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    • 49. 发明授权
    • High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
    • 高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
    • US09074957B2
    • 2015-07-07
    • US13880733
    • 2012-05-28
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • G02B27/00G02B1/00G01L11/02G02B26/00G02B5/28G02B6/293
    • G01L11/025G01L11/02G02B5/28G02B5/284G02B6/29358G02B26/001
    • The present invention relates to a high stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method. The sensor includes a sensor head, a sensor body with a through-hole in the axial direction and a optical fiber. The sensor head is a 4-layer structure, which includes the first silicon wafer, the first Pyrex glass wafer, the second silicon wafer and the second Pyrex glass wafer. The rear surface of the first silicon wafer forms the first reflecting surface of the fabry-perot (F-P) cavity, and the second silicon wafer provides the second reflecting surface for the F-P cavity. The second Pyrex glass wafer is welded together with the sensor body. The optical fiber is fixed in the sensor body by a CO2 laser welding to achieve the glue-free packing. When the external pressure is applied to deform the first layer silicon wafer, the F-P cavity length will change. When a broad band source is used, the variation of the cavity length can be obtained by collecting the reflection spectrum or low-coherence interference fringe of the sensor, thus the pressure information can be obtained. The structure of the invention can effectively eliminate the affect of environmental factors, such as temperature and humidity, and greatly promoting the measuring accuracy.
    • 本发明涉及具有无胶包装的高稳定性纤维法布里 - 珀罗压力传感器及其制造方法。 传感器包括传感器头,在轴向具有通孔的传感器本体和光纤。 传感器头是4层结构,其包括第一硅晶片,第一Pyrex玻璃晶片,第二硅晶片和第二Pyrex玻璃晶片。 第一硅晶片的后表面形成fabry-perot(F-P)腔的第一反射表面,而第二硅晶片为F-P腔提供第二反射表面。 第二个Pyrex玻璃晶片与传感器主体焊接在一起。 光纤通过CO2激光焊接固定在传感器主体中,实现无胶包装。 当施加外部压力以使第一层硅晶片变形时,F-P腔体长度将改变。 当使用宽带源时,可以通过收集传感器的反射光谱或低相干干涉条纹来获得腔长度的变化,从而可以获得压力信息。 本发明的结构能有效消除温湿度等环境因素的影响,大大提高了测量精度。
    • 50. 发明申请
    • High stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method
    • 高稳定纤维法布里 - 珀罗压力传感器,无胶包装及其制造方法
    • US20140208858A1
    • 2014-07-31
    • US13880733
    • 2012-05-28
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • Junfeng JiangTiegen LiuJinde YinKun LiuYu Liu
    • G01L11/02
    • G01L11/025G01L11/02G02B5/28G02B5/284G02B6/29358G02B26/001
    • The present invention relates to a high stable fiber fabry-perot pressure sensor with glue-free packing and its fabrication method. The sensor includes a sensor head, a sensor body with a through-hole in the axial direction and a optical fiber. The sensor head is a 4-layer structure, which includes the first silicon wafer, the first Pyrex glass wafer, the second silicon wafer and the second Pyrex glass wafer. The rear surface of the first silicon wafer forms the first reflecting surface of the fabry-perot (F-P) cavity, and the second silicon wafer provides the second reflecting surface for the F-P cavity. The second Pyrex glass wafer is welded together with the sensor body. The optical fiber is fixed in the sensor body by a CO2 laser welding to achieve the glue-free packing When the external pressure is applied to deform the first layer silicon wafer, the F-P cavity length will change. When a broad band source is used, the variation of the cavity length can be obtained by collecting the reflection spectrum or low-coherence interference fringe of the sensor, thus the pressure information can be obtained. The structure of the invention can effectively eliminate the affect of environmental factors, such as temperature and humidity, and greatly promoting the measuring accuracy.
    • 本发明涉及具有无胶包装的高稳定性纤维法布里 - 珀罗压力传感器及其制造方法。 传感器包括传感器头,在轴向具有通孔的传感器本体和光纤。 传感器头是4层结构,其包括第一硅晶片,第一Pyrex玻璃晶片,第二硅晶片和第二Pyrex玻璃晶片。 第一硅晶片的后表面形成fabry-perot(F-P)腔的第一反射表面,而第二硅晶片为F-P腔提供第二反射表面。 第二个Pyrex玻璃晶片与传感器主体焊接在一起。 光纤通过CO2激光焊接固定在传感器主体中,实现无胶包装当施加外部压力使第一层硅晶片变形时,F-P腔体长度将发生变化。 当使用宽带源时,可以通过收集传感器的反射光谱或低相干干涉条纹来获得腔长度的变化,从而可以获得压力信息。 本发明的结构能有效消除温湿度等环境因素的影响,大大提高了测量精度。