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41. 发明授权

US08402848B2 Probe holder 有权
标题翻译：探头架
公开(公告)号：US08402848B2
公开(公告)日：2013-03-26
申请号：US12681967
申请日：2008-10-10
申请人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
发明人： Joerg Kiesewetter , Stojan Kanev , Stefan Kreissig
IPC分类号： G01N15/00
CPC分类号： G01R31/2889 , G01R31/2887
摘要： A probe holder has a manipulator, a probe arm arranged on the manipulator, and a probe needle that is at least indirectly connected to the probe arm. To increase the number of contacts of a substrate to be tested and to make it possible to test a plurality of contacts in etched trenches of semiconductor elements in a group of wafers, the probe arm is connected to a needle support on which the probe needle and at least one second probe needle are arranged.
摘要翻译：探针支架具有操纵器，布置在操纵器上的探针臂和至少间接地连接到探针臂的探针。为了增加要测试的衬底的触点数量，并且可以在一组晶片中的半导体元件的蚀刻沟槽中测试多个触点，探针臂连接到针支撑件上，探头针和至少设置一个第二探针。

42. 发明申请

US20110241711A1 METHOD FOR VERIFYING A TEST SUBSTRATE IN A PROBER UNDER DEFINED THERMAL CONDITIONS 有权
标题翻译：用于在定义的热条件下在探测器中验证测试基板的方法
公开(公告)号：US20110241711A1
公开(公告)日：2011-10-06
申请号：US13119145
申请日：2009-07-31
申请人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
发明人： Michael Teich , Stojan Kanev , Hans-Jurgen Fleischer
IPC分类号： G01R31/00
CPC分类号： G01R1/0408 , G01R31/2855 , G01R31/2874 , G01R31/2875 , G01R31/2886
摘要： A method and an apparatus for verifying or testing test substrates, i.e. wafers and other electronic semiconductor components, in a prober under defined thermal conditions. Such a verifying apparatus, known to the person skilled in the art as a prober, has a housing having at least two housing sections, in one housing section of which, designated hereinafter as test chamber, the test substrate to be verified is held by a chuck and is set to a defined temperature, and in the other housing section of which, designated hereinafter as probe chamber, probes are held. For verification purposes, the test substrate and the probes are positioned relative to one another by means of at least one positioning device and the probes subsequently make contact with the test substrate.
摘要翻译：一种用于在确定的热条件下在探测器中验证或测试测试基板，即晶片和其它电子半导体部件的方法和装置。这种本领域技术人员已知的探测器的验证装置具有壳体，该壳体具有至少两个壳体部分，在其一个壳体部分中，下文称为测试室，待验证的测试基板由卡盘并设定在限定的温度，并且在其另一个壳体部分中，下文称为探针室，探针被保持。为了验证目的，测试基板和探针通过至少一个定位装置相对于彼此定位，并且探头随后与测试基板接触。

43. 发明授权

US07999563B2 Chuck for supporting and retaining a test substrate and a calibration substrate 有权
标题翻译：用于支撑和保持测试基板和校准基板的卡盘
公开(公告)号：US07999563B2
公开(公告)日：2011-08-16
申请号：US12489913
申请日：2009-06-23
申请人： Andrej Rumiantsev , Stojan Kanev , Steffen Scott , Karsten Stoll
发明人： Andrej Rumiantsev , Stojan Kanev , Steffen Scott , Karsten Stoll
IPC分类号： G01R31/00
CPC分类号： G01R31/2886
摘要： A chuck for supporting and retaining a test substrate includes a device for supporting and retaining a calibration substrate. The chuck comprises a first support surface for supporting a test substrate and a second support surface, which is laterally offset to the first support surface, for supporting a calibration substrate The calibration substrate has planar calibration standards for calibration of a measuring unit of a prober, and dielectric material or air situated below the calibration substrate at least in the area of the calibration standard. In order to be able to take the actual thermal conditions on the test substrate and in particular also on known and unknown calibration standards and thus the thermal influence on the electrical behavior of the calibration standard used into consideration, the second support surface is equipped for temperature control of the calibration substrate.
摘要翻译：用于支撑和保持测试基板的卡盘包括用于支撑和保持校准基板的装置。卡盘包括用于支撑测试基板的第一支撑表面和横向偏移到第一支撑表面的用于支撑校准基板的第二支撑表面。校准基板具有用于校准探测器的测量单元的平面校准标准，以及至少在校准标准区域中位于校准基板下方的电介质材料或空气。为了能够在测试基板上获取实际的热条件，特别是在已知和未知的校准标准上，因此考虑到所使用的校准标准的电气行为的热影响，第二支撑表面装备有温度校准基板的控制。

44. 发明授权

US07579854B2 Probe station and method for measurements of semiconductor devices under defined atmosphere 有权
标题翻译：探测台和测量在确定的气氛下的半导体器件的方法
公开(公告)号：US07579854B2
公开(公告)日：2009-08-25
申请号：US11943975
申请日：2007-11-21
申请人： Jörg Kiesewetter , Stefan Kreissig , Stojan Kanev , Claus Dietrich
发明人： Jörg Kiesewetter , Stefan Kreissig , Stojan Kanev , Claus Dietrich
IPC分类号： G01R31/02
CPC分类号： G01R31/2881
摘要： A prober is described that is suitable for testing of semiconductor substrates under atmospheric conditions that deviate from ambient conditions. The prober includes a chuck for mounting of a semiconductor substrate and a probe holder for mounting of test tips for electrical contacting of the semiconductor substrate. The semiconductor substrate and test tips are arranged within a housing sealed relative to the surrounding atmosphere. The housing comprises two housing parts joined with a seal. The seal can be inflated with two different pressures and is less deformable at higher pressure. For testing of the semiconductor substrate, coarse positioning of the semiconductor substrate relative to the test tips occurs under atmospheric conditions and then fine positioning with the sealed housing and deformable seal before the lower deformability of the seal is produced at higher pressure in the seal and the semiconductor substrate is contacted by the test tips and tested.
摘要翻译：描述了适用于在大气条件下偏离环境条件的半导体衬底的测试的探测器。探测器包括用于安装半导体衬底的卡盘和用于安装用于半导体衬底的电接触的测试尖端的探针保持器。半导体衬底和测试尖端布置在相对于周围大气密封的壳体内。壳体包括与密封件连接的两个壳体部件。密封件可以用两种不同的压力充气，并且在较高压力下可变形较小。为了测试半导体衬底，半导体衬底相对于测试尖端的粗略定位发生在大气条件下，然后在密封件的较高压力下产生密封件的较低可变形性之前用密封壳体和可变形密封件进行精细定位，半导体衬底被测试头接触并进行测试。

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