟电路311,接收信号S1连接到驱动电路312的输入端。时间点t1,当驱动电路312的输出电位在输出电位的行波V1F的电位Va和 0 V被比较器52检测,用于检测V1F的前沿,检测可变延迟电路50用于延迟信号S1和D触发器51,用于保持比较器52的输出在从延迟输出的信号的前沿的定时 当驱动电路312的输出电位在行波V1F和反射波V1B与VA之间的叠加电位之间经过参考电位VB时,由比较器62检测V1B的前沿,检测变量 延迟电路60,用于在从延迟电路60输出的信号的前沿的定时处延迟用于保持比较器62的输出的信号S1和D触发器61.延迟时间 设定调节可变延迟电路311的e值使得值{t1 +(t2-t1)/ 2}与驱动电路31的所有输出电位等基本相同。
    • 47. 发明申请
    • Multi-column type electron beam exposure apparatus
    • 多列式电子束曝光装置
    • US20080049204A1
    • 2008-02-28
    • US11897501
    • 2007-08-30
    • Hidefumi YabaraKenichi MiyazawaTomohiro SakazakiKazuaki Tanaka
    • Hidefumi YabaraKenichi MiyazawaTomohiro SakazakiKazuaki Tanaka
    • G03B27/42
    • H01J37/3177B82Y10/00B82Y40/00H01J2237/31762H01J2237/31774
    • A multi-column type electron beam exposure apparatus includes: plural column cells disposed over a wafer, each including an electron gun, deflector for deflecting an electron beam emitted by the electron gun, and exposure data receiving unit for receiving exposure data; and correction computing unit for calculating the exposure data for use in the column cells. The correction computing unit includes exposure data controlling unit and exposure data transmitting unit for each of the column cells. The exposure data transmitting unit encodes the exposure data corrected by the exposure data controlling unit to convert the data into serial data, converts the serial data into a light signal, and transmits the light signal. The exposure data receiving unit converts the light signal into an electric signal, and decodes the encoded exposure data to convert the data into parallel data.
    • 多列型电子束曝光装置包括:设置在晶片上的多个列单元,每个包括电子枪,用于偏转由电子枪发射的电子束的偏转器和用于接收曝光数据的曝光数据接收单元; 以及校正计算单元,用于计算用于列单元格的曝光数据。 校正计算单元包括用于每个列单元的曝光数据控制单元和曝光数据发送单元。 曝光数据发送单元对由曝光数据控制单元校正的曝光数据进行编码,将数据转换为串行数据,将串行数据转换为光信号,并发送光信号。 曝光数据接收单元将光信号转换为电信号,并对编码的曝光数据进行解码以将数据转换为并行数据。
    • 49. 发明申请
    • Tuner apparatus for aiding a tuning of musical instrument
    • 用于协助乐器调谐的调谐器装置
    • US20060027074A1
    • 2006-02-09
    • US11195241
    • 2005-08-02
    • Hideyuki MasudaMari YanaKenichi MiyazawaTsuyoshi Miyaki
    • Hideyuki MasudaMari YanaKenichi MiyazawaTsuyoshi Miyaki
    • G10G7/02
    • G10G7/02
    • A tuner apparatus 10 causes a user to designate a musical instrument that is to be tuned and a reference pitch that is a standard upon tuning, by a process at a setting portion 110. A pitch detecting portion 130 detects a pitch of a performed note inputted via a microphone 20 and input portion 120. A target note specifying portion 140 defines a note name, which is positioned nearest to the performed note in a predetermined temperament (e.g., 12-note equal temperament), as a target note based upon the detected pitch of the performed note and the inputted reference pitch. Then, a calculating portion 150 calculates a difference between the pitch of the performed note and the pitch of the target note, and a display control portion 160 causes the display device 30 to display the calculated difference. Further, the display control portion 160 converts the target note into a note name written in a score relating to the musical instrument to be tuned by using a transposition parameter relating to the musical instrument to be tuned that is stored in the storage portion 100 and set by the setting portion 110, and causes the display device 30 to display a staff in which a note corresponding to the note name written in a score is written.
    • 调谐器装置10通过设置部分110的处理使用户指定要调谐的乐器和调谐时的标准参考音调。音调检测部分130检测所输入的音符的音高 目标票据指定部分140基于检测到的以定义的气质(例如,12音符相等气质)定义最靠近所执行票据的票据名称作为目标票据 所执行音符的音调和输入的参考音高。 然后,计算部分150计算所执行音符的音调与目标音符的音调之间的差,并且显示控制部分160使显示装置30显示计算出的差值。 此外,显示控制部分160通过使用与要存储在存储部分100中的待调谐乐器相关的转置参数将目标音符转换为与要调谐的乐器相关的乐谱中写入的笔记名称,并设置 并且使显示装置30显示其中写入与记录中写入的笔记名称对应的笔记的工作人员。