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    • 44. 发明申请
    • Semiconductor Device and Method of Forming Compact Coils for High Performance Filter
    • 形成用于高性能滤波器的紧凑型线圈的半导体器件和方法
    • US20100140738A1
    • 2010-06-10
    • US12705790
    • 2010-02-15
    • Kai LiuRobert Charles Frye
    • Kai LiuRobert Charles Frye
    • H01L29/86H01L21/02
    • H03H7/09H01F17/0006H01F2017/0046H01F2017/0073H03H7/1708H03H7/1775Y10T29/4902
    • A semiconductor device has a first coil structure formed over the substrate. A second coil structure is formed over the substrate adjacent to the first coil structure. A third coil structure is formed over the substrate adjacent to the second coil structure. The first and second coil structures are coupled by mutual inductance, and the second and third coil structures are coupled by mutual inductance. The first, second, and third coil structures each have a height greater than a skin current depth of the coil structure defined as a depth which current reduces to 1/(complex permittivity) of a surface current value. In the case of copper, the coil structures have a height greater than 5 micrometers.The first, second, and third coil structures are arranged in rounded or polygonal pattern horizontally across the substrate with a substantially flat vertical profile.
    • 半导体器件具有形成在衬底上的第一线圈结构。 在与第一线圈结构相邻的衬底上形成第二线圈结构。 在与第二线圈结构相邻的衬底上形成第三线圈结构。 第一和第二线圈结构通过互感耦合,并且第二和第三线圈结构通过互感耦合。 第一,第二和第三线圈结构各自具有高于线圈结构的皮肤电流深度的高度,其被定义为电流减小到表面电流值的1 /(复数介电常数)的深度。 在铜的情况下,线圈结构的高度大于5微米。 第一,第二和第三线圈结构以基本上平坦的垂直轮廓横跨衬底水平布置成圆形或多边形图案。
    • 49. 发明授权
    • Apparatus and method for making carbon nanotube array
    • 制造碳纳米管阵列的装置和方法
    • US07687109B2
    • 2010-03-30
    • US11371997
    • 2006-03-08
    • Kai-Li JiangKai LiuShou-Shan Fan
    • Kai-Li JiangKai LiuShou-Shan Fan
    • C23C16/00C01B31/02C01B31/00D01C5/00
    • C23C16/0281C23C16/26C23C16/448C30B25/02C30B29/02C30B29/605Y10S427/102
    • An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet; a quartz boat disposed in the reaction chamber; a substrate with a surface deposited with a film of first catalyst, the substrate being disposed in the quartz boat; and a second catalyst disposed in the quartz beside the substrate. A method for making an array of carbon nanotubes, comprising the steps of: (a) providing a substrate with a surface deposited with a film of first catalyst; (b) disposing a second catalyst beside the substrate to produce small amounts of hydrogen gas which flows to the first catalyst; (c) introducing a carrier gas and a carbon source gas flowing from the second catalyst to the first catalyst at a predetermined temperature; and (d) growing an array of carbon nanotubes extending from the substrate.
    • 制造碳纳米管阵列的装置包括具有气体入口和气体出口的反应室; 设置在反应室中的石英舟; 具有表面沉积有第一催化剂膜的基板,所述基板设置在所述石英舟中; 以及设置在基板旁边的石英中的第二催化剂。 一种制备碳纳米管阵列的方法,包括以下步骤:(a)向基材提供沉积有第一催化剂膜的表面; (b)在基板旁边设置第二催化剂以产生流过第一催化剂的少量氢气; (c)在预定温度下引入从第二催化剂流向第一催化剂的载气和碳源气体; 和(d)生长从衬底延伸的碳纳米管阵列。