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    • 41. 发明申请
    • IMAGE PICKUP APPARATUS AND IMAGE PICKUP SYSTEM
    • 图像拾取装置和图像拾取系统
    • US20070205439A1
    • 2007-09-06
    • US11680742
    • 2007-03-01
    • Akira OkitaHiroki HiyamaRyuichi MishimaAsako Ura
    • Akira OkitaHiroki HiyamaRyuichi MishimaAsako Ura
    • H01L27/148
    • H01L27/14632H01L27/14609H01L27/14621H01L27/14623H01L27/14625H01L27/14627H01L27/14645
    • An image pickup apparatus of the present invention includes a plurality of photoelectric conversion elements disposed on a semiconductor substrate, a multi-layer wiring structure including a plurality of interlayer insulation films disposed above the semiconductor substrate, and a passiation layer disposed above the multi-layer wiring structure. A first insulation layer is disposed below the under surface of the passiation layer; a second insulation layer is disposed above the top surface of the passiation layer; and the refractive indices of the passiation layer and the first insulation layer differ from each other, and the refractive indices of the passiation layer and the second insulation layer differ from each other. Moreover, planarization processing is performed to at least one layer of the interlayer insulation films and the first insulation layer. Furthermore, a first anti-reflection film is disposed between the passiation layer and the first insulation layer, and a second anti-reflection film is disposed between the passiation layer and the second insulation layer.
    • 本发明的图像拾取装置包括设置在半导体衬底上的多个光电转换元件,包括设置在半导体衬底之上的多个层间绝缘膜的多层布线结构,以及设置在多层上方的钝化层 接线结构。 第一绝缘层设置在被钝化层的下表面下方; 第二绝缘层设置在被钝化层的顶表面之上; 并且被照射层和第一绝缘层的折射率彼此不同,并且被照射层和第二绝缘层的折射率彼此不同。 此外,对层间绝缘膜和第一绝缘层的至少一层进行平坦化处理。 此外,第一防反射膜设置在被照射层和第一绝缘层之间,第二防反射膜设置在被照射层和第二绝缘层之间。
    • 46. 发明授权
    • Solid state image pickup device, method of manufacturing the same, and camera
    • 固态图像拾取装置,其制造方法和相机
    • US07205523B2
    • 2007-04-17
    • US11369819
    • 2006-03-08
    • Ryuichi MishimaSeiichi TamuraKoichi Tazoe
    • Ryuichi MishimaSeiichi TamuraKoichi Tazoe
    • H01L27/00H01L31/00
    • H01L27/14689H01L27/14601H04N5/35581H04N5/37452H04N5/378
    • The solid state image pickup device includes a pixel, the pixel including: a photoelectric conversion region for generating carrier by photoelectric conversion and accumulating the carrier; a carrier holding region for accumulating carrier flowing out from the photoelectric conversion region during the photoelectric conversion region generates and accumulates carrier; a source follower amplifier SF-MOS for amplifying carrier; a transfer MOS transistor Tx-MOS for transferring the carrier accumulated in the photoelectric conversion region to the source follower amplifier SF-MOS; and a transfer MOS transistor Ty-MOS for transferring the carrier accumulated in the carrier holding region to the source follower amplifier SF-MOS. The carrier holding region is formed so as to have a trench structure.
    • 固态摄像装置包括像素,该像素包括:光电转换区域,用于通过光电转换产生载体并累积载体; 载流子保持区域,用于在光电转换区域产生并积累载流子的同时积聚从光电转换区域流出的载流子; 用于放大载波的源极跟随器放大器SF-MOS; 用于将积累在光电转换区域中的载流子传送到源极跟随器放大器SF-MOS的转移MOS晶体管Tx-MOS; 以及用于将载波保持区域中累积的载波传送到源极跟随器放大器SF-MOS的转移MOS晶体管Ty-MOS。 载流子保持区域形成为具有沟槽结构。