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41. 发明申请

US20080289932A1 SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS 有权
标题翻译：运输基板运输系统
公开(公告)号：US20080289932A1
公开(公告)日：2008-11-27
申请号：US11838306
申请日：2007-08-14
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G49/07
CPC分类号： H01L21/67769 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译：在半导体制造设备中，输送机输送基板载体。基板载体从输送机卸载并装载到输送机上而不停止输送机。在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。没有载体的单个基底可以类似地从输送机装载和/或卸载。

42. 发明授权

US07455172B2 Break-away positioning conveyor mount for accommodating conveyor belt bends 失效
标题翻译：分离定位输送机支架，用于容纳输送带弯头
公开(公告)号：US07455172B2
公开(公告)日：2008-11-25
申请号：US11495052
申请日：2006-07-28
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens
IPC分类号： B65G17/20
CPC分类号： H01L21/68707 , H01L21/6773 , H01L21/67733
摘要： A break-away mounting system for a continuous-motion, high-speed position conveyor system is disclosed. A support cradle may be suspended from a conveyor belt such that the support cradle maintains a fixed position and orientation relative to at least one point on the conveyor belt without inducing appreciable stress on the conveyor belt, the support cradle, or the coupling between the conveyor belt and the support cradle. The mount may include a leading rotatable bearing attached to the support cradle which may releasably engage a first key attached to the conveyor belt, the rotatable bearing adapted to accommodate rotational forces applied to the support cradle by the conveyor belt. The mount may also include a slide bearing attached to the support cradle which may releasably engage a second key attached to the conveyor belt, the slide bearing adapted to accommodate longitudinal forces applied to the support cradle by the conveyor belt.
摘要翻译：公开了一种用于连续运动的高速位置传送器系统的分离安装系统。支撑托架可以从传送带悬挂，使得支撑托架相对于传送带上的至少一个点保持固定的位置和方向，而不会在传送带，支撑架或传送带之间的联接中引起明显的应力皮带和支撑架。安装件可以包括附接到支撑架的前导可旋转轴承，其可释放地接合附接到传送带的第一键，该旋转轴承适于容纳由传送带施加到支撑支架的旋转力。安装件还可以包括附接到支撑支架的滑动轴承，其可以可释放地接合附接到传送带的第二键，滑动轴承适于容纳由传送带施加到支撑支架的纵向力。

43. 发明申请

US20080187419A1 CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM 审中-公开
标题翻译：高速装载机校准运输系统
公开(公告)号：US20080187419A1
公开(公告)日：2008-08-07
申请号：US12099780
申请日：2008-04-08
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amit Puri
IPC分类号： H01L21/67
CPC分类号： H01L21/67769 , H01L21/67253 , H01L21/67276
摘要： In a first aspect, a first method of calibrating a substrate carrier loader to a moving conveyor is provided. The first method includes the steps of (1) providing a substrate carrier loader adapted to load substrate carriers onto a moving conveyor; (2) aligning the substrate carrier loader to the moving conveyor; and (3) calibrating the substrate carrier loader to the moving conveyor. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种将基板载体加载器校准到移动输送机的第一种方法。第一种方法包括以下步骤：（1）提供适于将基板载体加载到移动输送机上的基底载体加载器; （2）将基板载体装载器对准移动的输送机; 和（3）将衬底载体装载器校准到移动的输送机。提供了许多其他方面。

44. 发明授权

US07293642B2 Methods and apparatus for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的方法和装置
公开(公告)号：US07293642B2
公开(公告)日：2007-11-13
申请号：US11476994
申请日：2006-06-27
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.
摘要翻译：根据第一方面，提供了一种适于在半导体器件制造设备内传送衬底载体的第一传送系统。第一输送机系统包括沿半导体器件制造设备的至少一部分形成闭合回路的带状物。该带适于（1）在水平面上具有柔性并且在垂直平面中是刚性的; 和（2）在所述半导体器件制造设备的至少一部分内传输多个衬底载体。还提供了许多其他方面，以及根据这些和其它方面的系统，方法和计算机程序产品。

45. 发明授权

US07234584B2 System for transporting substrate carriers 有权
标题翻译：用于运输衬底载体的系统
公开(公告)号：US07234584B2
公开(公告)日：2007-06-26
申请号：US10650310
申请日：2003-08-28
申请人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael Robert Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G29/00
CPC分类号： H01L21/67276 , H01L21/67769 , H01L21/67778
摘要： In a semiconductor fabrication facility, a conveyor transports substrate carriers. The substrate carriers are unloaded from the conveyor and loaded onto the conveyor without stopping the conveyor. A load and/or unload mechanism lifts the substrate carriers from the conveyor during unloading operations, while matching the horizontal speed of the conveyor. Similarly, during loading operations, the load/unload mechanism lowers a substrate carrier into engagement with the conveyor while matching the horizontal speed of the conveyor. Individual substrates, without carriers, may be similarly loaded and/or unloaded from a conveyor.
摘要翻译：在半导体制造设备中，输送机输送基板载体。基板载体从输送机卸载并装载到输送机上而不停止输送机。在卸载操作期间，负载和/或卸载机构将基板载体从输送机提升，同时匹配输送机的水平速度。类似地，在装载操作期间，装载/卸载机构降低了基板载体与输送机的接合，同时匹配输送机的水平速度。没有载体的单个基底可以类似地从输送机装载和/或卸载。

