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    • 45. 发明授权
    • Developing apparatus and developing method
    • 开发设备和开发方法
    • US09195140B2
    • 2015-11-24
    • US13053946
    • 2011-03-22
    • Tsuyoshi MitsuhashiKenji Sugimoto
    • Tsuyoshi MitsuhashiKenji Sugimoto
    • G03D5/00G03F7/30H01L21/67
    • G03F7/3021H01L21/67051H01L21/67253
    • A joint nozzle that delivers a developer, a rinsing liquid and nitrogen gas is disposed adjacent the spin center of a substrate in plan view. A controller operates electromagnetic switch valves to continue supply of the developer, while spinning the substrate, in a developing process, and to start supply of the rinsing liquid in a rinsing process, immediately after the supply of the developer ends, thereby achieving a shortened period of the developing process. A switching is made to a drying process by starting supply of the nitrogen gas immediately after completion of the rinsing process. Thus, even if the substrate has a large angle of contact, formation of droplets of the rinsing liquid is inhibited to prevent post-develop defects.
    • 在平面图中,与基板的旋转中心相邻地设置输送显影剂,冲洗液和氮气的接合喷嘴。 控制器在显影过程中操作电磁切换阀以继续供应显影剂,同时旋转基底,并且在显影剂供应结束后立即在漂洗过程中开始供应冲洗液,从而实现缩短的周期 的发展过程。 通过在完成漂洗处理之后立即开始供应氮气,进行干燥过程的切换。 因此,即使基板具有大的接触角,也可以抑制漂洗液的液滴的形成,防止显影后的缺陷。
    • 46. 发明申请
    • DEVELOPING APPARATUS AND DEVELOPING METHOD
    • 开发设备和开发方法
    • US20110170855A1
    • 2011-07-14
    • US13053946
    • 2011-03-22
    • Tsuyoshi MITSUHASHIKenji Sugimoto
    • Tsuyoshi MITSUHASHIKenji Sugimoto
    • G03D5/00
    • G03F7/3021H01L21/67051H01L21/67253
    • A joint nozzle that delivers a developer, a rinsing liquid and nitrogen gas is disposed adjacent the spin center of a substrate in plan view. A controller operates electromagnetic switch valves to continue supply of the developer, while spinning the substrate, in a developing process, and to start supply of the rinsing liquid in a rinsing process, immediately after the supply of the developer ends, thereby achieving a shortened period of the developing process. A switching is made to a drying process by starting supply of the nitrogen gas immediately after completion of the rinsing process. Thus, even if the substrate has a large angle of contact, formation of droplets of the rinsing liquid is inhibited to prevent post-develop defects.
    • 在平面图中,与基板的旋转中心相邻地设置输送显影剂,冲洗液和氮气的接合喷嘴。 控制器在显影过程中操作电磁切换阀以继续供应显影剂,同时旋转基底,并且在显影剂供应结束后立即在漂洗过程中开始供应冲洗液,从而实现缩短的周期 的发展过程。 通过在完成漂洗处理之后立即开始供应氮气,进行干燥过程的切换。 因此,即使基板具有大的接触角,也可以抑制漂洗液的液滴的形成,防止显影后的缺陷。
    • 47. 发明申请
    • REMOTE CONTROL SYSTEM
    • 远程控制系统
    • US20110054638A1
    • 2011-03-03
    • US12446208
    • 2007-05-30
    • Kiminao KogisoKenji SugimotoKenji Hirata
    • Kiminao KogisoKenji SugimotoKenji Hirata
    • G05B11/01
    • G08C19/00G05B2219/25409G08C2201/42G08C2201/50
    • Providing a remote control technique capable of realizing the achievement of constraints and the certain following of a target value even with a network in which delay, loss, distortion, or the like may occur. In a remote control system, an area setting unit of a client-side control unit sets at least two areas representative of a group of states of an target object, which changes over time by feedback control. A state-evaluation information sending unit sends, to the host-side control unit, state evaluation information obtained by evaluating the state of the target object based on the area set by the area setting unit. A target value setting unit of the host-side control unit sets a target value such that the state of the target object changes in the area set by the area setting units. Moreover, a target value updating unit updates the target value based on the state evaluation information received from the client-side control unit.
