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    • 44. 发明专利
    • WIRE BONDING METHOD
    • JPS54137961A
    • 1979-10-26
    • JP4530878
    • 1978-04-19
    • HITACHI LTD
    • HANAJIMA SHIYUUICHIKIYOUMASU RIYUUICHISUZUMURA YOSHIKAZU
    • H01L21/60
    • PURPOSE:To eliminate a short circuit by forming a wire in a desirable arch shape, by automatically ajusting the curving start height of the wire of each junction distance. CONSTITUTION:At the time of a wire connection between two points, a tacho- generator is attached to a Z motor controlling the vertical movement of a capillary, and the output is integrated into a saw-tooth waveform; the waveform becomes the highest in voltage from the rise of a holding tool to the end of a one-cycle connection and is cleared at each cycle. On the other hand, the distance between two points to be connected is extracted as bit information by the X-Y movement distance register and the information is used as the address to read out PROM information. The read information is D/A-converted to compares voltage at respective points of saw-tooth wave 4 and a plane movement start signal is generated at the point in time of coincidence, so that the movement will start. As the connection interval is longer, the originating time is later. Therefore, adequate wire connection can be made at the fabrication of various devices only by changing PROMs, so that wire shorting can be prevented.