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41. 发明授权

US08471477B2 Substrate processing apparatus and method of manufacturing semiconductor device 失效
标题翻译：基板处理装置及半导体装置的制造方法
公开(公告)号：US08471477B2
公开(公告)日：2013-06-25
申请号：US13071227
申请日：2011-03-24
申请人： Masayuki Tomita , Katsunori Funaki , Shinji Yashima , Ryuichi Shimada
发明人： Masayuki Tomita , Katsunori Funaki , Shinji Yashima , Ryuichi Shimada
IPC分类号： H05B31/26
CPC分类号： H01J37/32183 , H01J37/32091
摘要： A processing speed may be easily controlled over the wide range within the impedance variation range. A substrate processing apparatus includes: a processing chamber configured to process a substrate; a substrate support unit configured to support the substrate in the processing chamber; a processing gas supply unit configured to supply a processing gas into the processing chamber; a plasma generation electrode configured to convert the processing gas supplied into the processing chamber to be in a plasma state; a radio frequency power source configured to apply a radio frequency power to the plasma generation electrode; a variable impedance electrode installed at the substrate support unit and configured to control an electric potential of the substrate; a variable impedance mechanism connected to the variable impedance electrode and configured to vary an impedance according to a reciprocal of a peak-to-peak voltage of the plasma generation electrode; an exhaust unit configured to exhaust an atmosphere in the processing chamber; and a controller configured to control at least the variable impedance mechanism.
摘要翻译：可以在阻抗变化范围内的宽范围内容易地控制处理速度。基板处理装置包括：处理室，被配置为处理基板; 衬底支撑单元，其构造成在所述处理室中支撑所述衬底; 处理气体供给单元，其构造成将处理气体供给到所述处理室中; 等离子体产生电极，被配置为将供应到处理室中的处理气体转换成等离子体状态; 射频电源，被配置为向所述等离子体产生电极施加射频电力; 可变阻抗电极，其安装在所述基板支撑单元处并且被配置为控制所述基板的电位; 连接到所述可变阻抗电极并被配置为根据所述等离子体产生电极的峰 - 峰电压的倒数改变阻抗的可变阻抗机构; 排气单元，其构造成排出处理室中的气氛; 以及控制器，被配置为至少控制所述可变阻抗机构。

42. 发明申请

US20090107453A1 MULTI-LINK ENGINE 有权
标题翻译：多连杆发动机
公开(公告)号：US20090107453A1
公开(公告)日：2009-04-30
申请号：US12255390
申请日：2008-10-21
申请人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
发明人： Naoki Takahashi , Masayuki Tomita , Kenshi Ushijima , Koji Hiraya , Hirofumi Tsuchida , Shunichi Aoyama
IPC分类号： F02B75/32
CPC分类号： F02B75/048
摘要： A multi-link engine has a piston coupled to a crankshaft to move inside an engine cylinder. A piston pin connects the piston to an upper link, which is connected to a lower link by an upper link pin. A crank pin of the crankshaft rotatably supports the lower link thereon. A control link pin connects the lower link to one end of a control link, which is connected at another end to the engine block body by a control shaft. The upper link has an upper link axis that forms an angle with the cylinder axis, as viewed along a crank axis direction of the crankshaft, such that the angle reaches a minimum when a crank angle of the engine is within a range where the bottom end of a piston skirt is positioned below a topmost part of the bottom end of the cylinder liner.
摘要翻译：多连杆发动机具有联接到曲轴以在发动机气缸内移动的活塞。活塞销将活塞连接到上连杆，上连杆通过上连杆销连接到下连杆。曲轴的曲柄销可旋转地支撑其上的下连杆。控制连杆销将下连杆连接到控制链节的另一端，控制链通过控制轴连接到发动机机体。上部连杆具有与曲轴的曲柄轴方向观察时与气缸轴线形成角度的上连杆轴，使得当发动机的曲轴角度在下端活塞裙部位于气缸套的底端的最上部的下方。

