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    • 44. 发明授权
    • Silicon photonic wire waveguide biosensor
    • 硅光子线波导生物传感器
    • US07778499B2
    • 2010-08-17
    • US11898660
    • 2007-09-13
    • Siegfried JanzPavel ChebenAndre DelageAdam DensmoreDan-Xia Xu
    • Siegfried JanzPavel ChebenAndre DelageAdam DensmoreDan-Xia Xu
    • G02B6/00
    • G02B6/12007G01N21/7703G01N21/7746G01N2021/7779G01N2021/7783G02B6/2813
    • Methods and devices relating to a sensor for use in detecting and monitoring molecular interactions. A silicon waveguide sensing element is provided along with a layer of silicon. A silicon oxide layer is also provided between the waveguide element and the layer of silicon. The sensing element is adjacent to an aqueous solution in which the molecular interactions are occurring. A light beam travelling in the silicon waveguide creates an evanescent optical field on the surface of the sensing element adjacent to the boundary between the sensing element and the aqueous medium. Molecular interactions occurring on this surface affect the intensity or the phase of the light beam travelling through the waveguide by changing the effective refractive index of the medium. By measuring the effect on the intensity, phase, or speed of the light beam, the molecular interactions can be detected and monitored in real time.
    • 与用于检测和监测分子相互作用的传感器相关的方法和装置。 硅波导传感元件与硅层一起提供。 在波导元件和硅层之间还提供氧化硅层。 传感元件与发生分子相互作用的水溶液相邻。 在硅波导中行进的光束在感测元件的表面上邻近感测元件和水性介质之间的边界产生消逝的光场。 通过改变介质的有效折射率,在该表面上发生的分子相互作用影响穿过波导的光束的强度或相位。 通过测量对光束的强度,相位或速度的影响,可以实时检测和监测分子相互作用。
    • 47. 发明申请
    • High speed and high efficiency Si-based photodetectors using waveguides formed with silicide for near IR applications
    • 使用由硅化物形成的波导用于近红外应用的高速和高效Si基光电探测器
    • US20050029455A1
    • 2005-02-10
    • US10943992
    • 2004-09-20
    • Dan-Xia XuSiegfried Janz
    • Dan-Xia XuSiegfried Janz
    • G02B6/30H01L31/0256H01L31/108H01L27/14H01L31/00
    • G02B6/305H01L31/1085
    • According to this invention, silicon-based photodetectors using waveguides formed with silicide regions can have high speed and high efficiency for near IR applications. Utilizing the unique properties of silicides, the proposed method provides a simple and elegant way to implement a photodetector design in which photogenerated carriers travel perpendicular to the direction of light propagation. Therefore, the speed and quantum efficiency of the photodetector may be optimized independently. This device configuration may be implemented in one of the two approaches: (a) waveguides formed through surface silicidation of a silicon-based layer of a substrate (b) waveguides formed through silicidation of ridge waveguide side-walls of a silicon-based layer of a substrate; The use of mature silicon technology promises low cost of production and other benefits.
    • 根据本发明,使用形成有硅化物区域的波导的硅基光电探测器可以在近红外应用中具有高速度和高效率。 利用硅化物的独特性质,所提出的方法提供了一种简单优雅的方式来实现光电检测器设计,其中光生载流子垂直于光传播的方向行进。 因此,可以独立地优化光检测器的速度和量子效率。 这种器件配置可以以两种方法之一来实现:(a)通过衬底的硅基层的表面硅化形成的波导(b)通过硅基层的硅基层的脊状波导侧壁的硅化而形成的波导 底物; 成熟硅技术的使用承诺生产成本低等优点。