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41. 发明授权

US5449648A Method for preparing an aluminum nitride sintered body 失效
标题翻译：氮化铝烧结体的制备方法
公开(公告)号：US5449648A
公开(公告)日：1995-09-12
申请号：US236707
申请日：1994-05-02
申请人： Seiji Nakahata , Takahiro Matsuura , Kouichi Sogabe , Akira Yamakawa
发明人： Seiji Nakahata , Takahiro Matsuura , Kouichi Sogabe , Akira Yamakawa
IPC分类号： C04B35/581 , C04B35/626 , H01L21/48 , H01L23/15 , H05K1/03 , C04B35/58
CPC分类号： C04B35/581 , H01L21/4807
摘要： An aluminum nitride sintered body has a high breakdown voltage for serving as a substrate material particularly suited to highly integrated circuits. The aluminum nitride sintered body contains titanium, which is included as a solid solute in the aluminum nitride crystal lattice in a weight ratio of at least 50 ppm and not more than 1000 ppm. The unpaired electron concentration in the sintered body as determined from an absorption spectrum of electron spin resonance is at least 1.times.10.sup.13 /g. At least 0.1 percent by weight and not more than 5.0 percent by weight, in terms of TiO.sub.2, of an oxy-nitride of titanium and aluminum exists in the aluminum nitride sintered body. The aluminum nitride sintered body has a breakdown voltage of 20 kV/mm. The sintered body is obtained by nitriding aluminum nitride raw material powder in a nitrogen atmosphere at a temperature of 800 to 1400.degree. C., adding an oxy-nitride of titanium thereto with a sintering assistant, and sintering the mixture.
摘要翻译：氮化铝烧结体具有高的击穿电压，用作特别适用于高集成电路的衬底材料。氮化铝烧结体含有钛，其以氮化铝晶格内的固体溶质以至少50ppm至不大于1000ppm的重量比包含在其中。由电子自旋共振的吸收光谱确定的烧结体中不成对的电子浓度为至少1×10 13 / g。在氮化铝烧结体中存在钛和铝的氮氧化物的至少0.1重量％且不超过5.0重量％（以TiO 2计）。氮化铝烧结体的击穿电压为20kV / mm。烧结体是通过在氮气气氛中在800〜1400℃的温度下氮化氮化铝原料粉末，用烧结助剂向其中加入钛的氮氧化物，烧结该混合物而得到的。

42. 发明授权

US5385701A Method of molding silicon nitride ceramics 失效
标题翻译：氮化硅陶瓷成型方法
公开(公告)号：US5385701A
公开(公告)日：1995-01-31
申请号：US919590
申请日：1992-07-24
申请人： Tomoyuki Awazu , Yasushi Tsuzuki , Osamu Komura , Akira Yamakawa
发明人： Tomoyuki Awazu , Yasushi Tsuzuki , Osamu Komura , Akira Yamakawa
IPC分类号： B28B1/08 , B28B1/26 , C04B35/584 , C04B35/622 , C04B33/28 , C04B33/58
CPC分类号： B28B1/26 , C04B35/584 , C04B35/622
摘要： Disclosed herein are a method for molding a high density and homogeneous silicon nitride ceramics within a short time and an apparatus used for the method. A gel-like slurry mixture which is a mixture of ceramic powders consisting mainly of Si.sub.3 N.sub.4 and a liquid and has a powder content of from 45 vol % to 60 vol % is fluidized by imparting thereto a strain by vibration, and the mixture under the fluidized state is filled into, and molded by, a mold. Preferably, the entire part or a part of the mold is made of a liquid permeable material. The vibration preferably has an acceleration of from 0.1 G to 150 G and an amplitude of 1 .mu.m to 1 cm. Furthermore, the viscosity of the slurry filled into the mold is preferably from 2,000 to 20,000 cps.
摘要翻译：本文公开了一种用于在短时间内模制高密度均匀氮化硅陶瓷的方法和用于该方法的装置。作为主要由Si 3 N 4和液体组成的粉末含量为45体积％至60体积％的陶瓷粉末的混合物的凝胶状浆料混合物通过振动赋予其应变而流化，并且流化床状态被模具填充并模制。优选地，模具的整个部分或一部分由液体可渗透的材料制成。振动优选具有0.1G至150G的加速度和1μm至1cm的振幅。此外，填充到模具中的浆料的粘度优选为2,000至20,000cps。

