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    • 46. 发明授权
    • Amorphous silicon photoreceptor for electrophotography
    • 用于电子照相的非晶硅感光体
    • US4804608A
    • 1989-02-14
    • US129346
    • 1987-11-22
    • Yoshihisa Tawada
    • Yoshihisa Tawada
    • G03G5/04G03G5/08G03G5/082
    • G03G5/08228G03G5/08
    • A photoreceptor for electrophotography which comprises an electroconductive substrate and a photoconductive layer formed thereon, said photoconductive layer essentially consisting of a thin film of amorphous silicon alloy containing at least one of hydrogen and fluorine and having the formula: a-Si.sub.1-m X.sub.m :Y wherein X is C, N or O, Y is at least one of H and F and m is a number of not less than zero and less than one, m being gradually decreased from the top surface of the photoconductive layer to the middle part of the photoconductive layer and gradually increased from the middle part of the photoconductive layer to the interface of the photoconductive layer with the electroconductive substrate in the direction of thickness, said photoreceptor having good electric charging property and photoconductivity characteristics.
    • 一种用于电子照相的感光体,其包括导电基底和形成在其上的光电导层,所述光电导层基本上由含有氢和氟中至少一个的非晶硅合金薄膜组成,具有下式:a-Si1-mXm:Y,其中 X是C,N或O,Y是H和F中的至少一个,m是不小于零且小于1的数,m从光电导层的顶表面逐渐减小到 光电导层从光电导层的中间部分逐渐增加到光电导层与导电基片在厚度方向上的界面,所述感光体具有良好的充电性能和光导特性。
    • 47. 发明授权
    • Glow-discharge decomposition apparatus
    • 辉光放电分解装置
    • US4664890A
    • 1987-05-12
    • US746693
    • 1985-06-20
    • Yoshihisa TawadaTakehisa NakayamaMasahiko TaiNozomu Ikuchi
    • Yoshihisa TawadaTakehisa NakayamaMasahiko TaiNozomu Ikuchi
    • H01L21/20B09C1/02C23C16/509H01J37/32B01J19/08
    • H01J37/32174B09C1/02C23C16/509H01J37/32082Y10S422/907
    • A glow-discharge decomposition apparatus comprises ground electrodes, substrates, RF-electrodes, a RF-power supply, a matching circuit and a controlling circuit having at least one electric element. Each of the substrates is provided on the ground electrodes which are placed over each of the RF-electrodes in parallel to each other. Each of the RF-electrodes standing in parallel are electrically insulated to each other. The matching circuit is connected to accept a RF-power from the RF-power supply. The controlling circuit is connected to accept a RF-power from the matching circuit. The outputs of the controlling circuit are connected to supply RF-powers to the RF-electrodes. The films are fabricated on the substrates by supplying RF-powers being independently controlled via the controlling circuit, thereby plasmas are controlled over each of the RF-electrodes. Thus, deposition rates are individually controlled and uniform films are fabricated on each of the substrates.
    • 辉光放电分解装置包括接地电极,基板,RF电极,RF电源,匹配电路和具有至少一个电气元件的控制电路。 每个基板设置在彼此平行地放置在每个RF电极上的接地电极上。 平行站立的每个RF电极彼此电绝缘。 匹配电路被连接以接收来自RF电源的RF功率。 控制电路被连接以接受来自匹配电路的RF功率。 控制电路的输出被连接以向RF电极提供RF功率。 通过提供通过控制电路独立控制的RF功率,在衬底上制造膜,从而在每个RF电极上控制等离子体。 因此,分别控制沉积速率,并且在每个基板上制造均匀的膜。