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    • 43. 发明授权
    • Cantilever and method of using same to detect features on a surface
    • 悬臂和使用它的方法来检测表面上的特征
    • US5483822A
    • 1996-01-16
    • US238546
    • 1994-05-05
    • Thomas AlbrechtMarco TortoneseRobert Barrett
    • Thomas AlbrechtMarco TortoneseRobert Barrett
    • G01B7/16G01B20060101G01B7/34G01B21/30G01L20060101G01L1/18G01Q20/04G01Q60/38G01Q60/40G01Q70/02H01J37/28H01L21/34
    • G01Q60/38B82Y35/00G01Q20/04Y10S977/851Y10S977/873
    • A microminiature cantilever structure is provided having a cantilever arm with a piezoresistive resistor embedded in at least the fixed end of the cantilever arm. Deflection of the free end of the cantilever arm produces stress in the base of the cantilever. That stress changes the piezoresistive resistor's resistance at the base of the cantilever in proportion to the cantilever arm's deflection. Resistance measuring apparatus is coupled to the piezoresistive resistor to measure its resistance and to generate a signal corresponding to the cantilever arm's deflection. The microminiature cantilever is formed on a semiconductor substrate. A portion of the free end of the cantilever arm is doped to form an electrically separate U-shaped piezoresistive resistor. The U-shaped resistor has two legs oriented parallel to an axis of the semiconductor substrate having a non-zero piezoresistive coefficient. A metal layer is deposited over the semiconductor's surface and patterned to form an electrical connection between the piezoresistive resistor and a resistance measuring circuit, enabling measurement of the piezoresistive resistor's resistance. Finally, the semiconductor substrate below said cantilever arm is substantially removed so as to form a cantilevered structure, and a tip is connected to the free end of the cantilever arm to facilitate the structure's use in an atomic force microscope.
    • 提供了一种微型悬臂结构,其具有悬臂,其具有嵌入到悬臂的至少固定端的压阻电阻器。 悬臂的自由端的偏转在悬臂的底部产生应力。 该应力与悬臂的偏转成比例地改变了压阻电阻器在悬臂底部的电阻。 电阻测量装置耦合到压阻电阻器以测量其电阻并产生对应于悬臂的偏转的信号。 微型悬臂形成在半导体衬底上。 掺杂悬臂的自由端的一部分以形成电分离的U形压阻电阻器。 U形电阻器具有平行于具有非零压阻系数的半导体衬底的轴线定向的两个腿。 金属层沉积在半导体表面上并被图案化以在压阻电阻器和电阻测量电路之间形成电连接,使得能够测量压阻电阻器的电阻。 最后,基本上除去所述悬臂下面的半导体衬底以形成悬臂结构,并且尖端连接到悬臂的自由端,以便于结构在原子力显微镜中的使用。
    • 44. 发明授权
    • Atomic force microscope having cantilever with piezoresistive deflection
sensor
    • 具有压阻偏转传感器的悬臂的原子力显微镜
    • US5345815A
    • 1994-09-13
    • US954695
    • 1992-09-30
    • Thomas AlbrechtMarco TortoneseRobert Barrett
    • Thomas AlbrechtMarco TortoneseRobert Barrett
    • G01B7/16G01B20060101G01B7/34G01B21/30G01L20060101G01L1/18G01Q20/04G01Q60/38G01Q60/40G01Q70/02H01J37/28H01L21/34
    • G01Q60/38B82Y35/00G01Q20/04Y10S977/851Y10S977/873
    • A microminiature cantilever structure is provided having a cantilever arm with a piezoresistive resistor embedded in at least the fixed end of the cantilever arm. Deflection of the free end of the cantilever arm produces stress in the base of the cantilever. That stress changes the piezoresistive resistor's resistance at the base of the cantilever in proportion to the cantilever arm's deflection. Resistance measuring apparatus is coupled to the piezoresistive resistor to measure its resistance and to generate a signal corresponding to the cantilever arm's deflection. The microminiature cantilever is formed on a semiconductor substrate. A portion of the free end of the cantilever arm is doped to form an electrically separate U-shaped piezoresistive resistor. The U-shaped resistor has two legs oriented parallel to an axis of the semiconductor substrate having a non-zero piezoresistive coefficient. A metal layer is deposited over the semiconductor's surface and patterned to form an electrical connection between the piezoresistive resistor and a resistance measuring circuit, enabling measurement of the piezoresistive resistor's resistance. Finally, the semiconductor substrate below the cantilever arm is substantially removed so as to form a cantilevered structure, and a tip is connected to the free end of the cantilever arm to facilitate the structure's use in an atomic force microscope.
    • 提供了一种微型悬臂结构,其具有悬臂,其具有嵌入到悬臂的至少固定端的压阻电阻器。 悬臂的自由端的偏转在悬臂的底部产生应力。 该应力与悬臂的偏转成比例地改变了压阻电阻器在悬臂底部的电阻。 电阻测量装置耦合到压阻电阻器以测量其电阻并产生对应于悬臂的偏转的信号。 微型悬臂形成在半导体衬底上。 掺杂悬臂的自由端的一部分以形成电分离的U形压阻电阻器。 U形电阻器具有平行于具有非零压阻系数的半导体衬底的轴线定向的两个腿。 金属层沉积在半导体表面上并被图案化以在压阻电阻器和电阻测量电路之间形成电连接,使得能够测量压阻电阻器的电阻。 最后,基本上移除悬臂下面的半导体衬底以形成悬臂结构,并且尖端连接到悬臂的自由端,以便于结构在原子力显微镜中的使用。
    • 49. 发明申请
    • Blow Mold
    • 吹塑模具
    • US20120052147A1
    • 2012-03-01
    • US13219585
    • 2011-08-26
    • Christian StoiberThomas Albrecht
    • Christian StoiberThomas Albrecht
    • B29C49/48B29C49/56B29C33/02B29C49/28
    • B29C49/56B29C33/26B29C49/36B29C49/42B29C49/4236B29C49/4823B29C2049/1252B29C2049/4892
    • A blow mold having at least two mold parts, mold support shells containing the mold parts, a mold support at least for supporting the mold support shells, motion drives for opening and closing the blow mold, and a locking means adjustable at least in the direction of the mold cavity axis relative to the mold support shells for locking the closed blow mold and for supporting the mold parts against forces from the blow molding process. The locking means has at least one locking sleeve with an at least conical inner wall manufactured using high-strength fiber material, which can be slid with the inner wall onto conical outer surface areas of the mold support shells and supports the mold parts across essentially the complete height of the mold cavity in a locking manner.
    • 具有至少两个模具部件的吹塑模具,包含模具部件的模具支撑壳体,至少用于支撑模具支撑壳体的模具支撑件,用于打开和关闭吹塑模具的运动驱动器,以及至少在方向上可调节的锁定装置 的模具腔轴线相对于模具支撑壳体,用于锁定封闭的吹塑模具并且用于支撑来自吹塑成型工艺的力的模具部件。 锁定装置具有至少一个锁定套筒,其具有使用高强度纤维材料制成的至少锥形的内壁,其可以与内壁一起滑动到模具支撑壳体的锥形外表面区域上,并且基本上支撑模具部件 模具腔的完整高度以锁定方式。