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    • 41. 发明专利
    • Method for producing hydrogenated fullerene and apparatus therefor
    • 用于生产加氢富勒烯及其装置的方法
    • JP2005336118A
    • 2005-12-08
    • JP2004158692
    • 2004-05-28
    • Ideal Star Inc株式会社イデアルスター
    • KASAMA YASUHIKOOMOTE KENJI
    • B01J3/00B01J19/08C01B3/00C01B31/02C07C5/11C07C13/62
    • Y02E60/325Y02E60/327Y02E60/328
    • PROBLEM TO BE SOLVED: To solve the problems of a method for producing a hydrogenated fullerene by dissolving fullerene in an organic solvent and heat-treating together with a metallic catalyst in a high-pressure hydrogen atmosphere to react hydrogen with fullerene, comprising the use of a large amount of high-temperature and pressure hydrogen and an organic solvent having inflammability and harmful to human body, the safety and production cost problem caused by the use of expensive noble metal catalyst, etc.
      SOLUTION: Hydrogenated fullerene is produced by reacting fullerene molecule or fullerene ion with hydrogen free radical or hydrogen ion in a plasma generated in a vacuum chamber. Since the hydrogenated fullerene is produced without using a large amount of organic solvent, hydrogen gas having high temperature and pressure, and an expensive metal catalyst, the method is effective for improving the safety and reducing the production cost of hydrogenated fullerene.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决的问题:为了解决通过将富勒烯溶解在有机溶剂中并与金属催化剂一起在高压氢气氛中进行热处理以使氢与富勒烯反应来制造氢化富勒烯的方法的问题,包括 使用大量的高温高压氢气和对人体具有易燃性和有害的有机溶剂,使用昂贵的贵金属催化剂等引起的安全和生产成本问题。解决方案:氢化富勒烯 是通过富勒烯分子或富勒烯离子与在真空室中产生的等离子体中的氢自由基或氢离子反应来制备的。 由于在不使用大量有机溶剂,高温高压氢气和昂贵的金属催化剂的情况下制造氢化富勒烯,所以该方法对于提高氢化富勒烯的安全性和降低生产成本是有效的。 版权所有(C)2006,JPO&NCIPI
    • 43. 发明专利
    • Manufacturing method of occlusion fullerene and manufacturing device of occlusion fullerene
    • OF OF E E E E E E E E E E E E E E E E E E E E E E E E E E E
    • JP2005325015A
    • 2005-11-24
    • JP2005115573
    • 2005-04-13
    • Ideal Star Inc株式会社イデアルスター
    • KASAMA YASUHIKOOMOTE KENJIKUDO NOBORU
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of occlusion fullerene that overcomes the problem of low probability of the formed occulsion fullerene since only coulomb force contributes to the reaction due to the equivalence of the moving directions of the occulusion atomic ions and the fullerene ions in the conventional method comprising irradiating a plasma stream comprised of occlusion atomic ions and fullerene ions to a deposition substrate and controlling the rates of the occlusion atomic ions and the fullerene ions by the action of bias voltage applied to the deposition substrate to enhance the probability of reaction between the occlusion atomic ion and the fullerene ions.
      SOLUTION: The manufacturing method comprises introducing the plasma stream consisting of the occlusion atomic ions and the plasma stream consisting of the fullerene ions into a reaction room from the opposite direction to form the occlusion fullerene. Thus, the formation efficiency of the occlusion fullerene is enhanced because not only the coulomb force acted on between ions but also the kinetic energy when ions collide contributes to the formation of the occlusion fullerene.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 解决问题的方法:提供一种闭塞富勒烯的制造方法,其克服了形成的吸入性富勒烯的概率低的问题,因为只有库仑力有助于由于与原子离子的移动方向等同的反应 常规方法中的富勒烯离子包括将由闭塞原子离子和富勒烯离子组成的等离子体流照射到沉积基板上,并通过施加到沉积基板的偏置电压来控制闭塞原子离子和富勒烯离子的速率,以增强 闭塞原子离子和富勒烯离子之间的反应概率。 解决方案:制造方法包括将由闭塞原子离子组成的等离子体流和由富勒烯离子组成的等离子体流从相反方向引入反应室,形成闭塞富勒烯。 因此,闭塞富勒烯的形成效率增强,因为不仅库仑力作用在离子之间,而且离子碰撞时的动能也有助于形成闭塞富勒烯。 版权所有(C)2006,JPO&NCIPI
    • 44. 发明专利
    • Method for producing inclusion carbon cluster in electrolyte solution
    • 在电解液中生产包含碳簇的方法
    • JP2005272176A
    • 2005-10-06
    • JP2004085125
    • 2004-03-23
    • Ideal Star Inc株式会社イデアルスター
    • DAITO KOJIKASAMA YASUHIKOOMOTE KENJI
    • B01D11/02B01F11/02C01B31/02C25C1/22
    • B82Y30/00
    • PROBLEM TO BE SOLVED: To provide a method for producing an inclusion cluster at a low cost in a high yield.
