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    • 43. 发明授权
    • Biosensor and method of driving the same
    • 生物传感器及其驱动方法
    • US08164123B2
    • 2012-04-24
    • US12703939
    • 2010-02-11
    • Chan Woo ParkChang Geun AhnChil Seong AhTae Youb KimAn Soon KimJong Heon YangGun Yong Sung
    • Chan Woo ParkChang Geun AhnChil Seong AhTae Youb KimAn Soon KimJong Heon YangGun Yong Sung
    • H01L29/78H01L29/772
    • G01N27/4145
    • Provided are a biosensor and a method of driving the same. The biosensor includes a transistor including a substrate including a source, a drain, and a channel formed between the source and the drain, a gate insulating layer formed on the channel, and a source electrode and a drain electrode respectively connected with the source and the drain, a fluid line for covering the transistor to have an inner space together with the transistor and in which a sample solution including target molecules flows, a reference electrode formed on an inner wall of the fluid line, and a probe molecule layer attached on the reference electrode and reacting with the target molecules. Accordingly, the reference electrode is formed on the inner wall of the fluid line, enabling miniaturization of the bio device. Also, the probe molecules are formed on the reference electrode to measure a change in threshold voltage according to a change in electric potential between the reference electrode and the gate insulating layer, such that the sensitivity and reaction rate can be remarkably improved.
    • 提供了一种生物传感器及其驱动方法。 生物传感器包括晶体管,其包括基板,该基板包括源极,漏极和形成在源极和漏极之间的沟道,形成在沟道上的栅极绝缘层以及分别与源极和漏极连接的源极和漏极 漏极,用于覆盖晶体管的流体线,其与晶体管一起具有内部空间,并且其中包含目标分子的样品溶液流动,形成在流体管线的内壁上的参考电极和附着在该流体管线上的探针分子层 参考电极并与靶分子反应。 因此,参考电极形成在流体管线的内壁上,使生物装置能够小型化。 此外,探针分子形成在参考电极上,以根据参考电极和栅极绝缘层之间的电位的变化来测量阈值电压的变化,从而可以显着提高灵敏度和反应速率。
    • 44. 发明授权
    • Laser deposition apparatus for depositing a large area oxide thin film
on a substrate
    • 用于在基板上沉积大面积氧化物薄膜的激光沉积设备
    • US5820682A
    • 1998-10-13
    • US965765
    • 1997-11-07
    • Gun Yong SungJeong Dae Suh
    • Gun Yong SungJeong Dae Suh
    • H01L21/316C23C14/28C23C14/00
    • C23C14/28
    • A laser deposition apparatus for a large area oxide thin film which can enable thin films of a large area to be deposited by varying a target affixing method when performing a pulse laser deposition which most effectively deposits various oxide thin films of a complex chemical composition. The apparatus in accordance with the present invention comprises a tilted target affixed to a rotatable target plate by a target frame such that the target is tilted with respect to the target plate; a substrate heater on which the substrate can be mounted and which can be rotated on its own axis; and an eximer laser installed within a vacuum chamber for irradiating a laser beam to said tilted target.
    • 一种用于大面积氧化物薄膜的激光沉积设备,当进行最有效地沉积复杂化学成分的各种氧化物薄膜的脉冲激光沉积时,可以通过改变目标固定方法来沉积大面积的薄膜。 根据本发明的装置包括通过目标框架固定到可旋转靶板的倾斜目标,使得目标物相对于目标板倾斜; 基板加热器,基板可以在其上安装并且可以在其自身轴线上旋转; 以及安置在真空室内的准分子激光器,用于将激光束照射到所述倾斜靶。
    • 45. 发明申请
    • BIOSENSOR AND METHOD OF DRIVING THE SAME
    • 生物传感器及其驱动方法
    • US20110068015A1
    • 2011-03-24
    • US12703939
    • 2010-02-11
    • Chan Woo ParkChang Geun AhnChil Seong AhTae Youb KimAn Soon KimJong Heon YangGun Yong Sung
    • Chan Woo ParkChang Geun AhnChil Seong AhTae Youb KimAn Soon KimJong Heon YangGun Yong Sung
    • G01N27/26G01F1/64
    • G01N27/4145
    • Provided are a biosensor and a method of driving the same. The biosensor includes a transistor including a substrate including a source, a drain, and a channel formed between the source and the drain, a gate insulating layer formed on the channel, and a source electrode and a drain electrode respectively connected with the source and the drain, a fluid line for covering the transistor to have an inner space together with the transistor and in which a sample solution including target molecules flows, a reference electrode formed on an inner wall of the fluid line, and a probe molecule layer attached on the reference electrode and reacting with the target molecules. Accordingly, the reference electrode is formed on the inner wall of the fluid line, enabling miniaturization of the bio device. Also, the probe molecules are formed on the reference electrode to measure a change in threshold voltage according to a change in electric potential between the reference electrode and the gate insulating layer, such that the sensitivity and reaction rate can be remarkably improved.