46. 发明授权

US07230702B2 Monitoring of smart pin transition timing 有权
标题翻译：监控智能针脚转换时序
公开(公告)号：US07230702B2
公开(公告)日：2007-06-12
申请号：US10987950
申请日：2004-11-12
申请人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
发明人： Michael R. Rice , Eric A. Englhardt , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Kirk Van Katwyk , Amitabh Puri
IPC分类号： G01B11/00 , H01L21/677 , B65B21/02
CPC分类号： H01L21/67775 , H01L21/67769
摘要： A movable portion of a substrate carrier handler is extended into a transport path along which a substrate carrier transport system transports a substrate carrier, respective kinematic coupling events are detected between corresponding interface elements of the movable portion and the substrate carrier, respective signals are generated in response thereto, and an alignment offset between the substrate carrier and the substrate carrier transport system is determined based on the signals. A movable portion matches an elevation, position, and/or a speed/velocity of a substrate carrier moving along the transport path. Sensors for detecting kinematic coupling and generating signals in response thereto are provided on the movable portion. An end effector includes a support with interface elements and sensors for detecting kinematic coupling and generating respective signals. A substrate carrier handler includes a movable portion, interface elements, sensors, and a controller for receiving signals and determining an alignment offset.
摘要翻译：衬底载体处理器的可移动部分延伸到传送路径中，衬底载体传输系统沿着传送路径传送衬底载体，在可移动部分的对应界面元件和衬底载体之间检测到相应的运动耦合事件，基于这些信号来确定衬底载体和衬底载体传输系统之间的对准偏移。可移动部分匹配沿着传送路径移动的衬底载体的高度，位置和/或速度/速度。用于检测运动耦合和响应于此产生信号的传感器设置在可动部分上。端部执行器包括具有接口元件的支撑件和用于检测运动耦合并产生相应信号的传感器。基板载体处理器包括可移动部分，接口元件，传感器和用于接收信号并确定对准偏移的控制器。

47. 发明授权

US07077264B2 Methods and apparatus for transporting substrate carriers 有权
公开(公告)号：US07077264B2
公开(公告)日：2006-07-18
申请号：US10764982
申请日：2004-01-26
申请人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Michael R. Rice , Robert B. Lowrance , Martin R. Elliott , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65G17/02
CPC分类号： H01L21/67706 , B65G17/20 , B65G37/02 , B65G2201/0297 , H01L21/67727 , H01L21/6773 , H01L21/67769 , H01L21/67778 , Y10S414/135
摘要： According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects.

48. 发明授权

US06955197B2 Substrate carrier having door latching and substrate clamping mechanisms 失效
标题翻译：基板载体具有门锁和基板夹紧机构
公开(公告)号：US06955197B2
公开(公告)日：2005-10-18
申请号：US10650311
申请日：2003-08-28
申请人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
发明人： Martin R. Elliott , Michael R. Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric A. Englhardt
IPC分类号： B65B1/04 , B65H1/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67383 , H01L21/67386 , H01L21/67775 , H01L21/67778 , Y10S414/14
摘要： In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.
摘要翻译：在第一方面，提供了一种自动开门器，其包括：（1）适于支撑衬底载体的平台; （2）门打开机构，其适于在基板载体由平台支撑的同时打开基板载体的门; 和（3）隧道。隧道适于从洁净室壁中的开口延伸到平台并且至少部分地围绕平台。隧道还适于将来自洁净室壁的空气流引向平台并且离开隧道。提供了许多其他方面。

49. 发明授权

US06352403B1 Controlled environment enclosure and mechanical interface 失效
标题翻译：受控环境机柜和机械接口
公开(公告)号：US06352403B1
公开(公告)日：2002-03-05
申请号：US09467104
申请日：1999-12-10
申请人： Boris Fishkin , Seiji Sato , Robert B. Lowrance
发明人： Boris Fishkin , Seiji Sato , Robert B. Lowrance
IPC分类号： B65G4907
CPC分类号： H01L21/67757 , H01L21/67772 , H01L21/67775 , Y10S414/139
摘要： A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having a transfer chamber that is also maintained under vacuum, the transfer chamber having a movable wall in the form of an elevatable stage that sealingly closes the transfer chamber in its outermost position. There is a small sealingly closed interface chamber extending between the movable walls when the cassette is mounted onto the machine. A vacuum pump evacuates the interface chamber in preparation for lowering of the cassette into the transfer chamber by an elevator mechanism.
摘要翻译：用于诸如电子集成电路晶片的真空处理物体的系统包括（a）用于在盒中真空地传送晶片的载体，该盒被支撑在用作载体的底盖构件的可动壁上; 和（b）具有还保持在真空下的传送室的加工机器，所述传送室具有呈可升降台形式的可移动壁，所述可移动壁在其最外侧位置密封地封闭传送室。当盒子安装到机器上时，在可移动壁之间延伸有一个小的密封闭合的界面室。真空泵抽出接口室，准备通过电梯机构将盒子下降到传送室中。

50. 发明授权

US6082948A Controlled environment enclosure and mechanical interface 失效
公开(公告)号：US6082948A
公开(公告)日：2000-07-04
申请号：US312487
申请日：1994-09-26
申请人： Boris Fishkin , Seiji Sato , Robert B. Lowrance
发明人： Boris Fishkin , Seiji Sato , Robert B. Lowrance
IPC分类号： B65G1/00 , B65G49/07 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67757 , H01L21/67772 , H01L21/67775 , Y10S414/139
摘要： A system for vacuum-processing objects such as electronic integrated circuit wafers comprises (a) a carrier for transporting the wafers under vacuum in a cassette, the cassette being supported on a movable wall that serves as a bottom cover member of the carrier; and (b) a processing machine having a transfer chamber that is also maintained under vacuum, the transfer chamber having a movable wall in the form of an elevatable stage that sealingly closes the transfer chamber in its outermost position. There is a small sealingly closed interface chamber extending between the movable walls when the cassette is mounted onto the machine. A vacuum pump evacuates the interface chamber in preparation for lowering of the cassette into the transfer chamber by an elevator mechanism.

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