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    • 41. 发明申请
    • SYMMETRIC CAPACITOR STRUCTURE
    • 对称电容结构
    • US20080142861A1
    • 2008-06-19
    • US12029748
    • 2008-02-12
    • David S. CollinsHanyi DingKai Di FengZhong-Xiang HeXuefeng Liu
    • David S. CollinsHanyi DingKai Di FengZhong-Xiang HeXuefeng Liu
    • H01L29/94
    • H01L27/0805
    • A structure comprising a first doped region, a second doped region, a third doped region, and a first shallow trench isolation structure formed within a substrate. The first doped region comprises a first dopant having a first polarity. The second doped region forms a first electrode of a capacitor. The third doped region forms a second electrode of the capacitor. Each of the second doped region and the third doped region comprises a second dopant having a second polarity. The first shallow trench isolation structure is formed between the second doped region and the third doped region. The capacitor comprises a main capacitance. The structure comprises a first parasitic capacitance and a second parasitic capacitance. The first parasitic capacitance is about equal to the second parasitic capacitance.
    • 一种包括形成在衬底内的第一掺杂区,第二掺杂区,第三掺杂区和第一浅沟槽隔离结构的结构。 第一掺杂区域包括具有第一极性的第一掺杂剂。 第二掺杂区域形成电容器的第一电极。 第三掺杂区域形成电容器的第二电极。 第二掺杂区域和第三掺杂区域中的每一个包括具有第二极性的第二掺杂剂。 第一浅沟槽隔离结构形成在第二掺杂区和第三掺杂区之间。 电容器包括主电容。 该结构包括第一寄生电容和第二寄生电容。 第一寄生电容约等于第二寄生电容。
    • 43. 发明授权
    • Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements
    • 计量系统的照明子系统,计量系统以及用于计量测量的照明样本的方法
    • US09080990B2
    • 2015-07-14
    • US13061936
    • 2009-09-29
    • Yung-Ho (Alex) ChuangVladimir LevinskiXuefeng Liu
    • Yung-Ho (Alex) ChuangVladimir LevinskiXuefeng Liu
    • G01N21/55G01N21/95G01N21/47
    • G01N21/9501G01N2021/479
    • Illumination subsystems of a metrology system, metrology systems, and methods for illuminating a specimen for metrology measurements are provided. One illumination subsystem includes a light source configured to generate coherent pulses of light and a dispersive element positioned in the path of the coherent pulses of light, which is configured to reduce coherence of the pulses of light by mixing spatial and temporal characteristics of light distribution in the pulses of light. The illumination subsystem also includes an electro-optic modulator positioned in the path of the pulses of light exiting the dispersive element and which is configured to reduce the coherence of the pulses of light by temporally modulating the light distribution in the pulses of light. The illumination subsystem is configured to direct the pulses of light from the electro-optic modulator to a specimen positioned in the metrology system.
    • 提供了计量系统的照明子系统,计量系统和用于度量测量的照明样本的方法。 一个照明子系统包括被配置为产生相干的光脉冲的光源和位于相干脉冲光的路径中的色散元件,该色散元件被配置为通过将光分布的空间和时间特征混合在一起来减小光脉冲的相干性 光的脉冲。 照明子系统还包括位于离开色散元件的光的脉冲的路径中的电光调制器,其被配置为通过暂时调制光脉冲中的光分布来减小光脉冲的相干性。 照明子系统被配置为将来自电光调制器的光的脉冲引导到位于计量系统中的样本。
    • 45. 发明授权
    • On-chip transmission line structures with balanced phase delay
    • 具有平衡相位延迟的片上传输线结构
    • US08860191B2
    • 2014-10-14
    • US13168512
    • 2011-06-24
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng Liu
    • Hanyi DingKai D. FengZhong-Xiang HeXuefeng Liu
    • H01L23/66H01P1/18H01L23/522
    • H01L23/5222H01L23/5225H01L23/66H01L2223/6638H01L2924/0002H01P1/184Y10T29/49117H01L2924/00
    • A transmission wiring structure, associated design structure and associated method for forming the same. A structure is disclosed having: a plurality of wiring levels formed on a semiconductor substrate; a pair of adjacent first and second signal lines located in the wiring levels, wherein the first signal line comprises a first portion formed on a first wiring level and a second portion formed on a second wiring level; a primary dielectric structure having a first dielectric constant located between the first portion and a ground shield; and a secondary dielectric structure having a second dielectric constant different than the first dielectric constant, the secondary dielectric structure located between the second portion and the ground shield, and the second dielectric layer extending co-planar with the second portion and having a length that is substantially the same as the second portion.
