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    • 43. 发明授权
    • Electrostatic chuck device
    • 静电吸盘装置
    • US06256187B1
    • 2001-07-03
    • US09363410
    • 1999-07-29
    • Tadao MatsunagaMasaharu Kobayashi
    • Tadao MatsunagaMasaharu Kobayashi
    • H02N1300
    • B23Q3/00C08L9/02H01L21/68H02N13/00Y10T279/23
    • An electrostatic chuck device is characterized in the provision of a ceramic layer, which serves as an adsorption surface, via an electricity insulating elastic layer, and an electrode that is formed between the ceramic layer and the electricity insulating elastic layer. The electricity insulating elastic layer consists of an adhesive that contains a rubber component and a phenol-type antioxidant. This electrostatic chuck device does not easily experience wear or deformation, and has extremely high durability. The electricity insulating elastic layer relieves stress caused by differences in coefficients of thermal expansion during heating, or by slight volume changes in the resin material. As a result, the stress applied on the ceramic layer can be reduced, making it possible to limit a reduction in the degree of flatness and the like.
    • 静电卡盘装置的特征在于,通过电绝缘弹性层提供用作吸附表面的陶瓷层,以及形成在陶瓷层和电绝缘弹性层之间的电极。 电绝缘弹性层由含有橡胶成分和苯酚型抗氧化剂的粘合剂构成。 该静电吸盘装置不容易发生磨损或变形,并具有极高的耐久性。 电绝缘弹性层减轻了由于加热时的热膨胀系数的不同引起的应力或树脂材料的轻微的体积变化。 结果,可以减小施加在陶瓷层上的应力,从而可以限制平坦度等的降低。
    • 48. 发明授权
    • Method and apparatus for processing an error flag of a PCM signal
    • 用于处理PCM信号的错误标志的方法和装置
    • US4660200A
    • 1987-04-21
    • US784593
    • 1985-10-04
    • Hiroo OkamotoMasaharu Kobayashi
    • Hiroo OkamotoMasaharu Kobayashi
    • G11B20/12G11B20/08G11B20/10G11B20/18G06F11/10
    • G11B20/1876G11B20/10527G11B20/1809
    • Method and apparatus for reproducing a PCM signal are disclosed. The PCM signal comprises a plurality of word-interleaved frames. Each frame comprises a plurality of data blocks and a parity block. Each data block comprises a plurality of words, each word comprises an upper symbol and a lower symbol arranged symbol by symbol. A plurality of upper symbols included in different blocks and a plurality of lower symbols included in the same word form a parity code generated from the symbols in the respective symbol sequences and a plurality of error detection/correction blocks. In the error flag processing of the PCM signal, the input PCM signal is reproduced, errors are detected and corrected based on the corresponding parity codes for a plurality of upper symbol error detection/correction sequences and a plurality of lower symbol error detection/correction sequences, error flags indicating the number of errors detected and the number of errors corrected are generated for the error detection/correction sequences based on the result of the error detection/correction, a flag indicating a maximum significant value is detected from two flags generated for the upper and lower symbol error detection/correction sequence of the same word and selecting that flag as a common flag to both sequences.
    • 公开了用于再现PCM信号的方法和装置。 PCM信号包括多个字交错帧。 每个帧包括多个数据块和奇偶校验块。 每个数据块包括多个单词,每个单词包括按符号排列的上部符号和下部符号。 包括在不同块中的多个上符号和包含在相同字中的多个下符号形成从各符号序列中的符号生成的奇偶校验码和多个错误检测/校正块。 在PCM信号的错误标志处理中,再现输入的PCM信号,根据多个高符号错误检测/校正序列和多个较低符号错误检测/校正序列的相应奇偶校验码来检测和校正错误 基于错误检测/校正的结果,针对错误检测/校正序列产生指示检测到的错误数量和校正错误数的错误标志,从针对所述错误检测/校正生成的两个标志中检测到指示最大有效值的标志 相同字的上下符号错误检测/校正序列,并选择该标志作为两个序列的公共标志。