会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 43. 发明授权
    • Enhanced methods for at least partial in situ release of sacrificial material from cavities or channels and/or sealing of etching holes during fabrication of multi-layer microscale or millimeter-scale complex three-dimensional structures
    • 用于在多层微米级或毫米级复杂三维结构的制造期间至少部分原位释放来自空腔或通道的牺牲材料和/或蚀刻孔的密封的方法
    • US08262916B1
    • 2012-09-11
    • US12828274
    • 2010-06-30
    • Dennis R. SmalleyMichael S. LockardAdam L. Cohen
    • Dennis R. SmalleyMichael S. LockardAdam L. Cohen
    • C23F1/22
    • B81C1/00071C25D1/003
    • Embodiments of the invention are directed to multi-layer, multi-material fabrication methods (e.g. electrochemical fabrication methods) which provide improved versatility in producing complex microdevices and in particular in removing sacrificial material from passages, channels, or cavities that are complex or that include etching access ports in their final configurations that are small relative to passage, channel, or cavity lengths. Embodiments of the present invention provide for removal of sacrificial material from these passages, channels or cavities using one or more initial or preliminary removal steps that occur prior to completion of the such passages that results from the completion of the layer forming steps. In some embodiments, first sacrificial material is replaced after a secondary solid sacrificial material after the initial removal step or steps. In other embodiments, the first sacrificial material is replaced after a liquid material after the initial removal step or steps. In some embodiments, desired structure formation may occur along or separately from one or more etchant directing manifolds that can force etchant into the passages, channels, and cavities.
    • 本发明的实施例涉及多层,多材料制造方法(例如电化学制造方法),其提供了在复杂微器件生产中提供改进的多功能性,特别是从复杂的通道,通道或腔中去除牺牲材料, 蚀刻其相对于通道,通道或腔长度较小的最终构造的进入端口。 本发明的实施例提供了从这些通道,通道或空腔中去除牺牲材料,使用在完成层形成步骤后产生的这种通道完成之前发生的一个或多个初始或初步去除步骤。 在一些实施例中,在初始移除步骤或步骤之后,在第二固体牺牲材料之后,替换第一牺牲材料。 在其它实施例中,在初始移除步骤或步骤之后,在液体材料之后替换第一牺牲材料。 在一些实施方案中,期望的结构形成可以沿着或分开地与一个或多个蚀刻剂导向歧管发生,其可以迫使蚀刻剂进入通道,通道和空腔。
    • 44. 发明申请
    • Multi-Layer, Multi-Material Fabrication Methods for Producing Micro-Scale and Millimeter-Scale Devices with Enhanced Electrical and/or Mechanical Properties
    • 用于生产具有增强的电气和/或机械性能的微尺度和毫米级装置的多层,多材料制造方法
    • US20110132767A1
    • 2011-06-09
    • US12906970
    • 2010-10-18
    • Ming Ting WuRulon Joseph Larsen, IIIYoung KimKieun KimAdam L. CohenAnanda H. KumarMichael S. LockardDennis R. Smalley
    • Ming Ting WuRulon Joseph Larsen, IIIYoung KimKieun KimAdam L. CohenAnanda H. KumarMichael S. LockardDennis R. Smalley
    • C25D5/02C25D5/48
    • G01R1/06716B33Y10/00C23C18/1605C23C18/1651C25D1/003G01R1/06744G01R1/06755G01R3/00H01L21/4853
    • Some embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e.g. microprobes for use in die level testing of semiconductor devices) from a core material and a shell or coating material that partially coats the surface of the structure. Other embodiments are directed to electrochemical fabrication methods for producing structures or devices (e.g. microprobes) from a core material and a shell or coating material that completely coats the surface of each layer from which the probe is formed including interlayer regions. Additional embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e.g. microprobes) from a core material and a shell or coating material wherein the coating material is located around each layer of the structure without locating the coating material in inter-layer regions. Each of these groups of embodiments incorporate both the core material and the coating material during the formation of each layer and each layer is also formed with a sacrificial material that is removed after formation of all layers of the structure. In some embodiments the core material may be a genuine structural material while in others it may be only a functional structural material (i.e. a material that would be removed with sacrificial material if it were accessible by an etchant during removal of sacrificial material.
    • 本发明的一些实施方案涉及用于从芯材料和部分涂覆结构表面的壳或涂层材料形成结构或器件(例如用于半导体器件的晶片级测试的微探针)的电化学制造方法。 其它实施方案涉及用于从芯材和壳或涂层材料制造结构或器件(例如微探针)的电化学制造方法,其完全涂覆形成探针的每个层的表面,包括中间层区域。 本发明的另外的实施方案涉及用于从核心材料和壳或涂层材料形成结构或器件(例如微针)的电化学制造方法,其中涂层材料围绕结构的每一层定位,而不将涂层材料定位在相互之间, 层区域。 这些实施例组中的每一个在形成每个层期间都包括芯材料和涂层材料,并且每个层还形成有牺牲材料,该牺牲材料在形成所述结构的所有层之后被去除。 在一些实施例中,芯材料可以是真正的结构材料,而在其它实施例中,其可以仅是功能性结构材料(即,如果在去除牺牲材料期间可通过蚀刻剂获得牺牲材料,则该材料将被除去。