      SOLUTION: An electrode 6 vacuum-deposited with a film 8 of C
      60 fullerene which is one type of a carbon cluster is immersed in a sodium chloride solution 3 being an electrolyte solution. The sodium chloride in the solution 3 is ionized into sodium ions Na
      + and chloride ions Cl
      - . When a negative voltage is applied to the electrode 6, the fullerene membrane is fed with electrons and is negatively charged. The fullerene membrane attracts and includes the sodium ions Na
      + in the solution to form sodium-atom-including fullerene. Thereafter, the fullerene membrane 8 is subjected to e.g. a chemical process to extract the sodium-atom-including fullerene from the fullerene membrane 8.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 待解决的问题:以高产率提供以低成本生产包含簇的方法。 解决方案:将作为碳簇的一种类型的富碳烯膜8真空沉积的电极6浸渍在作为电解质溶液的氯化钠溶液3中。 溶液3中的氯化钠被离子化为钠离子Na + SP + +和/或氯离子。 当对电极6施加负电压时,富勒烯膜被供给电子并带负电。 富勒烯膜在溶液中吸引并包括钠离子Na + SP + +,以形成含钠原子的富勒烯。 此后,将富勒烯膜8 从富勒烯膜8中提取含有原子的富勒烯的化学方法。版权所有(C)2006,JPO&NCIPI
    • 46. 发明专利
    • Thin film deposition system, and thin film deposition method
    • 薄膜沉积系统和薄膜沉积方法
    • JP2005179741A
    • 2005-07-07
    • JP2003422742
    • 2003-12-19
    • Ideal Star IncMotoyama Eng Works Ltd株式会社イデアルスター株式会社本山製作所
    • KASAMA YASUHIKOOMOTE KENJISUGANO YOICHI
    • C01B31/02C23C14/24C23C14/56
    • B82Y30/00B82Y40/00C01B32/15C01B32/152C23C14/56
    • PROBLEM TO BE SOLVED: To solve the problem that it takes time for the evacuation and purge of a load lock chamber to deteriorate working efficiency since the exchange of deposited substrates is performed one by one through the load lock chamber connected to the main chamber for performing the deposition via a gate valve, and it takes time for the evacuation due to the release of moisture adsorbed onto the inside of the inner wall since the inner wall of a vacuum vessel made of stainless steel is subjected to surface treatment by EP (electrolytic polishing) treatment in a single sheet processing film deposition system for depositing a thin film such as a capsule fullerene in the vacuum vessel. SOLUTION: The thin film deposition system is constituted so that a planar supporting member capable of being mounted with a plurality of deposition substrates is fitted so as to be movable orthogonally to the axial direction of the main chamber. In this way, the exchange of the deposition substrates is made possible by the movement of the supporting member, and the load lock chamber is made needless, thus the time required for evacuation and purge can be shortened to improve working efficiency. Further, the inner wall of the main chamber is surface-treated by CRP (Cr 2 O 3 passivation) treatment, thus, regarding the CRP-treated stainless steel, moisture and gas are not infiltrated to the inside. In this way, the time for evacuation can be further shortened. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了解决由于沉积的基板的更换而通过连接到主体的负载锁定室一个接一个地执行用于疏散和清除负载锁定室以降低工作效率所需的时间的问题 用于通过闸阀进行沉积的腔室,并且由于吸附在内壁内部的水分的释放而需要时间,因为由不锈钢制成的真空容器的内壁经受EP的表面处理 (电解抛光)处理,用于在真空容器中沉积诸如胶囊富勒烯的薄膜的单片处理膜沉积系统。 解决方案:薄膜沉积系统被构造成使得能够安装有多个沉积基板的平面支撑构件被装配成能够与主室的轴向正交地移动。 以这种方式,通过支撑构件的移动使得沉积基板的更换成为可能,并且使负载锁定室变得不必要,因此可以缩短排气和吹扫所需的时间,以提高工作效率。 此外,通过CRP(Cr 2 3 钝化)处理主室的内壁进行表面处理,因此,关于CRP处理的不锈钢,水分和 气体不会渗透到内部。 这样,撤离的时间可以进一步缩短。 版权所有(C)2005,JPO&NCIPI
    • 47. 发明专利
    • Encapsulating fullerene production apparatus and method
    • 包装丰富的生产设备和方法
    • JP2005097006A
    • 2005-04-14
    • JP2003327939
    • 2003-09-19
    • Ideal Star Inc株式会社イデアルスター
    • KASAMA YASUHIKOOMOTE KENJI
    • C01B31/02
    • B82Y30/00
    • PROBLEM TO BE SOLVED: To solve the problem wherein although in a conventional encapsulating fullerene production apparatus, the densities of alkali metal ions and of fullerene ions being raw materials for an encapsulating fullerene are measured by measuring the density of electrons in a plasma with a plasma probe placed between a fullerene inlet part and an encapsulating fullerene deposition substrate, this method can not separately measure the density of alkali metal ions and the density of fullerene ions but can not provide information on judgement whether or not the film formation of an encapsulating fullerene is possible, whether or not the raw materials are replenished or, whether or not the apparatus is inspected.