43. 发明授权

US5343150A Apparatus and method for measuring a physical property of a sample using an electron spin resonance spectrum of the sample 失效
标题翻译：使用样品的电子自旋共振谱测量样品的物理性质的装置和方法
公开(公告)号：US5343150A
公开(公告)日：1994-08-30
申请号：US98116
申请日：1993-07-26
申请人： Seiji Nakahata , Kouichi Sogabe , Akira Yamakawa
发明人： Seiji Nakahata , Kouichi Sogabe , Akira Yamakawa
IPC分类号： C04B35/581 , G01N24/10 , G01R33/60 , G01V3/00 , G01N25/18 , G01R33/20
CPC分类号： G01R33/60 , G01N24/10
摘要： Disclosed herein is a measuring apparatus and a measuring method which can measure a physical property value such as an oxygen content or thermal conductivity of a sample material such as an aluminum nitride sintered body with high accuracy, over the entire material in a short time. A microwave oscillation source generates microwaves. A sample material to be evaluated, such as an aluminum nitride sintered body, is placed in a cavity resonator, irradiated with microwaves (M), and subjected to a magnetic field (H) applied by electromagnets. An amount of microwaves absorbed by the object is measured by a microwave absorption measuring unit. This amount of microwave absorption is obtained from an electron spin resonance spectrum. The concentration of unpaired electrons in the object is obtained from the measured amount of microwave absorption on the basis of a known relation between an amount of microwave absorption and concentration of unpaired electrons. The concentration of unpaired electrons is converted into a physical property value such as an oxygen content or a thermal conductivity value. Such conversion processing is carried out by a computer.
摘要翻译：本发明公开了一种能够在短时间内在整个材料上高精度地测量诸如氮化铝烧结体的样品材料的氧含量或热导率的物理性质值的测量装置和测量方法。微波振荡源产生微波。将待评价的样品例如氮化铝烧结体放置在空腔谐振器中，用微波（M）照射，并施加由电磁体施加的磁场（H）。通过微波吸收测量单元测量被物体吸收的微波量。从电子自旋共振谱获得微波吸收量。基于微波吸收量与不成对电子浓度之间的已知关系，从测量的微波吸收量获得物体中不成对电子的浓度。不成对电子的浓度被转换成诸如氧含量或热导率值的物理性质值。这样的转换处理由计算机执行。

44. 发明授权

US5292552A Method for forming metallized layer on an aluminum nitride sintered body 失效
标题翻译：在氮化铝烧结体上形成金属化层的方法
公开(公告)号：US5292552A
公开(公告)日：1994-03-08
申请号：US902446
申请日：1992-06-19
申请人： Akira Yamakawa , Akira Sasame
发明人： Akira Yamakawa , Akira Sasame
IPC分类号： C04B41/51 , C04B41/88 , H05K1/09 , B05D3/02
CPC分类号： C04B41/5133 , C04B41/88 , H05K1/092
摘要： An aluminum nitride sintered body that has been fired/formed to have a prescribed sintered configuration, is used as a substrate. A metal paste of tungsten is prepared and applied to the substrate. The metal paste of tungsten contains oxide components of at least 1 percent by weight of the paste and not more than 40 percent by weight of the paste. The oxide components include SiO.sub.2 of at least 1 percent by weight of the oxide components and not more than 40 percent by weight of the oxide components. The oxide components include CaO and Al.sub.2 O.sub.3 in a weight ratio of at least 0.5 and not more than 2 of CaO to Al.sub.2 O.sub.3. The aluminum nitride sintered body coated with the metal paste is heated/fired in a non-oxidizing atmosphere at a temperature of at least 1400.degree. C. and not more than 2000.degree. C.
摘要翻译：已经烧制/形成具有规定的烧结构造的氮化铝烧结体用作基板。制备钨的金属糊料并将其施加到基底上。钨的金属糊料含有至少1重量％的糊料和40重量％以下的糊料的氧化物组分。氧化物组分包括至少1重量％的氧化物组分和不超过40重量％的氧化物组分的SiO 2。氧化物组分包括CaO和Al 2 O 3，CaO与Al 2 O 3的重量比为至少0.5％且不大于2。涂覆有金属糊的氮化铝烧结体在非氧化性气氛中在至少1400℃且不超过2000℃的温度下加热/烧制。

