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    • 44. 发明授权
    • Measurement method of layer thickness for thin film stacks
    • 薄膜叠层厚度测量方法
    • US07751527B2
    • 2010-07-06
    • US12292178
    • 2008-11-13
    • Kazuhiro UedaAkio Yoneyama
    • Kazuhiro UedaAkio Yoneyama
    • G03H5/00
    • G01B15/02G01N23/20075
    • Provided is a thin film stack inspection method capable of accurately measuring and inspecting layer thicknesses of thin film stacks. An X-ray having a long coherence length is used as an incident X-ray and the X-ray specular-reflected from a sample placed on a goniometer is partially bent by a prism. The X-ray bent by the prism and the X-ray going straight are made to interfere with each other to obtain interference patterns. Though being thin film stacks, the sample has a portion having no thin film and thus an exposed substrate. The X-ray not bent by the prism includes an X-ray specular-reflected from the exposed substrate. By changing the incident angle from 0.01° to 1°, the interference patterns of the specular-reflected X-ray are measured. Thus, layer thicknesses are measured using a change in a phase of the X-ray reflected from a film stack interface.
    • 提供了能够精确地测量和检查薄膜叠层的层厚度的薄膜堆叠检查方法。 使用具有长相干长度的X射线作为入射X射线,并且从放置在测角器上的样品镜面反射的X射线被棱镜部分地弯曲。 由棱镜弯曲的X射线和X射线直线相互干涉以获得干涉图案。 虽然是薄膜堆叠,但是样品具有不具有薄膜的部分,因此具有暴露的基板。 由棱镜未弯曲的X射线包括从暴露的基底镜面反射的X射线。 通过将入射角从0.01°改为1°,测量镜面反射X射线的干涉图。 因此,使用从膜堆叠界面反射的X射线的相位变化来测量层厚度。
    • 45. 发明申请
    • DEFROSTER NOZZLE
    • DEFROSTER喷嘴
    • US20100062702A1
    • 2010-03-11
    • US12530132
    • 2008-02-21
    • Kazuhiro UedaTadahiro MatsumotoTakehiko Iwamura
    • Kazuhiro UedaTadahiro MatsumotoTakehiko Iwamura
    • B60S1/54
    • B60H1/3407B60H1/00564B60H1/242
    • Provided is a defroster nozzle 4 which blows out air to an inner surface of a windshield 2 of a vehicle 1. The defroster nozzle 4 includes center-duct 45 forming member 41 and two end-portion-duct forming members 50. The center-duct 45 forming member 41 forms a center duct through which the air circulates, and has a center ventilation outlet 47 through which the air in the center duct is blown out to the inner surface of the windshield 2. The two end-portion-duct 54 forming members 50 are coupled respectively to two joint end portions 42, on outer sides in the vehicle width direction, of the center-duct forming member 41. Each end-portion-duct forming member 50 forms an end-portion duct which communicates with the center duct, and each end-portion-duct forming member 50 has an end-portion ventilation outlet 55 through which the air in the end-portion duct is blown out to the inner surface of the windshield 2. Each of the end-portion-duct forming members 50 is coupled to the center-duct forming member 41 so as to be capable of tilting relative to the center-duct forming member 41.
    • 设有将空气吹出到车辆1的挡风玻璃2的内表面的除霜喷嘴4.除霜器喷嘴4包括中心管45形成部件41和两个端部部分导管形成部件50.中心管 45形成构件41形成空气循环的中心管道,并且具有中心通风出口47,中心管道中的空气通过该中心通风出口吹送到挡风玻璃2的内表面。两个端部管道54形成 构件50分别连接到中心管形成构件41的车宽方向的外侧的两个接合端部42.每个端部管道形成构件50形成与中心管道形成构件41连通的端部管道 每个端部管道形成构件50具有端部通风出口55,端部管道中的空气通过该端部通风出口55吹送到挡风玻璃2的内表面。每个端部管道 成形构件50联接到中心管 形成构件41能够相对于中心管形成构件41倾斜。
    • 47. 发明申请
    • Inspection method for thin film stack
    • 薄膜叠层检测方法
    • US20080219409A1
    • 2008-09-11
    • US12071021
    • 2008-02-14
    • Kazuhiro Ueda
    • Kazuhiro Ueda
    • G01B15/02
    • G01B15/02
    • An X-ray reflectivity measuring method is provided to measure and inspect, with higher accuracy, film thickness of a thin film stack as a sample where a thick film is provided on the thin film stack. This X-ray reflectivity measuring method can measure X-ray reflectivity of the thin film stack embedded within a thick film by applying the X-ray focused to ⅓ or less the thickness of a thick film on the thin film stack to an end surface of the thick film, transmitting the X-ray through the thick film, thereafter applying the X-ray to the thin film stack, transmitting again the reflected X-ray to the thick film, and then extracting the reflection X-ray from the end surface in the opposite side of the incident surface and also can inspect film thickness of the thin film stack embedded in the thick film with the Fourier transformation method and the minimum square analysis method with the theoretical curve.
    • 提供了一种X射线反射率测量方法,以较高精度测量和检查薄膜叠层的膜厚,作为在薄膜叠层上设置厚膜的样品。 该X射线反射率测量方法可以通过将X射线聚焦到薄膜堆叠上的厚膜的厚度的1/3或更小来测量在薄膜中嵌入的薄膜堆叠的X射线反射率到一端 通过厚膜透射X射线,然后将X射线施加到薄膜叠层,再次将反射的X射线透射到厚膜,然后从该膜中提取反射X射线 在入射表面的相对侧的端面,也可以用傅里叶变换法和最小平方分析法与理论曲线一起检查嵌入厚膜中的薄膜堆叠膜的厚度。
    • 49. 发明授权
    • Document orientation recognizing device which recognizes orientation of document image
    • 识别文件图像取向的文档取向识别装置
    • US06798905B1
    • 2004-09-28
    • US09350128
    • 1999-07-09
    • Hiroshi SugiuraShoji ImaizumiKazuhiro Ueda
    • Hiroshi SugiuraShoji ImaizumiKazuhiro Ueda
    • G06K900
    • G06K9/3208
    • An image of a document is divided into a plurality of areas, and a reliability is obtained for each area for a case where an image of the area is used in orientation detection. The reliability is obtained from characteristics of the shape of a histogram generated from image data of the area, as follows. The histogram is divided into a plurality of sections, and an MTF value is calculated for each section by dividing a difference of the max and min values of the section by the sum of the max and min values. A mean value of the MTF values calculated for all of the sections of the histogram is set as the reliability of the area. The orientation detection processing is performed on the area whose reliability is the highest, and an orientation result obtained through the orientation detection processing is judged as the orientation of the image of the document.
    • 文档的图像被分成多个区域,并且对于在方向检测中使用该区域的图像的情况,对于每个区域获得可靠性。 从如下区域的图像数据生成的直方图的形状的特征获得可靠性。 直方图被分成多个部分,并且通过将该部分的最大值和最小值的差除以最大值和最小值之和来计算每个部分的MTF值。 将直方图的所有部分计算的MTF值的平均值设置为该区域的可靠性。 对可靠性最高的区域进行取向检测处理,将通过取向检测处理得到的取向结果判断为文件的图像的取向。