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41. 发明授权

US07578189B1 Three-axis accelerometers 有权
标题翻译：三轴加速度计
公开(公告)号：US07578189B1
公开(公告)日：2009-08-25
申请号：US11431168
申请日：2006-05-10
申请人： Mehran Mehregany
发明人： Mehran Mehregany
IPC分类号： G01P15/13 , G01P15/125
CPC分类号： G01P15/18 , B81B2201/0235 , B81C1/00182 , B81C2201/0111 , G01P15/0802 , G01P15/125 , G01P15/131 , G01P2015/084 , Y10T29/49156
摘要： Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, and a plurality of electrically-conductive suspension arms that are separated from the proof mass extend from the anchor and are coupled to the substrate surrounding the proof mass. A plurality of sense and actuation electrodes are separated from the proof mass by gaps and are coupled to processing electronics. Capacitive sensing is used to derive electrical signals caused by forces exerted on the proof mass, and the electrical signals are processed by the processing electronics to produce x-, y- and z-direction acceleration data. Electrostatic actuation is used to induce movements of the mass for force balance operation, or self-test and self-calibration. The fabrication methods use deep reactive ion etch bulk micromachining and surface micromachining to form the proof mass, suspension arms and electrodes. The anchor, suspension arms and electrodes are made in the same process steps from the same electrically conductive material, which is different from the substrate material.
摘要翻译：公开了MEMS加速度计及其制造方法。示例性的加速度计包括基板和作为基板的一部分的检测质量块，并且与基板周围的基板间隔开。导电锚固件耦合到检测质量块，并且与防弹块分离的多个导电悬臂与锚固件相延伸并且耦合到围绕防弹块的基板。多个感测和致动电极通过间隙与证明块分离，并且耦合到处理电子器件。电容感测用于导出由施加在检验质量上的力引起的电信号，并且电信号由处理电子器件处理以产生x，y和z方向的加速度数据。静电驱动用于引起质量的运动，用于力平衡运行，或自检和自校准。制造方法使用深反应离子蚀刻体微加工和表面微加工形成证明质量块，悬臂和电极。锚固器，悬架臂和电极由与基板材料不同的相同导电材料以相同的工艺步骤制成。

42. 发明授权

US5705318A Micromotors and methods of fabrication 失效
标题翻译：微电机和制造方法
公开(公告)号：US5705318A
公开(公告)日：1998-01-06
申请号：US254920
申请日：1994-06-06
申请人： Mehran Mehregany , Keren Deng
发明人： Mehran Mehregany , Keren Deng
IPC分类号： G02B26/08 , G02B26/10 , H02N1/00 , H02K15/02
CPC分类号： B81C1/00198 , G02B26/0816 , G02B26/106 , H02N1/004 , B81B2201/034
摘要： A polysilicon micromotor, of either inner rotor or outer rotor design, is fabricated with a process that uses as few as three mask steps. In an outer rotor (wobble) micromotor, a free-rotating insulating flange bearing mechanically couples the inner periphery of the rotor to the stator, permitting the outer periphery of the rotor to be directly coupled to other mechanisms. The dielectric constant of the flange bearing increases motive torque of the motor as contrasted with air-gap designs. This and other factors results in motive torque, in the illustrated embodiment, more than 100 times larger than in previous designs. Among its other benefits, the disclosed fabrication process results in in-place formation of all motor elements, and enables precise definition of the rotor/stator gap.
摘要翻译：内部转子或外部转子设计的多晶硅微型电动机的制造采用仅使用三个掩模步骤的工艺。在外转子（摆动）微型马达中，自由旋转的绝缘凸缘轴承将转子的内周机械地连接到定子，允许转子的外周直接连接到其它机构。与气隙设计相反，法兰轴承的介电常数提高了电机的动力矩。在所示实施例中，这个和其他因素导致动力转矩比以前的设计大100倍以上。在其它优点之中，所公开的制造过程导致所有电机元件的就地形成，并且能够精确地定义转子/定子间隙。

43. 发明授权

US5579583A Microfabricated blades 失效
标题翻译：微型刀片
公开(公告)号：US5579583A
公开(公告)日：1996-12-03
申请号：US375243
申请日：1995-01-19
申请人： Mehran Mehregany , Randal H. Rudderman , Robert L. Mullen
发明人： Mehran Mehregany , Randal H. Rudderman , Robert L. Mullen
IPC分类号： A61B18/14 , B26B9/00 , B26B3/00 , B25G3/00
CPC分类号： A61B17/3211 , A61B18/14 , B26B9/00 , A61B18/1402 , A61B2018/00119
摘要： A micromachined blade suitable for medical applications has an edge which is free of the imperfections common in mechanically sharpened steel blades. A method of forming micromachined blades having the desired characteristics may be performed by etching with anisotropic or isotropic etchants. This micromachined blade may be formed of a single-crystalline substrate, such as a silicon wafer commonly used in integrated circuit technology. Thus, such a micromachined blade may also carry circuitry capable of assisting a surgeon in the performance of certain procedures.
摘要翻译：适用于医疗应用的微加工刀片具有在机械磨削的钢刀片中不存在缺陷的边缘。可以通过用各向异性或各向同性蚀刻剂进行蚀刻来形成具有所需特性的微加工刀片的方法。该微加工刀片可以由单晶衬底形成，例如通常用于集成电路技术的硅晶片。因此，这种微加工刀片还可以承载能够协助外科医生执行某些程序的电路。

44. 发明授权

US4864824A Thin film shape memory alloy and method for producing 失效
标题翻译：薄膜形状记忆合金及其制造方法
公开(公告)号：US4864824A
公开(公告)日：1989-09-12
申请号：US265176
申请日：1988-10-31
申请人： Kaigham J. Gabriel , Mehran Mehregany , James A. Walker
发明人： Kaigham J. Gabriel , Mehran Mehregany , James A. Walker
IPC分类号： F03G7/06 , G02B6/35 , H01H1/00 , H01H61/01
CPC分类号： G02B6/3576 , F03G7/065 , G02B6/3508 , G02B6/3552 , G02B6/358 , H01H1/0036 , H01H2061/006 , H01H2061/0122 , H01H61/0107
摘要： An actuator including a device made of thin film shape memory material mounted to a substrate. The thin film device is deformed from its original shape. Thereafter, the device is heated to restore the device to its original shape. Motion of the device occurs in the deforming and restoring steps, which is used to produce some form of work result.
摘要翻译：一种致动器，包括安装到基板上的由薄膜形状记忆材料制成的装置。薄膜装置从原来的形状变形。此后，将该装置加热以将装置恢复到其原始形状。设备的运动发生在变形和恢复步骤中，用于产生某种形式的工作结果。

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