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    • 44. 发明授权
    • Method for etching dielectric layers with high selectivity and low
microloading
    • 高选择性和低负载下蚀刻电介质层的方法
    • US5843847A
    • 1998-12-01
    • US639388
    • 1996-04-29
    • Bryan PuHongching ShanMichael Welch
    • Bryan PuHongching ShanMichael Welch
    • H01L21/302H01L21/3065H01L21/311H01L21/00
    • H01L21/31116
    • A method of etching a dielectric layer on a substrate with high etching selectivity, low etch rate microloading, and high etch rates is described. In the method, the substrate is placed in a process zone, and a plasma is formed from process gas introduced into the process zone. The process gas comprises (i) fluorocarbon gas for etching the dielectric layer and for forming passivating deposits on the substrate, (ii) carbon-oxygen gas for enhancing formation of the passivating deposits, and (iii) nitrogen-containing gas for etching the passivating deposits on the substrate. The volumetric flow ratio of fluorocarbon:carbon-oxygen:nitrogen-containing gas is selected to provide a dielectric to resist etching selectivity ratio of at least about 10:1, an etch rate microloading of
    • 描述了以高蚀刻选择性,低刻蚀速率微载物和高蚀刻速率蚀刻衬底上的电介质层的方法。 在该方法中,将衬底放置在工艺区域中,并且将等离子体从引入工艺区域的工艺气体形成。 工艺气体包括(i)用于蚀刻介电层并用于在衬底上形成钝化沉积物的碳氟化合物气体,(ii)用于增强钝化沉积物形成的碳 - 氧气,和(iii)用于蚀刻钝化的含氮气体 沉积在基材上。 选择氟碳:碳 - 氧:含氮气体的体积流量比以提供电介质以抵抗至少约10:1的蚀刻选择率,<10%的蚀刻速率微载荷,以及在 至少约100nm / min。 优选地,选择氟碳:碳 - 氧:含氮气体的体积流量比,使得新蚀刻特征的侧壁上的钝化沉积物的形成速率近似等于钝化沉积物的去除速率。
    • 45. 发明授权
    • Thrust reverser translating sleeve assembly
    • 推力反向器平移套筒组件
    • US08720183B2
    • 2014-05-13
    • US13038621
    • 2011-03-02
    • John Michael WelchChristopher Steven Sawyer
    • John Michael WelchChristopher Steven Sawyer
    • F02K3/02F02K1/76
    • F02K1/763F02K1/72F02K1/766F02K3/02
    • A translating sleeve assembly for use with an aircraft engine thrust reverser broadly comprises a slider track, a lifting bolt, and a hinge. The slider track may include a tubular sidewall and a guide channel formed therein that follows a curved path along a length thereof. The lifting bolt may be slidably positioned within the slider track. The hinge may include a first hinge element with a base coupled to an outer cowl shroud, a second hinge element with a hinge rod slidably positioned within the guide channel, and a pin about which the first hinge element and the second hinge element pivot. During deployment of the thrust reverser, the lifting bolt slides aftward and the hinge rod slides within the guide channel, urging the lifting bolt to pivot and the hinge to open, thereby lifting the outer cowl shroud away from the center of the aircraft engine.
    • 与飞机发动机推力反向器一起使用的平移套筒组件广泛地包括滑块轨道,提升螺栓和铰链。 滑块轨道可以包括管状侧壁和形成在其中的引导通道,其沿着其长度的弯曲路径。 提升螺栓可以可滑动地定位在滑块轨道内。 铰链可以包括第一铰链元件,其具有联接到外整流罩的底座,具有可滑动地定位在引导通道内的铰链杆的第二铰链元件,以及第一铰链元件和第二铰链元件绕其枢转的销。 在展开推力反向器期间,提升螺栓向后滑动,铰链杆在引导通道内滑动,推动提升螺栓枢转并铰链打开,从而将外整流罩远离飞机发动机的中心。
    • 46. 发明申请
    • CONVERGING BLOCKER DOOR SYSTEM FOR USE WITH A THRUST REVERSER
    • 使用阻塞式门锁系统
    • US20120187214A1
    • 2012-07-26
    • US13013053
    • 2011-01-25
    • John Michael WelchChristopher Steven Sawyer
    • John Michael WelchChristopher Steven Sawyer
    • B64D33/00
    • B64D33/04
    • A blocker door system to be used with an aircraft engine thrust reverser comprises a push ring, a plurality of connecting rods, a plurality of crankshafts, a plurality of blocker doors, and a plurality of linking elements. The push ring may encircle the aircraft engine. The connecting rods may connect along the circumference of the push ring. The crankshafts may rotatably couple to the connecting rods. The blocker doors may be positioned adjacent one another around the circumference of the aircraft engine wherein at least a portion of one blocker door covers at least a portion of the adjacent blocker door. The linking elements may connect one blocker door to the adjacent blocker door and may be operable to guide the motion of the blocker doors relative to one another.
    • 与飞机发动机推力反向器一起使用的阻挡门系统包括推环,多个连接杆,多个曲轴,多个阻挡门和多个连接元件。 推环可以环绕飞机发动机。 连杆可以沿着推环的圆周连接。 曲轴可以可旋转地连接到连接杆。 阻挡门可以围绕飞机发动机的圆周彼此相邻定位,其中一个阻挡门的至少一部分覆盖相邻阻挡门的至少一部分。 连接元件可以将一个阻挡门连接到相邻的阻塞门,并且可以可操作地引导阻挡门相对于彼此的运动。