43. 发明申请

US20080275095A1 Combination of Prostaglandin E2 Receptor Antagonists and Renin-Angiotensin System Inhibitors for Treating Renal Diseases 审中-公开
标题翻译：前列腺素E2受体拮抗剂和肾素 - 血管紧张素系统抑制剂联合用于治疗肾脏疾病
公开(公告)号：US20080275095A1
公开(公告)日：2008-11-06
申请号：US11579507
申请日：2005-03-28
申请人： Hajime Sogabe , Masayuki Tomita , Shoko Nakazato
发明人： Hajime Sogabe , Masayuki Tomita , Shoko Nakazato
IPC分类号： A61K31/421 , A61P13/12
CPC分类号： A61K45/06 , A61K31/401 , A61K31/421 , A61K2300/00
摘要： This invention relates to methods for treating renal diseases by using combination of prostaglandin E2 receptor antagonist and renin-angiotensin system inhibitor and pharmaceutical compositions for treating renal diseases comprising prostaglandin E2 receptor antagonist and renin-angiotensin system inhibitor.
摘要翻译：本发明涉及通过使用前列腺素E2受体拮抗剂和肾素 - 血管紧张素系统抑制剂的组合治疗肾病的方法和用于治疗包含前列腺素E2受体拮抗剂和肾素 - 血管紧张素系统抑制剂的肾病的药物组合物。

44. 发明申请

US20060266326A1 Control apparatus and method for inner cylinder direct injection spark ignited internal combustion engine 失效
标题翻译：内筒直喷火花点火内燃机控制装置及方法
公开(公告)号：US20060266326A1
公开(公告)日：2006-11-30
申请号：US11443178
申请日：2006-05-31
申请人： Makoto Yasunaga , Tomoyuki Takeda , Akira Nakajima , Taizo Horikomi , Daisuke Takaki , Katsuaki Uchiyama , Masatoshi Hidaka , Hitoshi Ishii , Tomoyuki Shigefuji , Masayuki Tomita , Mitsuhiro Akagi
发明人： Makoto Yasunaga , Tomoyuki Takeda , Akira Nakajima , Taizo Horikomi , Daisuke Takaki , Katsuaki Uchiyama , Masatoshi Hidaka , Hitoshi Ishii , Tomoyuki Shigefuji , Masayuki Tomita , Mitsuhiro Akagi
IPC分类号： F02B17/00 , F02B3/00 , F02P5/00 , F01N3/00
CPC分类号： F02D41/0255 , F02D37/02 , F02D41/3836 , F02D41/401 , F02D41/402 , F02D2041/389 , F02D2200/0602 , F02D2200/0606 , Y02T10/26 , Y02T10/44
摘要： In control apparatus and method for an inner cylinder spark ignited internal combustion engine having a fuel injection valve configured to directly inject fuel into an inside of an engine cylinder and a spark plug, a super retard combustion is executed to set an ignition timing after a compression stroke top dead center and to inject fuel before the ignition timing and after the compression stroke top dead center during a predetermined engine driving condition and at least part of fuel is injected before the compression stroke top dead center to decrease a fuel injection quantity after the compression stroke top dead center during an interval which is immediately after an engine start and in which a pressure of fuel is relatively low.
摘要翻译：在具有配置成将燃料直接喷射到发动机气缸和火花塞内部的燃料喷射阀的内筒火花点火内燃机的控制装置和方法中，执行超级燃烧以在压缩之后设定点火正时并且在预定的发动机驱动条件之前，在点火正时之前和压缩冲程中止点之后喷射燃料，并且在压缩冲程上死点之前喷射至少一部分燃料以减少压缩后的燃料喷射量在发动机启动之后的时间间隔内的行程上止点，其中燃料的压力相对较低。

45. 发明授权

US07117666B2 Direct fuel injection/spark ignition engine control device 失效
标题翻译：直接燃油喷射/火花点火发动机控制装置
公开(公告)号：US07117666B2
公开(公告)日：2006-10-10
申请号：US10960692
申请日：2004-10-08
申请人： Masayuki Tomita , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Mitsuhiro Akagi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masahiro Fukuzumi
发明人： Masayuki Tomita , Tsutomu Kikuchi , Yuichi Iriya , Hitoshi Ishii , Mitsuhiro Akagi , Katsuaki Uchiyama , Masahiko Yuya , Takao Maitani , Masahiro Fukuzumi
IPC分类号： F01N3/00
CPC分类号： F02D41/3029 , F02D37/02 , F02D41/0002 , F02D41/024 , F02D41/402 , F02D2041/389 , Y02T10/26 , Y02T10/44
摘要： An engine control device is configured to cause an engine to operate at the optimum combustion mode according to the load when warming up of an emissions purification catalyst is required, and to obtain reduced HC discharged from the engine and accelerated warm-up of the catalyst. The engine control device performs stratified combustion with a compression stroke injection in a low-load region according to the engine load, and performs double-injection combustion with an intake stroke injection and a compression stroke injection in an intermediate load region, when warming up of the catalyst is required. In a high-load region, the engine control device performs homogenous combustion with an intake stroke injection.
摘要翻译：发动机控制装置构造成使发动机在需要排气净化催化剂的预热时根据负载以最佳燃烧模式运转，并且获得从发动机排出的减少的HC并促进催化剂的预热。发动机控制装置根据发动机负荷在低负荷区域中进行压缩冲程喷射的分层燃烧，并且在中间载荷区域中进行进气冲程喷射和压缩冲程喷射时的双重喷射燃烧，需要催化剂。在高负荷区域中，发动机控制装置进行进气冲程喷射的均匀燃烧。