    • 一种传输线路结构,相关设计结构及其相关方法。 公开了一种结构,其具有:形成在半导体衬底上的多个布线层; 位于布线层中的一对相邻的第一和第二信号线,其中第一信号线包括形成在第一布线层上的第一部分和形成在第二布线层上的第二部分; 第一介电结构,其具有位于第一部分和接地屏蔽之间的第一介电常数; 以及具有不同于所述第一介电常数的第二介电常数的次级介电结构,所述第二介电结构位于所述第二部分和所述接地屏蔽之间,并且所述第二电介质层与所述第二部分共面延伸并且具有长度为 基本上与第二部分相同。
    • 49. 发明授权
    • Integrated millimeter wave antenna and transceiver on a substrate
    • 集成毫米波天线和收发器在基板上
    • US08232920B2
    • 2012-07-31
    • US12187442
    • 2008-08-07
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng Liu
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng Liu
    • H01Q1/38H01Q1/40
    • H01Q1/2283H01Q1/40H01Q9/26H01Q9/285H01Q19/108H01Q19/30
    • A semiconductor chip integrating a transceiver, an antenna, and a receiver is provided. The transceiver is located on a front side of a semiconductor substrate. A through substrate via provides electrical connection between the transceiver and the receiver located on a backside of the semiconductor substrate. The antenna connected to the transceiver is located in a dielectric layer located on the front side of the substrate. The separation between the reflector plate and the antenna is about the quarter wavelength of millimeter waves, which enhances radiation efficiency of the antenna. An array of through substrate dielectric vias may be employed to reduce the effective dielectric constant of the material between the antenna and the reflector plate, thereby reducing the wavelength of the millimeter wave and enhance the radiation efficiency. A design structure for designing, manufacturing, or testing a design for such a semiconductor chip is also provided.
    • 提供集成收发器,天线和接收器的半导体芯片。 收发器位于半导体衬底的前侧。 通过基底通孔提供收发器和位于半导体衬底背面的接收器之间的电连接。 连接到收发器的天线位于位于基板正面的电介质层中。 反射板与天线之间的间隔大约是毫米波的四分之一波长,这提高了天线的辐射效率。 可以采用贯穿衬底电介质通孔的阵列来降低天线和反射板之间材料的有效介电常数,由此减小毫米波的波长并提高辐射效率。 还提供了用于设计,制造或测试这种半导体芯片的设计的设计结构。
    • 50. 发明授权
    • Semiconductor structure including a high performance FET and a high voltage FET on a SOI substrate
    • 在SOI衬底上包括高性能FET和高电压FET的半导体结构
    • US08120110B2
    • 2012-02-21
    • US12188381
    • 2008-08-08
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng LiuYun Shi
    • Hanyi DingKai D. FengZhong-Xiang HeZhenrong JinXuefeng LiuYun Shi
    • H01L27/12
    • H01L27/088H01L21/823462H01L21/823481H01L27/1207
    • A first field effect transistor includes a gate dielectric and a gate electrode located over a first portion of a top semiconductor layer in a semiconductor-on-insulator (SOI) substrate. A second field effect transistor includes a portion of a buried insulator layer and a source region and a drain region located underneath the buried insulator layer. In one embodiment, the gate electrode of the second field effect transistor is a remaining portion of the top semiconductor layer. In another embodiment, the gate electrode of the second field effect transistor is formed concurrently with the gate electrode of the first field effect transistor by deposition and patterning of a gate electrode layer. The first field effect transistor may be a high performance device and the second field effect transistor may be a high voltage device. A design structure for the semiconductor structure is also provided.
    • 第一场效应晶体管包括栅极电介质和位于绝缘体上半导体(SOI))衬底中顶部半导体层的第一部分上方的栅电极。 第二场效应晶体管包括掩埋绝缘体层的一部分和位于掩埋绝缘体层下方的源区和漏区。 在一个实施例中,第二场效应晶体管的栅电极是顶部半导体层的剩余部分。 在另一个实施例中,第二场效应晶体管的栅极通过栅极电极层的沉积和图案化与第一场效应晶体管的栅电极同时形成。 第一场效应晶体管可以是高性能器件,第二场效应晶体管可以是高电压器件。 还提供了用于半导体结构的设计结构。