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    • 41. 发明授权
    • Method for manufacturing thin film magnetic head
    • 制造薄膜磁头的方法
    • US06305072B1
    • 2001-10-23
    • US08979965
    • 1997-11-26
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • G11B542
    • B82Y10/00G11B5/3116G11B5/313G11B5/3163G11B5/3967Y10T29/49044Y10T29/49046
    • When manufacturing a thin film magnetic head in which an upper magnetic pole is formed on a lower magnetic pole through a magnetic gap, firstly, at least on the lower magnetic pole, a convex portion possessing the width equivalent to a track width is formed. The convex portion forms a lower magnetic pole tip. Conforming to a contour of the convex shape of the lower magnetic pole, a non-magnetic material layer is formed. A flattening layer is formed on the non-magnetic material layer. The non-magnetic layer is etched with the flattening layer, for example, as a mask. In the non-magnetic material layer, a concave portion self-aligned to the lower portion magnetic pole top (convex portion) is formed. Inside the concave portion, a magnetic layer (upper magnetic pole tip) destined to be a part of the upper magnetic pole is formed. As to the lower magnetic pole tip and the upper magnetic pole tip, the widths of surfaces opposite to the magnetic gap are almost equal, and the central positions thereof almost overlap each other. Thus, a narrow track head structure with high accuracy can be obtained.
    • 当通过磁隙制造在下磁极上形成上磁极的薄膜磁头时,首先至少在下磁极上形成具有与磁道宽度相等的宽度的凸部。 凸部形成下磁极末端。 符合下磁极的凸形轮廓,形成非磁性材料层。 在非磁性材料层上形成平坦化层。 用平坦化层,例如作为掩模蚀刻非磁性层。 在非磁性材料层中,形成与下部磁极顶部(凸部)自对准的凹部。 在凹部内部形成着作为上磁极的一部分的磁性层(上磁极端)。 对于下磁极尖端和上磁极尖端,与磁隙相反的表面的宽度几乎相等,并且其中心位置几乎彼此重叠。 因此,可以获得高精度的窄轨道头结构。
    • 43. 发明授权
    • Thin-film magnetic head having a portion of the upper magnetic core
coplanar with a portion of the lower magnetic core
    • 薄膜磁头具有与下部磁芯的一部分共面的上部磁芯的一部分
    • US5872693A
    • 1999-02-16
    • US826749
    • 1997-03-24
    • Hiroaki YodaAtsuhito SawabeNaoyuki InoueAkio Hori
    • Hiroaki YodaAtsuhito SawabeNaoyuki InoueAkio Hori
    • G11B5/31
    • G11B5/3113G11B5/3116G11B5/313G11B5/3146G11B5/3153G11B5/3163
    • A thin-film magnetic head comprising a lower magnetic core formed on a substrate, an upper magnetic core formed on the lower magnetic core with a magnetic gap therebetween, and a coil interposed between the lower magnetic core and the upper magnetic core as insulated from the lower magnetic core and the upper magnetic core, characterized in that at least either of the lower magnetic core and the upper magnetic core comprises a front body of a magnetic pole facing a magnetic recording medium and a rear body of a magnetic pole having part thereof superposed on the front body of the magnetic pole, the rear body of the magnetic pole is disposed as recessed from the head surface facing the medium and held in contact with the front body of the magnetic pole in a plane, the plane is terminated at a rear of the end of the front body of the magnetic pole, and the rear body of the magnetic pole has a shape curved or bent in the direction opposite to the magnetic gap, and further the front body of the magnetic pole is composed of a magnetic member embedded in a trench formed in advance in an insulating layer.
    • 一种薄膜磁头,包括形成在基板上的下磁芯,形成在下磁芯上的上磁芯,其间具有磁隙,以及插入在下磁芯和上磁心之间的线圈, 下磁芯和上磁芯,其特征在于,下磁芯和上磁芯中的至少一个包括面向磁记录介质的磁极的前体和磁极的后体,其部分叠加 在磁极的前体上,磁极的后体被设置为从面向介质的头表面凹陷并且在平面中与磁极的前体保持接触,平面终止在后面 的磁极的前体的端部,并且磁极的后体具有与磁隙相反的方向弯曲或弯曲的形状,并且还具有前体o f磁极由嵌入在预先形成在绝缘层中的沟槽中的磁性构件组成。
    • 50. 发明授权
    • Method for manufacturing nonvolatile memory device
    • 非易失性存储器件的制造方法
    • US08981507B2
    • 2015-03-17
    • US13534673
    • 2012-06-27
    • Shigeki TakahashiKyoichi SuguroJunichi ItoYuichi OhsawaHiroaki Yoda
    • Shigeki TakahashiKyoichi SuguroJunichi ItoYuichi OhsawaHiroaki Yoda
    • H01L43/12
    • H01L43/12
    • According to one embodiment, a method for manufacturing a nonvolatile memory device including a plurality of memory cells is disclosed. Each of the plurality of memory cells includes a base layer including a first electrode, a magnetic tunnel junction device provided on the base layer, and a second electrode provided on the magnetic tunnel junction device. The magnetic tunnel junction device includes a first magnetic layer, a tunneling barrier layer provided on the first magnetic layer, and a second magnetic layer provided on the tunneling barrier layer. The method can include etching a portion of the second magnetic layer and a portion of the first magnetic layer by irradiating gas clusters onto a portion of a surface of the second magnetic layer or a portion of a surface of the first magnetic layer.
    • 根据一个实施例,公开了一种用于制造包括多个存储单元的非易失性存储器件的方法。 多个存储单元中的每一个包括基底层,其包括第一电极,设置在基底层上的磁性隧道结器件和设置在磁性隧道结装置上的第二电极。 磁隧道结装置包括第一磁性层,设置在第一磁性层上的隧道势垒层,以及设置在隧道势垒层上的第二磁性层。 该方法可以包括通过将气体簇照射到第二磁性层的表面的一部分或第一磁性层的表面的一部分上来蚀刻第二磁性层的一部分和第一磁性层的一部分。