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    • 44. 发明授权
    • Substrate processing method and substrate processing system
    • 基板加工方法和基板处理系统
    • US07445689B2
    • 2008-11-04
    • US10682005
    • 2003-10-08
    • Masahiro YoshidaYasuhiro Chouno
    • Masahiro YoshidaYasuhiro Chouno
    • C23F1/00H01L21/306
    • H01L21/67751H01L21/67167H01L21/67178H01L21/6719H01L21/67236Y10S414/135
    • The substrate processing system has an ozone generator that generates and supplies an ozone-containing gas to plural or N (N is a natural number not less than 2) ozone process units. The ozone generator has capacity of supplying the first processing fluid to only N−n of the first processing units simultaneously at respective supply rates each in accordance with a demand for appropriately performing the first process in each of the first processing units, where n is a natural number and N−n is not less than 2. A controller that controls a timing of loading of the substrate into the ozone process units by the conveyer so as to avoid a case where more than N−n of the first processing units are simultaneously carrying out the first treatment each using the first processing fluid, where n is a natural number and N−n is not less than 2.
    • 基板处理系统具有臭氧发生器,该臭氧发生器产生并供给含臭氧的气体至多个或N(N为自然数不少于2个)臭氧处理单元。 臭氧发生器具有根据在每个第一处理单元中适当地执行第一处理的需求以相应的供给速率同时向第一处理单元中的Nn提供第一处理流体的能力,其中n是自然数 Nn不小于2.一种控制器,其控制由输送机将基板装载到臭氧处理单元中的定时,以避免多于Nn个第一处理单元同时进行第一处理的情况 使用第一处理流体,其中n是自然数,Nn不小于2。
    • 46. 发明授权
    • Starting control method, duplex platform system, and information processor
    • 启动控制方式,双工平台系统和信息处理器
    • US07428660B2
    • 2008-09-23
    • US11304565
    • 2005-12-16
    • Masahiro Yoshida
    • Masahiro Yoshida
    • G06F11/00
    • G06F11/2038G05B19/0421G06F11/0709G06F11/0757G06F11/1417
    • There is disclosed a system equipped with information processors of control and standby systems interconnected to communicate with each other. The information processor of the control system executes a POST operation and a starting operation (S101 to S103), and instructs execution of a POST operation to the information processor of the standby system after completion of the starting operation (S104). Meanwhile, the information processor of the standby system monitors an operation of the control system (S106), executes the POST operation upon reception of the instruction from the control system (S107), and requests synchronization with its own device to the information processor of the control system upon completion of the POST operation (S108). The information processor of the control system copies information regarding the starting operation executed by its own device upon reception of the synchronization request, thereby starting a synchronous operation with the device (S109 to S110). Thus, the system that uses a dual platform technology is easily started.
    • 公开了一种配备有互连以便彼此通信的控制和备用系统的信息处理器的系统。 控制系统的信息处理器执行POST操作和启动操作(S101至S103),并且在完成启动操作之后指示执行POST操作给备用系统的信息处理器(S104)。 同时,备用系统的信息处理器监视控制系统的操作(S106),在从控制系统接收到指令的情况下执行POST操作(S107),并请求与其自己的设备同步到信息处理器 完成POST操作后的控制系统(S108)。 控制系统的信息处理器在接收到同步请求时,复制由其自己的设备执行的启动操作的信息,从而开始与设备的同步操作(S 109至S110)。 因此,使用双平台技术的系统很容易开始。