      SOLUTION: A first plasma probe is placed between an alkali metal plasma generation part and a fullerene inlet part, and a second plasma probe is placed between the fullerene inlet part and an encapsulating fullerene deposition substrate. The measurement of the densities of electrons in a plasma with the respective probes permits the separate measurement of the density of alkali metal ions and the density of fullerene ions.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 解决的问题:为了解决以往的封装富勒烯生产装置中的碱金属离子和富勒烯离子的浓度作为密封富勒烯的原料的浓度,通过测定等离子体中的电子密度来测定 将等离子体探针放置在富勒烯入口部分和封装富勒烯沉积基板之间,该方法不能分别测量碱金属离子的密度和富勒烯离子的密度,但不能提供判断是否形成 封装富勒烯是否可能,不管原材料是否补充,或者是否检查设备。 解决方案:将第一等离子体探针放置在碱金属等离子体产生部分和富勒烯入口部分之间,并且将第二等离子体探针置于富勒烯入口部分和封装富勒烯沉积基板之间。 利用各个探针对等离子体中的电子密度的测量允许单独测量碱金属离子的密度和富勒烯离子的密度。 版权所有(C)2005,JPO&NCIPI
    • 49. 发明专利
    • Linear element
    • 线性元素
    • JP2011254099A
    • 2011-12-15
    • JP2011177642
    • 2011-08-15
    • Ideal Star Inc株式会社イデアルスター
    • KASAMA YASUHIKOOMOTE KENJI
    • H01L29/786H01L21/336H01L27/28H01L29/06H01L29/417H01L29/423H01L51/05
    • H01L29/78696H01L29/0657H01L29/41733H01L29/42384
    • PROBLEM TO BE SOLVED: To solve problems with respect to refinement of a channel length and improvement of reproducibility of the channel length that defines electric characteristics of a linear MISFET and is defined by a distance between a source region and a drain region along a cylindrical gate insulation region, while the MISFET is flexible, resilient and applicable to an integrated circuit with an arbitrary shape as its features and employs a structure in which the source region and the drain region are arranged in parallel.SOLUTION: An MISFET employs a structure in which a source region and a drain region interpose a semiconductor region as a channel region. It is configured to apply a control voltage via a gate insulation region to the semiconductor region to control a current flowing between the source region and the drain region. Thereby, since a channel length is defined by a film thickness of the semiconductor region, this enables to refine the channel length and to improve reproducibility.
    • 要解决的问题:为了解决关于通道长度的细化和提高定义线性MISFET的电特性的通道长度的再现性的问题,并且由源极区域和漏极区域之间的距离限定 圆柱形栅极绝缘区域,而MISFET是柔性的,弹性的并且适用于具有任意形状的集成电路作为其特征,并且采用其中源极区域和漏极区域平行布置的结构。 解决方案:MISFET采用其中源极区域和漏极区域将半导体区域作为沟道区域的结构。 其被配置为通过栅极绝缘区域向半导体区域施加控制电压以控制在源极区域和漏极区域之间流动的电流。 因此,由于沟道长度由半导体区域的膜厚限定,所以能够改善沟道长度并提高再现性。 版权所有(C)2012,JPO&INPIT