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    • 41. 发明授权
    • Cleaning system and cleaning method
    • 清洁系统和清洁方法
    • US09142424B2
    • 2015-09-22
    • US13575042
    • 2011-05-26
    • Minoru UchidaToru Otsu
    • Minoru UchidaToru Otsu
    • B08B3/00H01L21/311C25B1/28C25B9/08H01L21/67
    • H01L21/31133C25B1/285C25B9/08H01L21/67017
    • Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.The system comprises: an electrolytic part for electrolyzing a sulfuric acid solution to produce peroxosulfuric acid; a first reservoir for storing the sulfuric acid solution; a circulation line for circulating the sulfuric acid solution between the electrolytic part and the first reservoir; a cleaning apparatus for cleaning a cleaning object by use of the sulfuric acid solution containing peroxosulfuric acid; a supply line for sending the sulfuric acid solution electrolyzed in the electrolytic part to the cleaning apparatus; a heating part for heating the sulfuric acid solution to be used in the cleaning apparatus, the heating part being interposed in the supply line on the upstream side of the cleaning apparatus; and a second reservoir which is interposed in the supply line on the upstream side of the heating part. Since the second reservoir and the heating parts are positioned spatially above the level of the first reservoir, the electrolytic part and the circulation line, the device can be disposed with good space efficiency while preventing application of a high fluid pressure to the heating part or the like.
    • 提供一种能够提供含有过硫酸的硫酸溶液的系统和方法,即使在诸如清洁室的安装受限的空间中也可以用于清洁,同时抑制诸如快速加热器的加热部件中的流体压力。 该系统包括:用于电解硫酸溶液以产生过氧硫酸的电解部分; 用于存储硫酸溶液的第一储存器; 用于使硫酸溶液在电解部分和第一储存器之间循环的循环管线; 用于使用含有过硫酸的硫酸溶液清洗清洁物体的清洁装置; 用于将电解部分中电解的硫酸溶液送至清洗装置的供给管线; 用于加热清洗装置中使用的硫酸溶液的加热部分,加热部分插入清洁装置的上游侧的供给管线中; 以及第二储存器,其被插入在所述加热部的上游侧的供给管线中。 由于第二储存器和加热部件位于空间上位于第一储存器,电解部分和循环管线的高度之上,所以可以以良好的空间效率设置装置,同时防止对加热部件施加高流体压力或 喜欢。
    • 42. 发明授权
    • Functional solution supply system
    • 功能解决方案供应系统
    • US08529748B2
    • 2013-09-10
    • US12737079
    • 2009-03-11
    • Minoru UchidaTatsuo NagaiHaruyoshi Kamakawa
    • Minoru UchidaTatsuo NagaiHaruyoshi Kamakawa
    • C25B1/30H01L21/306
    • C25B1/285C25B15/08
    • A sulfuric acid electrolyte is produced efficiently as a functional solution and persulfuric acid produced by electrolysis is supplied efficiently to a use side while suppressing self-decomposition thereof.A functional solution supply system adapted to electrolyze a sulfuric acid solution to prepare a functional solution and supply the functional solution to a use side, comprises a storage tank 2 for storing the sulfuric acid solution, an electrolyzing apparatus (electrolytic cell 3) for electrolyzing the sulfuric acid solution, heating means (heater 5) for heating the sulfuric acid solution, cooling means (cooler 4) for cooling the sulfuric acid solution, a first circulation line 11 for returning the sulfuric acid solution discharged from the storage tank 2 to the storage tank 2 through the electrolyzing apparatus without passing through the heating means, a second circulation line 12 for returning the sulfuric acid solution introduced from the use side (cleaning machine 1) to the use side through the cooling means and the storage tank 2 in this order without passing through the heating means, and a third circulation line 13 for returning the sulfuric acid solution introduced from the use side to the use side through the heating means (heater 5) without passing through the cooling means and the storage tank 2.
    • 有效地生产硫酸电解质作为功能性溶液,并且通过电解产生的过硫酸被有效地供给到使用侧,同时抑制其自身的分解。 一种适于电解硫酸溶液以制备功能溶液并将功能性溶液供应到使用侧的功能溶液供应系统包括用于储存硫酸溶液的储存罐2,用于电解所述功能溶液的电解装置(电解槽3) 硫酸溶液,用于加热硫酸溶液的加热装置(加热器5),用于冷却硫酸溶液的冷却装置(冷却器4),将从储罐2排出的硫酸溶液返回到储存罐的第一循环管线11 槽2通过电解装置而不通过加热装置;第二循环管线12,用于将从使用侧(清洗机1)导入的硫酸溶液依次通过冷却装置和储存罐2返回到使用侧 而不通过加热装置,以及用于使从u引入的硫酸溶液返回的第三循环管线13 通过加热装置(加热器5)使用侧不经过冷却装置和储存罐2。
    • 45. 发明授权
    • Probe apparatus having probe card exchanging mechanism
    • 探头装置具有探针卡交换机构
    • US5640100A
    • 1997-06-17
    • US546164
    • 1995-10-20
    • Kazumi YamagataMinoru Uchida
    • Kazumi YamagataMinoru Uchida
    • G01R1/067G01R31/02
    • G01R1/06705
    • A probe apparatus for examining an electrical characteristic of IC chips formed on a semiconductor wafer has a work table provided in a casing and a probe card provided above the work table. The probe card is detachably attached to an insert ring supported by the casing. A card exchanging mechanism for automatically attaching and detaching the probe card to and from the insert ring is provided. The card exchanging mechanism has a tray for mounting the probe card and transferring the-probe card. The tray is changeable at an initial position outside the casing between a usable state where the tray is horizontally expanded and an unusable state where the tray is vertically folded. An opening/closing cover is provided to cover the tray in the unusable state.
    • 用于检查形成在半导体晶片上的IC芯片的电特性的探针装置具有设置在设置在工作台上方的壳体和探针卡中的工作台。 探针卡可拆卸地连接到由壳体支撑的插入环上。 提供一种用于将探针卡自动地附接到插入环上和从插入环中分离的卡片更换机构。 卡更换机构具有用于安装探针卡并传送探针卡的托盘。 在托盘水平膨胀的可用状态和托盘垂直折叠的不可用状态之间,托盘可在壳体外的初始位置改变。 提供打开/关闭盖以在不可用状态下覆盖托盘。