    • 提供了一种生物传感器及其驱动方法。 生物传感器包括晶体管,其包括基板,该基板包括源极,漏极和形成在源极和漏极之间的沟道,形成在沟道上的栅极绝缘层以及分别与源极和漏极连接的源极和漏极 漏极,用于覆盖晶体管的流体线,其与晶体管一起具有内部空间,并且其中包含目标分子的样品溶液流动,形成在流体管线的内壁上的参考电极和附着在该流体管线上的探针分子层 参考电极并与靶分子反应。 因此,参考电极形成在流体管线的内壁上,使生物装置能够小型化。 此外,探针分子形成在参考电极上,以根据参考电极和栅极绝缘层之间的电位的变化来测量阈值电压的变化,从而可以显着提高灵敏度和反应速率。
    • 47. 发明授权
    • Method of fabricating a superconducting junction using cubic YBa.sub.2
Cu.sub.3 O .sub.x thin film as a barrier layer
    • 使用立方YBa2Cu3O x薄膜作为阻挡层制造超导结的方法
    • US6004907A
    • 1999-12-21
    • US119394
    • 1998-07-21
    • Jeong Dae SuhGun Yong Sung
    • Jeong Dae SuhGun Yong Sung
    • H01L39/22H01L39/24
    • H01L39/2496Y10S505/702
    • The present invention forms a superconducting junction using a cubic YBa.sub.2 Cu.sub.3 Ox thin film as a barrier layer. The present invention forms a first YBCO superconducting thin film, a SrTiO.sub.3 insulating layer thin film on the substrate, etches a side of them in the form of inclination, subsequently integrates a non-superconducting cubic YBCO barrier thin film, a second YBCO superconducting thin film, a SrTiO.sub.3 protecting layer thin film in series on the whole surface of the substrate, etches an opposite side of the etched part of the SrTiO.sub.3 insulating layer thin film in the form of inclination, fabricates a superconducting junction by forming a metal electrode to said aperture after forming apertures which expose said first YBCO superconducting thin film, the second YBCO superconducting thin film, fabricates a superconducting junction upon forming the metallic electrode to the apertures, and deposits a cubic YBa.sub.2 Cu.sub.3 Ox barrier thin film at a temperature of 600-650.degree. C. and a depositing velocity of 6.5-12.2 nm/s.
    • 本发明使用立方YBa2Cu3Ox薄膜作为阻挡层形成超导结。 本发明在衬底上形成第一YBCO超导薄膜,SrTiO3绝缘层薄膜,以斜面的形式蚀刻它们的一面,随后将非超导立方YBCO阻挡薄膜,第二YBCO超导薄膜 ,在基板的整个表面上串联的SrTiO3保护层薄膜,以倾斜的形式蚀刻SrTiO 3绝缘层薄膜的蚀刻部分的相对侧,通过在所述孔径上形成金属电极来制造超导结 在形成暴露所述第一YBCO超导薄膜的孔之后,第二YBCO超导薄膜在向孔隙形成金属电极时制造超导结,并在600-650℃的温度下沉积立方YBa2Cu3Ox势垒薄膜。 并且沉积速度为6.5-12.2nm / s。