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    • 46. 发明申请
    • Hard mask removal
    • 硬面膜去除
    • US20050006347A1
    • 2005-01-13
    • US10615558
    • 2003-07-08
    • Venkatesh GopinathArvind KamathMohammad MirabediniMing-Yi LeeBrian Baylis
    • Venkatesh GopinathArvind KamathMohammad MirabediniMing-Yi LeeBrian Baylis
    • H01L21/311C23F1/00
    • H01L21/31144H01L21/31116
    • A method of removing a hard mask layer from a patterned layer formed over an underlying layer, where the hard mask layer is removed using an etchant that detrimentally etches the underlying layer when the underlying layer is exposed to the etchant for a length of time typically required to remove the hard mask layer, without detrimentally etching the underlying layer. The hard mask layer is modified so that the hard mask layer is etched by the etchant at a substantially faster rate than that at which the etchant etches the underlying layer. The hard mask layer is patterned. The patterned layer is etched to expose portions of the underlying layer. Both the hard mask layer and the exposed portions of the underlying layer are etched with the etchant, where the etchant etches the hard mask layer at a substantially faster rate than that at which the etchant etches the underlying layer, because of the modification of the hard mask layer.
    • 从形成在下层上的图案化层去除硬掩模层的方法,其中使用蚀刻剂去除硬掩模层,当底层在通常需要的时间长时间暴露于蚀刻剂时不利地蚀刻下面的层 以去除硬掩模层,而不会有害地蚀刻下面的层。 修改硬掩模层,使得蚀刻剂以比蚀刻剂蚀刻下层的蚀刻剂快得多的速率蚀刻硬掩模层。 图案化硬掩模层。 蚀刻图案层以暴露下层的部分。 硬掩模层和下层的暴露部分用蚀刻剂蚀刻,其中蚀刻剂以比蚀刻剂蚀刻下层的速率快得多的速度蚀刻硬掩模层,这是因为硬的 掩模层。
    • 47. 发明授权
    • High density memory with storage capacitor
    • 具有存储电容器的高密度存储器
    • US06687114B1
    • 2004-02-03
    • US10403433
    • 2003-03-31
    • Arvind KamathRuggero Castagnetti
    • Arvind KamathRuggero Castagnetti
    • H01G4228
    • H01L27/1087H01L27/10894H01L29/66181
    • A memory cell having a transistor and a capacitor formed in a silicon substrate. The capacitor is formed with a lower electrically conductive plate etched in a projected surface area of the silicon substrate. The lower electrically conductive plate has at least one cross section in the shape of a vee, where the sides of the vee are disposed at an angle of about fifty-five degrees from a top surface of the silicon substrate. The surface area of the lower electrically conductive plate is about seventy-three percent larger than the projected surface area of the silicon substrate in which the lower electrically conductive plate is etched. A capacitor dielectric layer is formed of a first deposited dielectric layer, which is disposed adjacent the lower electrically conductive plate. A top electrically conductive plate is disposed adjacent the capacitor dielectric layer and opposite the lower electrically conductive plate. A transistor is formed having source and drain regions separated by a channel region, and a gate dielectric layer formed of the first deposited dielectric layer.
    • 具有在硅衬底中形成的晶体管和电容器的存储单元。 电容器形成有在硅衬底的投影表面区域中蚀刻的下导电板。 下导电板具有至少一个vee形状的横截面,其中,vee的侧面与硅衬底的顶表面成约五十五度的角度。 下导电板的表面积比其中蚀刻下导电板的硅衬底的投影表面积大约百分之七点三。 电容器介电层由邻近下导电板设置的第一沉积介电层形成。 顶部导电板设置在电容器电介质层附近并与下部导电板相对。 晶体管形成为具有由沟道区域分离的源极和漏极区域以及由第一沉积介电层形成的栅极电介质层。