46. 发明申请

US20060016425A1 Combustion control apparatus for direct-injection spark-ignition internal combustion engine 有权
标题翻译：直喷式火花点火内燃机燃烧控制装置
公开(公告)号：US20060016425A1
公开(公告)日：2006-01-26
申请号：US11189058
申请日：2005-07-26
申请人： Toshiya Kono , Hitoshi Ishii , Mitsuhiro Akagi , Katsuaki Uchiyama , Masayuki Tomita , Akira Nakajima , Taro Sakai , Masatoshi Hidaka
发明人： Toshiya Kono , Hitoshi Ishii , Mitsuhiro Akagi , Katsuaki Uchiyama , Masayuki Tomita , Akira Nakajima , Taro Sakai , Masatoshi Hidaka
IPC分类号： F02B5/00 , F02P5/00
CPC分类号： F02D41/0002 , F01N3/20 , F02B17/005 , F02B23/104 , F02B31/085 , F02B2075/125 , F02B2275/48 , F02D41/1446 , F02D41/3809 , F02D41/401 , F02D2041/0015 , F02D2200/0404 , F02D2200/0802 , F02M69/045 , F02P5/045 , Y02T10/123 , Y02T10/125 , Y02T10/42 , Y02T10/44
摘要： A combustion control apparatus configured to operate a direct-injection spark-ignition internal combustion engine in a top dead center injection operating mode. In the top dead center injection operating mode, a fuel injection start timing is set to be before compression top dead center, a fuel injection end timing is set to be after compression top dead center, and an ignition timing is set to be after compression top dead center. The combustion control apparatus is configured to promote incylinder fuel spray penetration.
摘要翻译：一种燃烧控制装置，其构造成在上止点喷射运行模式中操作直喷式火花点火内燃机。在上止点喷射运行模式中，将燃料喷射开始正时设定为压缩上止点之前，将燃料喷射结束定时设定为压缩上止点之后，将点火正时设定为压缩前后死中心燃烧控制装置被构造成促进燃料喷射穿透。

47. 发明申请

US20050161018A1 Direct fuel injection/spark ignition engine control device 失效
标题翻译：直接燃油喷射/火花点火发动机控制装置
公开(公告)号：US20050161018A1
公开(公告)日：2005-07-28
申请号：US11038645
申请日：2005-01-21
申请人： Masayuki Tomita
发明人： Masayuki Tomita
IPC分类号： F02P5/15 , F01N3/20 , F01N3/24 , F02D37/02 , F02D41/02 , F02D41/06 , F02D41/30 , F02D41/34 , F02D41/40 , F02D43/00
CPC分类号： F02D37/02 , F02D41/401 , F02D41/403 , F02D41/405 , F02D2041/389 , Y02T10/44
摘要： A control apparatus is configured to enhance turbulence in the cylinder produced by the fuel spray, and to improve combustion stability (promote flame propagation) in an ATDC designed to reduce HC and/or achieve early activation of the catalyst. Ignition timing is set to compression top dead center (TDC) or later when needed such as when the catalyst requires warming. In one fuel injection timing, the fuel is injected in two fuel injections with a first fuel injection occurring during the compression stroke, and the second fuel injection being carried out at 45° BTDC or later.
摘要翻译：控制装置被配置为增强由燃料喷雾产生的气缸中的湍流，并且改善设计成减少HC的催化剂和/或实现催化剂的早期活化的ATDC中的燃烧稳定性（促进火焰传播）。点火正时设定为压缩上止点（TDC）或更高时间，如需要时，如催化剂需要升温。在一个燃料喷射正时中，在压缩行程中发生第一次燃料喷射的两次燃料喷射中喷射燃料，并且第二次燃料喷射在BTDC或更晚的45°时进行。

