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    • 42. 发明申请
    • Microfeature dies with porous regions, and associated methods and systems
    • 具有多孔区域的微特征,以及相关的方法和系统
    • US20070099397A1
    • 2007-05-03
    • US11634417
    • 2006-12-04
    • Kyle KirbyPaul Morgan
    • Kyle KirbyPaul Morgan
    • H01L21/00
    • H01L21/76898H01L21/02126H01L21/02203H01L21/02321H01L21/02323H01L21/02337H01L21/02343H01L21/02351H01L21/31695H01L21/743H01L21/78
    • Microfeature dies with porous regions, and associated methods and systems are disclosed. A method in accordance with one embodiment of the invention includes forming a porous region between a die and a remainder portion of a microfeature workpiece, and separating the die from the remainder portion by removing at least a portion of the porous region. For example, the die can be removed from the remainder portion by making a cut at the porous region (e.g., with a rotating saw blade), etching material from the porous region, or directing a water jet at the porous region. In other embodiments, a porous region of the microfeature workpiece can receive conductive material to form a conductive pathway (e.g., a line and/or via) in the workpiece. In still further embodiments, the porous regions of the workpiece can be formed electrolytically with electrodes that are spaced apart from the workpiece and/or support relative movement between the electrodes and the workpiece.
    • 具有多孔区域的微特征模具以及相关方法和系统被公开。 根据本发明的一个实施例的方法包括在模具和微特征工件的剩余部分之间形成多孔区域,并且通过去除多孔区域的至少一部分将模具与其余部分分离。 例如,通过在多孔区域(例如,利用旋转的锯片)进行切割,从多孔区域蚀刻材料,或者在多孔区域引导水射流,可以将模具从剩余部分中除去。 在其他实施例中,微特征工件的多孔区域可以接收导电材料以在工件中形成导电路径(例如,线路和/或通孔)。 在另外的实施例中,可以用与工件间隔开的电极和/或支撑电极和工件之间的相对运动来电解形成工件的多孔区域。