会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 41. 发明专利
    • Manufacture of semiconductor device
    • 半导体器件的制造
    • JPS61105873A
    • 1986-05-23
    • JP22005985
    • 1985-10-04
    • Hitachi Ltd
    • KAMIGAKI YOSHIAKIITO KIYOOONISHI SHINJIYOSHIDA ISAOMASUDA HIROOKOIKE JUNICHI
    • H01L21/265H01L29/78
    • H01L29/78
    • PURPOSE:To obtain a semiconductor device in a high-withstand voltage structure by a method wherein the high-concentration impurity region constituting the drain region is formed by the mask away from the gate electrode compared to the low= concentration impurity region. CONSTITUTION:An oxide film is formed on a substrate 1 by performing a thermal oxidation and after a 4,000-Angstrom thick polycrystalline silicon layer, wherein phosphorus is contained in high concentration, is desposited thereon, a gate insulating film 3 and a gate electrode 4 are formed. After that, a thermal oxidation is performed and phosphorus is ion-implanted in the substrate 1 as wide as 2X10 cm through oxide films 8-1 and 8-2, which are formed at the time of the foregoing thermal oxidation, and ion-implanted layers 5-1 and 5-2 are formed. Subsequently, wet and dry thermal oxidation are performed and 210-Angstrom thick oxide films 6-1 and 6-3 are formed on the substrate. At this time, a 3,000-Angstrom thick oxide film 6-2 is formed on the periphery of the electrode 4, because an impurity, phosphorus, is being contained in the polycrystalline silicon layer in high concentration. After then, arsenic is ion-implanted as wide as 6mu10 cm . After that, a thermal treatment is performed and phosphorus impurity layers 5-1 and 5-2 and arsenic impurity layers 7-1 and 7-2 are formed as the final diffusion layers.
    • 目的:为了通过以下方法获得高耐压结构的半导体器件:与低浓度杂质区相比,构成漏极区的高浓度杂质区由掩模形成,远离栅电极。 构成:通过进行热氧化在基板1上形成氧化膜,在其上分布有高浓度磷的4,000埃厚的多晶硅层之后,栅极绝缘膜3和栅电极4为 形成。 之后,通过在上述时刻形成的氧化膜8-1和8-2,进行热氧化,并将磷离子注入到宽度为2×10 13 cm -2的衬底1中 形成热氧化和离子注入层5-1和5-2。 随后,进行湿干和干热氧化,并在衬底上形成210埃厚的氧化膜6-1和6-3。 此时,由于在多晶硅层中含有高浓度的杂质,因此在电极4的周围形成有3,000埃厚的氧化膜6-2。 之后,将砷离子注入到6mu10·15cm -2以上。 之后,进行热处理,并且形成磷杂质层5-1和5-2以及砷杂质层7-1和7-2作为最终扩散层。
    • 45. 发明专利
    • Insulated gate type semiconducor device and manufacture thereof
    • 绝缘栅型半导体器件及其制造
    • JPS5947766A
    • 1984-03-17
    • JP15665582
    • 1982-09-10
    • Hitachi Ltd
    • OOTAKA SHIGEOYOSHIDA ISAO
    • H03F1/00H01L21/822H01L27/02H01L27/04H01L29/78H02H7/20
    • H01L29/7808H01L27/0255
    • PURPOSE:To contrive to improve gate protection effect by simplify manufacturing processes by connecting a p -n-p junction diode as the protection element for a p-channel MOSFET. CONSTITUTION:The photoetching to expose channel parts is performed, and then n-type regions 5 serving as the channel parts are formed in self-alignment by phosphorus ion implantation and diffusion. Boron impurity is deposited or diffused at high concentration with LTP films 6 left by removing a part by photoetching as the mask. Thereby, p type regions 7 serving as sources are formed at a part of the channel parts, the part 8 of the exposure of a polycrystalline Si layer is changed into p type one; accordingly the p -n-p junction is obtained between the masked n type part. After a PSG is formed as a layer insulation film 9, and contact photoetching is performed, aluminum is adhered, and then the source electrode 10 connected to the p type polycrystalline Si layer on one side of the p -n-p junction and the gate electrode 11 connected to the polycrystalline Si layer 8 on the other side are formed.
