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    • 44. 发明申请
    • MIRROR UNIT, METHOD OF PRODUCING THE SAME, AND EXPOSURE APPARATUS AND METHOD USING THE MIRROR UNIT
    • 镜子单元,其制造方法和曝光装置以及使用镜子单元的方法
    • US20080117512A1
    • 2008-05-22
    • US11938439
    • 2007-11-12
    • Takeshi YamamotoAkira Miyake
    • Takeshi YamamotoAkira Miyake
    • G02B1/10
    • G02B26/0825G21K1/062Y10S359/90
    • Disclosed are a mirror unit and a method of producing the same. In one preferred embodiment, the mirror unit includes a mirror with a multilayered film formed on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, and a substrate deforming device for producing deformation of a shape of the substrate of the mirror, wherein, in the multilayered film, the number of laminated layers in a predetermined region of the substrate differs from that in another region of the substrate. A mirror unit producing method according to another preferred embodiment includes forming a multilayered film on a substrate, the multilayered film having two materials periodically laminated in layers on the substrate, providing substrate deforming means in association with the substrate, the deforming means having a function for producing deformation of the shape of the substrate, and partially removing the multilayered film.
    • 公开了镜单元及其制造方法。 在一个优选实施例中,反射镜单元包括具有在基板上形成的多层膜的反射镜,该多层膜具有在基板上周期层压的两种材料,以及用于产生基板的形状变形的基板变形装置 其特征在于,在所述多层膜中,所述基板的规定区域的层叠层数与所述基板的其他区域的层叠数不同。 根据另一优选实施例的镜单元制造方法包括在基板上形成多层膜,所述多层膜具有在基板上周期层压的两种材料,提供与基板相关联的基板变形装置,变形装置具有 产生基板形状的变形,并且部分地去除多层膜。
    • 47. 发明申请
    • Spherical Active Carbon And Process For Producing The Same
    • 球形活性炭及其生产方法
    • US20080063592A1
    • 2008-03-13
    • US11597265
    • 2005-05-16
    • Fumio NakaharaKuroo KizakiAkira Miyake
    • Fumio NakaharaKuroo KizakiAkira Miyake
    • C01B31/08
    • B01J20/28019B01J20/20C01B32/336C01B32/384
    • An active carbon produced from an infusible carbonaceous material as a raw material, which active carbon when used for prevention of automobile fuel evaporation, etc., would not cause any trouble attributed to dust generation, exhibiting reduced pressure loss; and a process for producing the same. There is provided a spherical active carbon produced from an infusible solid carbon material as a raw material, wherein providing that x represents an average particle diameter (mm) and y an MS hardness (%), when x is in the range of 0.5 to 20, y is ≧100×(1-0.8×1.45(0.3-x)). This spherical active carbon can be produced by a process comprising mixing a carbon material with a carbonizable binder; extruding the mixture into a strand form; carrying out rolling granulation so as to obtain a spherical form; rendering the same infusible under appropriate conditions corresponding to the particle size; and performing carbonization and thereafter activation under conditions appropriately restricting the contact with activation gas.
    • 从作为原料的不可渗入的碳质材料生成的活性碳,当用于防止汽车燃料蒸发等时使用的活性炭不会引起由于粉尘产生而引起的任何故障,表现出减小的压力损失; 及其制造方法。 提供由作为原料的不溶性固体碳材料制成的球状活性炭,其中x表示平均粒径(mm),y表示MS硬度(%),当x在0.5〜20的范围内时 ,y => 100×(1-0.8×1.4×(0.3-x))。 该球形活性炭可以通过包括将碳材料与可碳化粘合剂混合的方法来制备; 将混合物挤出成锭状; 进行轧制造粒,得到球形; 在与粒度对应的适当条件下使相同的不可渗透性; 进行碳酸化,然后在适当限制与活化气体接触的条件下进行活化。