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    • 46. 发明授权
    • Plasma etching method and plasma etching apparatus
    • 等离子体蚀刻方法和等离子体蚀刻装置
    • US08753527B2
    • 2014-06-17
    • US13128951
    • 2009-11-11
    • Tetsuya NishizukaMasahiko TakahashiToshihisa Ozu
    • Tetsuya NishizukaMasahiko TakahashiToshihisa Ozu
    • C23F1/00C23F1/08
    • H01L21/67069H01J37/32192H01L21/3065H01L21/76229
    • A plasma etching method uses a plasma etching apparatus including a process chamber, a susceptor, a microwave supplying portion, a gas supplying portion, an evacuation apparatus, a bias electric power supplying portion that supplies alternating bias electric power to the susceptor, and a bias electric power control portion that controls the alternating bias electric power, wherein the bias electric power control portion controls the alternating bias electric power so that supplying and disconnecting the alternating bias electric power to the susceptor are alternately repeated to allow a ratio of a time period of supplying the alternating bias electric power with respect to a total time period of supplying the alternating bias electric power and disconnecting the alternating bias electric power to be 0.1 or more and 0.5 or less.
    • 等离子体蚀刻方法使用等离子体蚀刻装置,其包括处理室,基座,微波供给部,气体供给部,排气装置,向基座提供交流偏置电力的偏置电力供给部,偏置 电力控制部分,其控制所述交流偏置电力,其中所述偏置电力控制部分控制所述交流偏压电力,使得向所述基座提供和断开所述交流偏置电力交替地重复,以允许所述交流偏置电力的时间段 将交流偏压电力提供给交流偏压电力的总时间并将交流偏压电力断开为0.1以上且0.5以下的交流偏压电力供给。
    • 47. 发明授权
    • Glass-melting device for producing glass fiber and method for producing glass fiber using same
    • 玻璃纤维生产用玻璃熔融装置及使用该玻璃纤维的玻璃纤维的制造方法
    • US08689588B2
    • 2014-04-08
    • US13255459
    • 2010-03-08
    • Norio HirayamaMasahiko TakahashiNaohiro MiyanagaKentarou Ogawa
    • Norio HirayamaMasahiko TakahashiNaohiro MiyanagaKentarou Ogawa
    • C03B37/085
    • C03B5/2252C03B5/187C03B5/20C03B5/235C03B37/0203C03B37/085
    • An object of the present invention is to effectively reduce mixing of bubbles into a spun glass fiber. A glass-melting device 10 for producing glass fibers includes; a first glass-melting tank 12 exposed to a reduced-pressure atmosphere; a second glass-melting tank 14 and a third glass-melting tank 16 arranged below the first glass-melting tank 12; an ascending conduit 18 that sends up molten glass resulting from melting in the second glass-melting tank 14 to deliver the molten glass to the first glass-melting tank 12; a descending conduit 20 that sends the molten glass down from the first glass-melting tank 12 to deliver the molten glass to the third glass-melting tank 16; a decompression housing 22; and a bushing 24. The glass-melting device 10 further includes heating means for separately heating the first glass-melting tank 12, the second glass-melting tank 14, the third glass-melting tank 16, the ascending conduit 18, the descending conduit 20 and the bushing 24.
    • 本发明的目的是有效地减少玻璃纤维中气泡的混合。 用于生产玻璃纤维的玻璃熔化装置10包括: 暴露于减压气氛的第一玻璃熔池12; 布置在第一玻璃熔化槽12下方的第二玻璃熔化槽14和第三玻璃熔化槽16; 将第二玻璃熔融槽14熔化后的熔融玻璃发送到上述第一玻璃熔池12的上升导管18; 将熔融玻璃从第一玻璃熔化槽12向下传送以将熔融玻璃输送到第三玻璃熔化槽16的下行导管20; 减压壳体22; 玻璃熔化装置10还包括用于分别加热第一玻璃熔化槽12,第二玻璃熔化槽14,第三玻璃熔化槽16,上升管道18,下降管道 20和衬套24。