45. 发明授权

US5275986A Silicon nitride sintered body 失效
标题翻译：氮化硅烧结体
公开(公告)号：US5275986A
公开(公告)日：1994-01-04
申请号：US941659
申请日：1992-09-08
申请人： Takehisa Yamamoto , Takao Nishioka , Tomoyuki Awazu , Akira Yamakawa
发明人： Takehisa Yamamoto , Takao Nishioka , Tomoyuki Awazu , Akira Yamakawa
IPC分类号： C04B35/584 , C04B35/593 , C04B35/597 , C04B35/58
CPC分类号： C04B35/5935 , C04B35/597
摘要： A silicon nitride sintered body comprising .alpha.-silicon nitride including .alpha.'-sialon and .beta.'-sialon including .beta.-silicon nitride in which the content of the .alpha.-silicon nitride including .alpha.'-sialon in the surface part thereof is less than its content in the inner part thereof. The silicon nitride sintered body is excellent in mechanical strength at ordinary temperature, productivity and cost efficiency.
摘要翻译：包括（α） - 硅氮化物的氮化硅烧结体，其包含（α） - 赛隆和（β）' - 赛隆，包括（β） - 氮化硅，其中（α） - 硅氮化物的含量包括（α）其表面部分中的赛隆细胞的含量小于其内部的含量。氮化硅烧结体在常温下的机械强度，生产率和成本效率优异。

46. 发明授权

US5262366A Formation of a ceramic composite by centrifugal casting 失效
标题翻译：通过离心铸造形成陶瓷复合材料
公开(公告)号：US5262366A
公开(公告)日：1993-11-16
申请号：US602851
申请日：1990-10-26
申请人： Akira Yamakawa , Yoshihiko Doi , Masaya Miyake
发明人： Akira Yamakawa , Yoshihiko Doi , Masaya Miyake
IPC分类号： C04B35/584 , C04B35/591 , C04B35/80 , C04B35/58 , C04B35/76
CPC分类号： C04B35/591 , C04B35/584 , C04B35/806
摘要： A ceramic compact having excellent high temperature strength, toughness and reliability, which comprises a matrix preferably composed predominantly of silicon nitride and ceramic fibers uniformly dispersed in the matrix and orientated in a desired direction, said matrix and fibers being closely bonded by sintering. This compact is produced, for example, by preparing a shaped body of silicon, for example, in which ceramic fibers are uniformly dispersed by centrifugal casting and then heating and nitriding the shaped body in a nitrogen atmosphere to form a fiber-reinforced silicon nitride sintered compact. The ceramic fibers may include such fibers as aluminum oxide or silicon carbide fibers. Sintering assistants, such as silicon nitride, may be used to prepare the sintered compact.
摘要翻译：具有优异的高温强度，韧性和可靠性的陶瓷压块，其包含优选主要由氮化硅组成的基体和均匀分散在基体中并沿所需方向取向的陶瓷纤维的所述基体和纤维通过烧结紧密结合。该压坯例如通过制备例如通过离心铸造均匀分散陶瓷纤维然后在氮气气氛中加热和氮化成形体的硅成形体来制造，以形成纤维增强的氮化硅烧结体紧凑。陶瓷纤维可以包括诸如氧化铝或碳化硅纤维的纤维。可以使用诸如氮化硅的烧结助剂来制备烧结体。

47. 发明授权

US5217305A Method of evaluating ceramics 失效
标题翻译：评估陶瓷的方法
公开(公告)号：US5217305A
公开(公告)日：1993-06-08
申请号：US867876
申请日：1992-04-13
申请人： Akira Yamakawa , Masaya Miyake , Kozo Ishizaki , Koji Watari
发明人： Akira Yamakawa , Masaya Miyake , Kozo Ishizaki , Koji Watari
IPC分类号： G01N25/20 , G01N25/00 , G01N33/38
CPC分类号： G01N25/005 , G01N33/388
摘要： For evaluating mechanical properties of ceramics such as silicon nitride in a nondestructive manner, a specific heat of ceramic test samples to be evaluated is measured at a temperature not higher than room temperature. A comparison is made between a measured value of the specific heat of the test sample and a known value of a specific heat of a ceramic reference sample at the same temperature not higher than room temperature. The comparison, permits making conclusions regarding the mechanical properties of the ceramic test samples based on the known mechanical properties of the ceramic reference sample. The creep strength is given as one example of the mechanical properties that may be ascertained by a nondestructive inspection that may be part of a production line, whereby the mechanical properties of the individual ceramic products may be guaranteed in practice.

