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    • 44. 发明授权
    • Absolute position measurement apparatus
    • 绝对位置测量装置
    • US07551290B2
    • 2009-06-23
    • US11459851
    • 2006-07-25
    • Hidejiro KadowakiKo IshizukaShigeki Kato
    • Hidejiro KadowakiKo IshizukaShigeki Kato
    • G01B9/02
    • G01B9/0209G01B9/02007G01B2290/45G01B2290/70
    • A first beam having high coherence and a second beam having low coherence are multiplexed onto the same optical axis. This multiplexed beam is split into first and second multiplexed beams. The first multiplexed beam is directed towards a measurement reflection plane of an object to be measured, and the second multiplexed beam is directed towards a reference plane. The first and second multiplexed beams that are reflected from the measurement reflection plane and the reference plane, respectively, are multiplexed to cause the first beams to interfere with each other and the second beams to interfere with each other. Calculations are carried out to determine a measurement origin on the basis of the first and second interference signals obtained from the first and second beams, respectively.
    • 具有高相干性的第一光束和具有低相干性的第二光束被复用到相同的光轴上。 该多路复用波束被分成第一和第二多路波束。 第一多路复用波束指向待测对象的测量反射平面,并且第二多路复用波束指向参考平面。 分别从测量反射平面和参考平面反射的第一和第二多路复用波束被多路复用以使第一波束彼此干扰并且第二波束相互干扰。 基于从第一和第二光束获得的第一和第二干涉信号分别进行计算以确定测量原点。
    • 45. 发明申请
    • INTERFERENCE MEASUREMENT APPARATUS
    • 干扰测量装置
    • US20070024862A1
    • 2007-02-01
    • US11459851
    • 2006-07-25
    • Hidejiro KadowakiKo IshizukaShigeki Kato
    • Hidejiro KadowakiKo IshizukaShigeki Kato
    • G01B11/02
    • G01B9/0209G01B9/02007G01B2290/45G01B2290/70
    • A first beam having high coherence and a second beam having low coherence are multiplexed onto the same optical axis. This multiplexed beam is split into first and second multiplexed beams. The first multiplexed beam is directed towards a measurement reflection plane of an object to be measured, and the second multiplexed beam is directed towards a reference plane. The first and second multiplexed beams that are reflected from the measurement reflection plane and the reference plane, respectively, are multiplexed to cause the first beams to interfere with each other and the second beams to interfere with each other. Calculations are carried out to determine a measurement origin on the basis of the first and second interference signals obtained from the first and second beams, respectively.
    • 具有高相干性的第一光束和具有低相干性的第二光束被复用到相同的光轴上。 该多路复用波束被分成第一和第二多路波束。 第一多路复用波束指向待测对象的测量反射平面,并且第二多路复用波束指向参考平面。 分别从测量反射平面和参考平面反射的第一和第二多路复用波束被多路复用以使第一波束彼此干扰并且第二波束相互干扰。 基于从第一和第二光束获得的第一和第二干涉信号分别进行计算以确定测量原点。
    • 46. 发明授权
    • Displacement detecting apparatus and information recording apparatus
    • 位移检测装置和信息记录装置
    • US06618218B1
    • 2003-09-09
    • US09655342
    • 2000-09-05
    • Hidejiro KadowakiKo IshizukaYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • Hidejiro KadowakiKo IshizukaYasushi KanedaShigeki KatoTakayuki KadoshimaSakae Horyu
    • G11B5596
    • G11B5/59633
    • An apparatus for detecting the relative displacement of a surface to be detected, and an apparatus and method for recording information on a hard disc of a hard disk drive using such a detecting apparatus, the detecting apparatus comprising an interference optical system for condensing a light beam on the surface to be detected, and making the reflected light from the surface to be detected interfere with the condensed light beam to thereby form an interference light beam, light receiving means for receiving the interference light beam and outputting bright and dark signals attributable to the relative displacement of the surface to be detected, and condensed light information supplying means for separating part of the reflected light from the surface to be detected from the optical path until the reflected light arrives at said light receiving means, and utilizing the separated light beam to detect the condensed state of the incident light beam onto the surface to be detected or make the condensed state observable.
    • 一种用于检测待检测表面的相对位移的装置,以及用于使用这种检测装置在硬盘驱动器的硬盘上记录信息的装置和方法,所述检测装置包括:干涉光学系统,用于将光束 在要检测的表面上,并且使来自被检测表面的反射光与聚光光束干涉,从而形成干涉光束;光接收装置,用于接收干涉光束并输出归因于 要被检测的表面的相对位移,以及聚光信息提供装置,用于从反射光到达所述光接收装置,将从所述光路的待检测表面反射的光的一部分分离,并将所分离的光束 将入射光束的凝聚状态检测到待检测或制作的表面上 浓缩态可观察。