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    • 46. 发明授权
    • Metal/semiconductor junction Schottky diode optical device using a
distortion grown layer
    • 金属/半导体结肖特基二极管光器件使用失真生长层
    • US5488231A
    • 1996-01-30
    • US352628
    • 1994-12-09
    • O-Kyun KwonYoung-Wan ChoiEl-Hang Lee
    • O-Kyun KwonYoung-Wan ChoiEl-Hang Lee
    • H01L29/47G02F1/015G02F3/00G02F3/02H01L29/12H01L29/872H01L31/0352H01L31/10H01L31/108H01L27/14H01L31/00
    • H01L31/0352H01L31/108
    • A metal/semiconductor junction Schottky diode optical device using a distortion grown layer is described. A plurality of GaAs mirror and AlAs mirror layers are periodically grown on a semi-insulating GaAs substrate. An n+ or p+ semiconductor layer is formed on the GaAs mirror and AlAs mirror layers. A GaAs buffer layer is formed on the semiconductor layer to grow a Schottky metal layer serving as an electrode and a mirror. A multiple quantum well structure having an electro-optical absorption characteristic is positioned between the semiconductor layer and Schottky metal layer, for constructing a diode with the metal layer/multiple quantum well structure. At least a part of the mirror layers and diode are formed with a layer in order to have resonance and non-resonance conditions between the metal layer and mirror layers. The substrate on which the diode is formed has an opposite side formed with an optical non-reflective layer.
    • 描述了使用失真生长层的金属/半导体结肖特基二极管光学器件。 在半绝缘GaAs衬底上周期性地生长多个GaAs反射镜和AlAs镜层。 在GaAs反射镜和AlAs镜面层上形成n +或p +半导体层。 在半导体层上形成GaAs缓冲层,以生长用作电极和反射镜的肖特基金属层。 具有电光吸收特性的多量子阱结构位于半导体层和肖特基金属层之间,用于构造具有金属层/多量子阱结构的二极管。 镜面层和二极管的至少一部分形成有一层,以便在金属层和镜层之间具有共振和非共振条件。 形成有二极管的基板具有由光学非反射层形成的相对侧。