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    • 46. 发明授权
    • Methods of making nanotube-based switching elements and logic circuits
    • 制作纳米管开关元件和逻辑电路的方法
    • US07839176B2
    • 2010-11-23
    • US12476808
    • 2009-06-02
    • Claude L. BertinThomas RueckesBrent M. Segal
    • Claude L. BertinThomas RueckesBrent M. Segal
    • H03K19/20
    • H01L29/0665B82Y10/00G11C13/025G11C23/00G11C2213/16G11C2213/17H01H1/0094H01H1/027H01H2001/0005H01L27/28H01L29/0673H01L29/73H01L29/78H01L51/0048H01L51/0508Y10S977/762Y10S977/932Y10S977/94Y10T29/49002
    • Nanotube-based switching elements and logic circuits. Under one embodiment of the invention, a switching element includes an input node, an output node, a nanotube channel element having at least one electrically conductive nanotube, and a control electrode. The control electrode is disposed in relation to the nanotube channel element to controllably form an electrically conductive channel between the input node and the output node. The channel at least includes said nanotube channel element. The output node is constructed and arranged so that channel formation is substantially unaffected by the electrical state of the output node. Under another embodiment of the invention, the control electrode is arranged in relation to the nanotube channel element to form said conductive channel by causing electromechanical deflection of said nanotube channel element. Under another embodiment of the invention, the output node includes an isolation structure disposed in relation to the nanotube channel element so that channel formation is substantially invariant from the state of the output node. Under another embodiment of the invention, the isolation structure includes electrodes disposed on opposite sides of the nanotube channel element and said electrodes produce substantially the same electric field. Under another embodiment of the invention, a Boolean logic circuit includes at least one input terminal and an output terminal, and a network of nanotube switching elements electrically disposed between said at least one input terminal and said output terminal. The network of nanotube switching elements effectuates a Boolean function transformation of Boolean signals on said at least one input terminal. The Boolean function transformation includes a Boolean inversion within the function, such as a NOT or NOR function.
    • 基于纳米管的开关元件和逻辑电路。 在本发明的一个实施例中,开关元件包括输入节点,输出节点,具有至少一个导电纳米管的纳米管通道元件和控制电极。 控制电极相对于纳米管通道元件设置,以在输入节点和输出节点之间可控制地形成导电通道。 通道至少包括所述纳米管通道元件。 输出节点的构造和布置使得通道形成基本上不受输出节点的电气状态的影响。 在本发明的另一实施例中,控制电极相对于纳米管通道元件布置,以通过引起所述纳米管通道元件的机电偏转而形成所述导电通道。 在本发明的另一个实施例中,输出节点包括相对于纳米管通道元件设置的隔离结构,使得通道形成从输出节点的状态基本上是不变的。 在本发明的另一个实施例中,隔离结构包括设置在纳米管通道元件的相对侧上的电极,所述电极产生基本上相同的电场。 在本发明的另一个实施例中,布尔逻辑电路包括至少一个输入端子和输出端子,以及电气地布置在所述至少一个输入端子和所述输出端子之间的纳米管开关元件网络。 纳米管切换元件的网络在所述至少一个输入端上实现布尔信号的布尔函数变换。 布尔函数变换包括函数内的布尔反转,如NOT或NOR函数。
    • 47. 发明授权
    • Isolated metal plug process for use in fabricating carbon nanotube memory cells
    • 用于制造碳纳米管记忆单元的隔离金属塞工艺
    • US07824946B1
    • 2010-11-02
    • US11429069
    • 2006-05-05
    • Richard J. CarterPeter A. BurkeVerne C. HornbackClaude L. BertinThomas Rueckes
    • Richard J. CarterPeter A. BurkeVerne C. HornbackClaude L. BertinThomas Rueckes
    • H01L21/00H01L21/64
    • H01H1/0094Y10S977/724Y10S977/732Y10S977/943
    • The present invention is directed to structures and methods of fabricating electromechanical memory cells having nanotube crossbar elements. Such memory cells include a substrate having transistor with a contact that electrically contacts with the transistor. A first support layer is formed over the substrate with an opening that defines a lower chamber above the electrical contact. A nanotube crossbar element is arranged to span the lower chamber. A second support layer is formed with an opening that defines a top chamber above the lower chamber, the top chamber including an extension region that extends beyond an edge of the lower chamber to expose a portion of the top surface of the first support layer. A roof layer covers the top of the top chamber and includes an aperture that exposes a portion of the extension region of the top chamber and includes a plug that extends into the aperture in the roof layer to seal the top and bottom chambers. The memory cell further includes an electrode that overlies the crossbar element such that electrical signals can activate the electrode to attract or repel the crossbar element to set a memory state for the transistor.