    • 目的:通过连接一个p + + - p-p +结二极管作为p沟道MOSFET的保护元件,通过简化制造工艺来提高栅极保护效果。 构成:进行曝光通道部分的光刻,然后通过磷离子注入和扩散自对准地形成作为通道部分的n型区域5。 通过用光刻作为掩模去除一部分,剩下的LTP膜6以高浓度沉积或扩散硼杂质。 由此,作为源极的p +型区域7形成在沟道部分的一部分,多晶Si层的曝光部分8变为p +型区域; 因此,在掩蔽的n型部分之间获得p + + n-p +结。 在形成PSG作为层间绝缘膜9并进行接触光刻后,粘附铝,然后将连接到p +一侧的p +型多晶Si层的源极10连接到p + 并且形成与另一侧的多晶硅层8连接的栅电极11。
    • 46. 发明专利
    • Work processing apparatus
    • 工作加工设备
    • JPS5937035A
    • 1984-02-29
    • JP14613682
    • 1982-08-25
    • Hitachi Ltd
    • ENDOU HIDENORIYOSHIDA ISAO
    • B23Q41/02B23Q11/08B23Q11/10B61D47/00B65G1/04
    • B23Q11/0875B23Q11/10
    • PURPOSE:To permit correct positioning by installing an oil pan under a traveling dolly and installing a wiper which makes contact with a rail and a rack. CONSTITUTION:A traveling dolly 3 travels on a rail 2 by driving a pinion 21 engaged with a rack 22 by a motor 20. In this case, the oil containing chip etc. is removed by an oil pan 45 and sticking tip etc. are removed by wiper, and swing of a rail B in the laterale direction is suppressed by holding said rail 2B with a wheel 19 and engagement between the rack 22 and the pinion 21 is corrected, so as to rectify positioning. A pollet 15 having a work 17 loaded is transferred between a stocker 8 and a machine tool by a transversely traveling dolly 4.
    • 目的:通过将油底座安装在旅行小车上并安装与导轨和机架接触的雨刮器来允许正确定位。 构成:行驶台车3通过用电动机20驱动与齿条22啮合的小齿轮21,在轨道2上行驶。在这种情况下,油盘45除去油包屑片屑等,并且去除粘贴尖端等 通过擦拭器并且通过用轮19保持所述轨道2B并且校正齿条22和小齿轮21之间的接合来抑制轨道B在后方方向上的摆动,从而校正定位。 具有加载工件17的小轮15通过横向行进的小车4在储料器8和机床之间转移。
    • 48. 发明专利
    • SEMICONDUCTOR DEVICE
    • JPS58130566A
    • 1983-08-04
    • JP1165182
    • 1982-01-29
    • HITACHI LTD
    • YOSHIDA ISAOOKABE TAKEAKIKATSUEDA MINEOITOU MITSUONAGATA MINORU
    • H01L29/41H01L29/417H01L29/861
    • PURPOSE:To obtain a stable operation, in a rectifying diode having a p n or p n contact structure, by differentiating the area ratio between an n layer or n layer and a p layer in a chip, selecting the ratio lower at the central part of the chip, where the current concentration is easily formed by heating, than the ratio at the peripheral part, thereby equalizing the heating distribution. CONSTITUTION:On an n type Si substrate 1, a p type layer 2 is epitaxially grown, and a plurality of independently neighboring p type layers 3 and n type layers 4 are diffused and formed. Then an Al electrode 6 is provided on the surfaces of said regions. A solder electrode 5 is deposited on the back surface of the substrate 1. In this constitution, the area ration An/Ap between the n type layer and the p layer 3 is differentiated depending on the positions of the chip. Namely, when the width of the layer 4 at the central part is 5mum, the width at the peripheral part is 10mum, and the width is gradually widened. The ratio An/ Ap at the central part is 1, whereas the ratio at the peripheral part is 2. In this way, the current concentration in the electrode contact region becomes gentle, and the stable operation can be performed even at a high temperature.
    • 50. 发明专利
    • SIMULTANEOUSLY SUPPLYING DEVICE FOR PARTS OF DIFFERENT KIND
    • JPS57131638A
    • 1982-08-14
    • JP1293781
    • 1981-02-02
    • HITACHI LTD
    • TOKORO SUKEFUMIYOSHIDA ISAO
    • B23P19/00B65G59/02
    • PURPOSE:To enable simultaneous supply of parts of different thickness by a method wherein identical parts to be supplied to an assembly part by a robot are arranged in plural groups of parts which are constituted so that each group of parts of them is made to move a transferable quantity set with a transfer quantity setting device at a time, and a device is miniaturized. CONSTITUTION:Parts container frames 2a-2e are provided on a circumference having a radius of R within neighborhood of a base of an industrial robot, and parts 3a-3e are contained in piles in each of the part container frames 2a-2e respectively. And pitches or pinion gear diameters and pitches of push out rack gears 6a-6e and pinion gears 7a-7e are set so that they correspond to each thickness of the parts 3a-3e respectively and a turning angle of an electric motor 10. Because of the above when one unit of the electric motor 10 is operated the parts 3a-3e contained in each of the container frames 3a-3e respectively are pushed out by their thickness with the rack gears 6a-6e and the pinion gears 7a-7e for simultaneous supply to the predetermined location.