    • 提供即使对于可能发生延迟,丢失,失真等的网络,也能够实现约束的实现和目标值的特定追随的远程控制技术。 在遥控系统中,客户侧控制单元的区域设定单元设定表示通过反馈控制随时间而变化的目标对象的一组状态的至少两个区域。 状态评价信息发送单元根据由区域设定单元设定的区域,向主机侧控制单元发送通过评价目标对象的状态而获得的状态评价信息。 主机侧控制单元的目标值设定单元设定目标值,使得目标对象的状态在由区域设定单元设定的区域中变化。 此外,目标值更新单元基于从客户端控制单元接收到的状态评估信息来更新目标值。
    • 48. 发明授权
    • Image-generating method and image-generating system
    • 图像生成方法和图像生成系统
    • US07215825B2
    • 2007-05-08
    • US10356530
    • 2003-02-03
    • Kenji SugimotoKaori NagaiSatoshi Kusano
    • Kenji SugimotoKaori NagaiSatoshi Kusano
    • G06K9/40
    • H04N1/6086H04N1/6033
    • An image-generating system for generating data of an image on the basis of data of a photographic image obtained by capturing an image of an object. The image-generating system includes a color sample to be arranged in the proximity of an object, an illumination unit, an image pick-up unit, a color sample specifying unit and an image processing unit. The illumination unit can illuminate the object and the color sample with light lower in light quantity than ordinary light. The image pick-up unit obtains a photographic image by capturing an image of the object together with the color sample illuminated by the illumination unit. The color sample specifying unit specifies the color sample in the photographic image. The image processing unit converts colors of the object in the photographic image, taking the color sample specified by the color sample specifying unit as a reference.
    • 一种图像生成系统,用于基于通过拍摄对象的图像获得的摄影图像的数据来产生图像的数据。 图像生成系统包括要布置在物体附近的颜色样本,照明单元,图像拾取单元,颜色样本指定单元和图像处理单元。 照明单元可以以比普通光线低的光量照亮物体和颜色样本。 图像拾取单元通过与由照明单元照射的颜色样本一起捕获物体的图像来获得摄影图像。 颜色样本指定单元指定摄影图像中的颜色样本。 图像处理单元将获取由颜色样本指定单元指定的颜色样本作为基准的摄影图像中的对象的颜色进行转换。
    • 50. 发明授权
    • Turret device
    • 转塔装置
    • US6016729A
    • 2000-01-25
    • US945392
    • 1997-10-27
    • Wolfgang PfeiferKenji SugimotoHiroshi Shinohara
    • Wolfgang PfeiferKenji SugimotoHiroshi Shinohara
    • B23B3/16B23B29/24B23B29/32B23Q16/06
    • B23B3/168B23B29/242B23Q16/065Y10S82/905Y10T29/5155Y10T408/37Y10T82/2508Y10T82/2539Y10T82/2587
    • Positioning engaging members (27) are provided between a base table (10) and a turret (11) which is indexed relative to the base table (10) by a driving force of an indexing/tool turning motor (32) so as to be engageable with or disengageable from each other. The positioning engaging members (27) engage with each other to prevent the turret (11) from turning. Further, the driving force of the indexing/tool turning motor (32) is transmitted or not transmitted to the turret (11) by clutch pieces (31). The driving force of the indexing/tool turning motor (32) is transmitted to a turning tool (14) mounted on tool mounting portions (12) of the turret (11) via a power transmission member. The positioning engaging members (27) engage with or disengage from each other by an engaging unit. Further, the engaging means interlocks with the disengagement between the positioning engaging members (27) to permit the clutch pieces (31) to engage with each other while the engaging unit interlocks with the engagement between the positioning engaging members (27) to permit the clutch pieces (31) to disengage from each other.
    • PCT No.PCT / JP96 / 03660 Sec。 371日期1997年10月27日第 102(e)日期1997年10月27日PCT 1996年12月13日PCT公布。 第WO98 / 25722号公报 日期1998年6月18日定位接合构件(27)设置在基台(10)和转台(11)之间,转塔(11)通过分度/工具转动电机(32)的驱动力相对于基台 ),以便彼此接合或可分离。 定位接合构件(27)彼此接合以防止转台(11)转动。 此外,转位/转动电动机(32)的驱动力通过离合器片(31)传递或不传递到转台(11)。 转位/转向马达(32)的驱动力经由动力传递部件传递到安装在转台(11)的工具安装部(12)上的转动工具(14)。 定位接合构件(27)通过接合单元彼此接合或分离。 此外,接合装置与定位接合构件(27)之间的分离互锁,以允许离合器片(31)彼此接合,同时接合单元与定位接合构件(27)之间的接合互锁,以允许离合器 (31)彼此脱离。