    • 本发明涉及制造具有纳米管横杆元件的机电存储器单元的结构和方法。 这种存储单元包括具有与晶体管电接触的接触的晶体管的衬底。 第一支撑层形成在衬底上,其开口限定了电触点上方的下腔室。 纳米管横杆元件布置成跨越下室。 第二支撑层形成有开口,所述开口限定在所述下腔室上方的顶部腔室,所述顶部腔室包括延伸超出所述下部腔室的边缘以暴露所述第一支撑层的顶部表面的一部分的延伸区域。 屋顶层覆盖顶部室的顶部,并且包括露出顶部室的延伸区域的一部分并且包括延伸到顶部层中的孔中以密封顶部和底部室的插塞的孔。 存储单元还包括覆盖在横杆元件上的电极,使得电信号可以激活电极以吸引或排斥交叉开关元件以设置晶体管的存储状态。
    • 48. 发明授权
    • Sensor platform using a horizontally oriented nanotube element
    • 传感器平台采用水平取向的纳米管元件
    • US07780918B2
    • 2010-08-24
    • US10844913
    • 2004-05-12
    • Brent M. SegalThomas RueckesBernhard VogeliDarren BrockVenkatachalam C. JaiprakashClaude L. Bertin
    • Brent M. SegalThomas RueckesBernhard VogeliDarren BrockVenkatachalam C. JaiprakashClaude L. Bertin
    • G01N27/00
    • G01N27/4146B82Y15/00G11C13/025Y10S977/902Y10S977/904Y10S977/92Y10S977/921Y10S977/922Y10S977/924Y10T29/43Y10T29/49082
    • Sensor platforms and methods of making them are described, and include platforms having horizontally oriented sensor elements comprising nanotubes or other nanostructures, such as nanowires. Under certain embodiments, a sensor element has an affinity for an analyte. Under certain embodiments, such a sensor element comprises one or more pristine nanotubes, and, under certain embodiments, it comprises derivatized or functionalized nanotubes. Under certain embodiments, a sensor is made by providing a support structure; providing a collection of nanotubes on the structure; defining a pattern within the nanotube collection; removing part of the collection so that a patterned collection remains to form a sensor element; and providing circuitry to electrically sense the sensor's electrical characterization. Under certain embodiments, the sensor element comprises pre-derivatized or pre-functionalized nanotubes. Under certain embodiments, sensor material is derivatized or functionalized after provision on the structure or after patterning. Under certain embodiments, a large-scale array includes multiple sensors.
    • 描述了传感器平台及其制造方法,并且包括具有包括纳米管或其他纳米结构(例如纳米线)的水平定向的传感器元件的平台。 在某些实施方案中,传感器元件对分析物具有亲和力。 在某些实施方案中,这种传感器元件包括一个或多个原始纳米管,并且在某些实施方案中,其包含衍生化或官能化的纳米管。 在某些实施例中,通过提供支撑结构来制造传感器; 在结构上提供纳米管的集合; 定义纳米管集合内的图案; 去除部分集合,使得图案化的集合保持形成传感器元件; 以及提供用于电感测传感器电特性的电路。 在某些实施方案中,传感器元件包括预衍生的或预功能化的纳米管。 在某些实施方案中,传感器材料在提供在结构上或在图案化之后被衍生化或官能化。 在某些实施例中,大规模阵列包括多个传感器。