48. 发明授权

US06408816B1 Control apparatus and method for direct-injection spark-ignition internal combustion engine 有权
标题翻译：直喷式火花点火内燃机的控制装置及方法
公开(公告)号：US06408816B1
公开(公告)日：2002-06-25
申请号：US09658661
申请日：2000-09-08
申请人： Masayuki Tomita , Kimiyoshi Nishizawa
发明人： Masayuki Tomita , Kimiyoshi Nishizawa
IPC分类号： F02B1700
CPC分类号： F02D41/402 , F02B2075/125 , F02D41/0255 , F02D41/1473 , F02D41/3023 , Y02T10/123 , Y02T10/26 , Y02T10/44
摘要： A control apparatus and method for a direct-injection spark-ignition internal combustion engine in which a stratified combustion is performed to raise an exhaust temperature under a condition prior to a completion of an engine warm-up. The stratified combustion is provided with a lean air-fuel mixture formed over a whole combustion chamber through a fuel injection at a suction stroke and a rich air-fuel mixture formed in an inner space surrounding a spark plug at the combustion chamber through a fuel injection at a compression stroke and a fuel injection quantity of the fuel injection at the suction stroke. A fuel injection quantity of the fuel injection at the compression stroke is corrected by use of a feedback correction coefficient so that an average air-fuel ratio over the whole combustion chamber is controlled to be a predetermined target air-fuel ratio.
摘要翻译：一种用于直喷式火花点火内燃机的控制装置和方法，其中在发动机预热完成之前的条件下进行分层燃烧以提高排气温度。分层燃烧设置有通过在吸入行程处的燃料喷射在整个燃烧室上形成的贫空燃混合物，以及通过燃料喷射形成在燃烧室周围的火花塞周围的内部空间中的浓空气燃料混合物在压缩行程和在吸入行程处的燃料喷射的燃料喷射量。通过使用反馈校正系数来校正压缩冲程的燃料喷射的燃料喷射量，使得整个燃烧室的平均空燃比被控制为预定的目标空燃比。

49. 发明授权

US5960159A Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety 失效
标题翻译：半导体晶片的热处理，其中上加热器直接加热整个上晶片，下加热器直接加热下晶片
公开(公告)号：US5960159A
公开(公告)日：1999-09-28
申请号：US950185
申请日：1997-10-14
申请人： Fumihide Ikeda , Junichi Machida , Masayuki Tomita , Yasuhiro Inokuchi , Kazuhiro Shimeno , Hisashi Nomura , Tetsuaki Inada
发明人： Fumihide Ikeda , Junichi Machida , Masayuki Tomita , Yasuhiro Inokuchi , Kazuhiro Shimeno , Hisashi Nomura , Tetsuaki Inada
IPC分类号： H01L21/00 , F26B3/30
CPC分类号： H01L21/67109
摘要： A substrate processing apparatus includes a substrate supporting pedestal having an upper substrate supporting pedestal and a lower substrate supporting pedestal which are vertically stacked, an upper resistance heater provided above the upper substrate supporting pedestal so as to be opposite to the upper substrate supporting pedestal, and a lower resistance heater provided under the lower substrate supporting pedestal so as to be opposite to the lower substrate supporting pedestal. Each of the upper substrate supporting pedestal and the lower substrate supporting pedestal is capable of mounting a substrate or substrates in a substantially horizontal position, and the lower substrate supporting pedestal including an opening which exposes the substrate in its entirety or openings which expose the substrates in their entireties as viewed from under the lower substrate supporting pedestal.
摘要翻译：基板处理装置包括：具有上基板支撑基座的基板支撑基座和垂直堆叠的下基板支撑基座;上电阻加热器，设置在上基板支撑基座的上方，以与上基板支撑基座相对;以及设置在下基板支撑基座下方以与下基板支撑基座相对的下电阻加热器。上基板支撑基座和下基板支撑基座中的每一个能够将基板或基板安装在基本水平的位置，并且下基板支撑基座包括将基板全部曝光的开口或露出基板的开口它们的整体从下基板支撑底座下方观察。

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