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    • 31. 发明专利
    • ELECTRON-BEAM MICROANALYSER APPARATUS
    • GB1389119A
    • 1975-04-03
    • GB4720672
    • 1972-10-12
    • SIEMENS AG
    • G01N23/227G01Q30/08G01Q30/16H01J37/073H01J37/252H01J37/256H01J49/48H01J37/26
    • 1389119 Electron beam apparatus SIEMENS AG 12 Oct 1972 [14 Oct 1971] 47206/72 Heading H1D An electron beam microanalyser includes a field-emission cathode 2, an anode 10 and an electrode 17 providing a decelerating field in chamber 14, the electron beam causing the emission of Auger electrons from a sample 19 which are analysed in a hemispherical electrostatic analyser 23. The analyser consists of a first lattice 24 and a second lattice 25 between which a variable voltage source 26 is connected, the source being adjusted to a voltage appropriate to the energy of the Auger electrons being investigated. A modulating voltage is applied between the sample and lattice 24 from an oscillator 29 and transformer 30. A modulated voltage output is taken via capacitor 32 to a detection unit 33. A picture tube 34 scanned in synchronism with the scanning coils 36 of the electron beam is used to display the output. Figs. 2, 4 and 6 (not shown) show modified electron optical systems which have reduced aberrations, variable focal length and a "zoom" lens effect whereby the focal length of the lens can be maintained while varying the potentials on the electrode elements.
    • 37. 发明申请
    • ADJUSTABLE CONDUCTANCE LIMITING APERTURE FOR ION IMPLANTERS
    • 可调节导线限制离子植入物的孔
    • WO02058102A2
    • 2002-07-25
    • PCT/US2002/001164
    • 2002-01-16
    • G01Q30/08H01J37/16H01J37/317H01L21/265H01J37/18
    • H01J37/16H01J37/3171H01J2237/045H01J2237/188
    • A charged particle beam apparatus includes a charged particle beam source for directing a charged particle beam along a beam path in a downstream direction to a traget, and a processing station that defines a target chamber. The processing station includes a chamber divider which divides the target chamber into upstream and downstream regions during charged particle beam processing of the target, the target being located in the downstream region. The divider has an aperture therethrough sized to permit passage of the ion beam to the target without substantial blockage and to limit backflow of gas into the upstream region of the chamber. The divider minimizes the beam volume which is exposed to extraneous species generated at the target and thereby reduces the probability of beam-altering collisions.
    • 带电粒子束装置包括用于将带电粒子束沿着沿下游方向的光束路径引导到三极管的带电粒子束源,以及限定目标腔室的处理站。 处理站包括一个室分隔器,其在靶的带电粒子束处理期间将目标室分成上游和下游区域,目标位于下游区域。 分隔器具有穿过其中的孔,其尺寸允许离子束通过靶,而不会实质阻塞,并限制气体回流到腔室的上游区域。 分隔器最小化暴露于在目标处产生的外来物种的光束体积,从而降低光束变化碰撞的可能性。
    • 38. 发明申请
    • METHOD AND DEVICE FOR CHECKING AND EXAMINING THE INSIDE SURFACE OF NUCLEAR AND THERMONUCLEAR ASSEMBLIES
    • 用于检查和检查核和组件的内表面的方法和装置
    • WO02011150A1
    • 2002-02-07
    • PCT/RU2001/000309
    • 2001-07-25
    • G01Q30/08G21C1/30G21C17/01H01J37/26H01J37/28
    • G21C17/01G01Q70/02G21C1/303G21Y2002/20G21Y2002/30G21Y2002/40G21Y2004/30G21Y2004/40Y02E30/40
    • The invention relates to nuclear engineering, in particular to a method and a device for checking and examining a surface inside the experimental channels of nuclear and thermonuclear assemblies. Examination of the surface is carried out during a radiation and thereafter. Said examination is carried out for various operating regimes of a probe scanning microscope by selecting a probing device and a regime corresponding thereto. Afterwards, pictures of various surface characteristics thus obtained are analysed, making it possible to conclude with respect to the degree and dynamics of a radiation effect. The probe scanning microscope comprises a computer provided with a control plate and a measuring head of the probe scanning microscope. Said measuring head comprises a cylindrical body (1) fitted with abutments (4), a scanning unit, an electronic block (3), a data channel (2), a camera-recorder (5), lights (6) and a fixing mechanism.
    • 本发明涉及核工程,特别涉及用于检查和检查核和热核组件的实验通道内的表面的方法和装置。 在辐射期间进行表面的检查。 通过选择探测装置和对应的状态,对探针扫描显微镜的各种操作方式进行所述检查。 然后,分析由此获得的各种表面特征的图像,使得可以关于辐射效应的程度和动力学得出结论。 探针扫描显微镜包括具有控制板的计算机和探针扫描显微镜的测量头。 所述测量头包括装配有基台(4)的圆柱体(1),扫描单元,电子块(3),数据通道(2),照相机记录器(5),灯(6)和固定 机制。