48. 发明授权

US5165981A Ceramic substrate and preparation of the same 失效
标题翻译：陶瓷基材及其制备方法相同
公开(公告)号：US5165981A
公开(公告)日：1992-11-24
申请号：US746093
申请日：1991-08-12
申请人： Akira Yamakawa , Tadashi Igarashi
发明人： Akira Yamakawa , Tadashi Igarashi
IPC分类号： G11B5/31 , H01F10/28 , H01F41/20
CPC分类号： H01F10/28 , G11B5/31 , H01F41/20 , Y10T428/24355 , Y10T428/24942 , Y10T428/24983 , Y10T428/263 , Y10T428/265
摘要： A ceramic substrate which comprises a ceramic base material having porosity of not more than 5% and surface roughness R.sub.max of not larger than 0.1 .mu.m, and an amorphous aluminum oxide film having thickness of 1 to 50 .mu.m formed on a surface of said ceramic base material, has high reliability and can be easily surface finished with high accuracy and can be used to form a thin film magnetic circuit.
摘要翻译：一种陶瓷基板，其特征在于，具有孔隙率为5％以下，表面粗糙度Rmax为0.1μm以下的陶瓷基材，以及形成在所述陶瓷的表面上的厚度为1〜50μm的无定形氧化铝膜基材，具有高可靠性，可以高精度地进行表面精加工，可用于形成薄膜磁路。

49. 发明授权

US5134461A Ceramics substrate with an improved surface structure for electronic components 失效
标题翻译：具有改进的电子部件表面结构的陶瓷基板
公开(公告)号：US5134461A
公开(公告)日：1992-07-28
申请号：US623204
申请日：1990-12-06
申请人： Akira Yamakawa , Akira Sasame
发明人： Akira Yamakawa , Akira Sasame
IPC分类号： H05K1/09 , C04B41/90 , H01L21/48 , H01L23/12 , H01L23/498 , H05K1/03 , H05K3/24
CPC分类号： H01L23/49866 , H01L21/4846 , H05K3/246 , H01L2924/0002 , H05K1/0306 , Y10T428/12535 , Y10T428/12889 , Y10T428/12944
摘要： A ceramic substrate has a surface structure capable of suppressing diffusion of Ni into an Au plating layer by providing an NiAu alloy layer between the substrate and the Au plating layer, whereby the thickness of the Au plating layer may be reduced. Such a surface structure is formed by applying the following layers to the substrate, a metallized layer (12), Ni an layer (13) and Au layer (14) in this order. The substrate (11) is heated in a non-oxidizing atmosphere to cause an alloying reaction between the Ni layer (13) and the Au layer (14). Thereafter, an Au plating layer (16) is formed on the NiAu alloy layer (15). Since Ni in the NiAu alloy layer is not easily released, diffusion of Ni into the Au plating layer is suppressed sufficiently.

50. 发明授权

US5036026A Sintered body of aluminum nitride and method for producing the same 失效
标题翻译：氮化铝烧结体及其制造方法
公开(公告)号：US5036026A
公开(公告)日：1991-07-30
申请号：US588475
申请日：1990-09-25
申请人： Akira Yamakawa , Hitoyuki Sakanoue , Hisao Takeuchi
发明人： Akira Yamakawa , Hitoyuki Sakanoue , Hisao Takeuchi
IPC分类号： C04B35/581
CPC分类号： C04B35/581
摘要： A sintered body of aluminum nitride having a density of not smaller than 3.1 g/cm.sup.3, a coefficient of thermal conductivity of not smaller than 100 W/mk and preferably an average particle size of not larger than 5 .mu.m, which comprises aluminum nitride as a main component, 0.01 to 10.0% by weight of at least one oxide selected from oxides of the IIa and IIIa elements of the Periodic Table, 2.0% by weight or less of oxygen which is not contained in the oxide of the IIa and IIIa element and 1.0% by weight or less of at least one impurity metal which is not the IIa or IIIa element which has good thermal conductivity.

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