专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

31. 发明申请

US20030178146A1 Article holders that use gas vortices to hold an article in a desired position 失效
公开(公告)号：US20030178146A1
公开(公告)日：2003-09-25
申请号：US10388968
申请日：2003-03-13
发明人： Sam Kao
IPC分类号： H01L021/306 , C23C016/00 , B05C013/00
CPC分类号： H01L21/6838 , H01J2237/2001
摘要： An article (e.g. a semiconductor wafer) is held in an article holder by means of a number of gas flows emitted from gas vortex chambers. Some of the gas flows act to cool an adjacent article portion more than the other gas flows. For example, some of the vortex chambers emit more gas per unit of time than the other chambers. More cooling is provided to those portions of the article which are heated more during processing. Greater temperature uniformity can be achieved.

32. 发明申请

US20030136341A1 Wafer lift pin for manufacturing a semiconductor device 审中-公开
标题翻译：用于制造半导体器件的晶片升降销
公开(公告)号：US20030136341A1
公开(公告)日：2003-07-24
申请号：US10341162
申请日：2003-01-13
发明人： Sung-Min Na
IPC分类号： B05C013/00
CPC分类号： H01L21/68742
摘要： A wafer lift pin assembly of an apparatus for manufacturing a semiconductor device comprises a lower lift pin being driven up and down by an external driving means; a lower lift pin guide leading the lower lift pin to move up and down; an upper lift pin contacting the lower lift pin, the upper lift pin being driven up and down by the lower lift pin; and an upper lift pin guide leading the upper lift pin to move up and down.
摘要翻译：一种用于制造半导体器件的装置的晶片提升销组件包括通过外部驱动装置上下驱动的下升降销; 下部升降销引导件引导下部升降销上下移动; 上提升销接触下提升销，上提升销由下提升销上下驱动; 以及上升针销，引导上升降销向上下移动。

33. 发明申请

US20030106647A1 Apparatus for holding an object to be processed 有权
标题翻译：用于保持待处理物体的装置
公开(公告)号：US20030106647A1
公开(公告)日：2003-06-12
申请号：US10345294
申请日：2003-01-16
发明人： Akira Koshiishi , Shinji Himori
IPC分类号： B05C013/00 , H01L021/3065 , C23C016/00
CPC分类号： H01L21/6835 , C23C16/4585 , H01L21/6831 , H01L21/6833 , H01L24/90 , H01L2924/01004 , H01L2924/01013 , H01L2924/01023 , H01L2924/01033 , H01L2924/01074 , H01L2924/01078 , H01L2924/01082
摘要： An apparatus for holding an object to be processed, according to this invention is mounted in a plasma processing apparatus and includes a convex-shaped holder main body, first dielectric film, and second dielectric film. The holder main body has a holding portion which holds an object to be processed placed on it and a flange formed on the peripheral portion of the holding portion to fit with a focus ring. The first dielectric film attracts the object to be processed placed on the holding portion to the holder main body by a Coulomb force. The second dielectric film attracts the focus ring fitted on the flange to the holder main body by an attracting force larger than that of the first dielectric film using a Johnson-Rahbek force. The electrostatic attracting force of the focus ring for the holder main body is increased, so that the cooling effect is increased. A change in plasma processing characteristics over time in the vicinity of the focus ring can be eliminated, and the entire surface of the object to be processed can be processed uniformly.
摘要翻译：根据本发明的用于保持待处理物体的装置安装在等离子体处理装置中，并且包括凸形保持器主体，第一电介质膜和第二电介质膜。保持器主体具有保持放置在其上的待加工物体的保持部分和形成在保持部分的周边部分上以与聚焦环配合的凸缘。第一电介质膜通过库仑力吸引放置在保持部上的待处理物体到保持器主体。使用Johnson-Rahbek力，第二电介质膜通过大于第一电介质膜的吸引力将安装在凸缘上的聚焦环吸引到保持器主体。用于保持器主体的聚焦环的静电吸引力增加，从而增加了冷却效果。可以消除焦点环附近的等离子体处理特性随时间的变化，并且可以均匀地处理被处理物体的整个表面。

34. 发明申请

US20030101928A1 DUAL CUP SPIN COATING SYSTEM 有权
标题翻译：双杯旋涂系统
公开(公告)号：US20030101928A1
公开(公告)日：2003-06-05
申请号：US09998493
申请日：2001-11-30
申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
发明人： Chih-Chen Chuang , Cheng-Hsiang Huang , Der-Yun Liu
IPC分类号： B05C013/00
CPC分类号： H01L21/6715
摘要： A dual cup spin coating system for capturing a discharged flowable coating material in a spin coating process including a first outer cup and a second outer cup said first outer cup concentrically disposed around the second outer cup forming a first capture space arranged for capturing at least a portion of a discharged flowable coating material discharged from a process substrate at a first positive angle with respect to the process substrate in a spin coating process; and, an inner cup disposed concentrically within the second outer cup forming a second capture space arranged for capturing at least a second portion of the discharged flowable coating material discharged from the process substrate at a second positive angle less than about the first positive angle with respect to the process substrate in a spin coating process.
摘要翻译：一种双杯旋涂系统，用于在包括第一外杯和第二外杯的旋涂工艺中捕获排出的可流动涂层材料，所述第一外杯同时设置在第二外杯周围，形成第一捕获空间，其设置成用于捕获至少一个在旋转涂布工艺中，从处理衬底以相对于处理衬底的第一正角度排出的可排出的可流动涂层材料的一部分; 以及同心地设置在所述第二外杯内的内杯，其形成第二捕获空间，所述第二捕获空间被布置成捕获从所述处理基板排出的排出的可流动涂层材料的至少第二部分，所述第二部分以小于约第一正角度的第二正角度相对于在旋涂工艺中加工成基材。

35. 发明申请

US20030084841A1 Device for producing a coating rod for use in the paper industry 失效
标题翻译：用于制造用于造纸工业的涂布杆的装置
公开(公告)号：US20030084841A1
公开(公告)日：2003-05-08
申请号：US10011460
申请日：2001-11-05
发明人： Christian Coddet , Bernard Hansz
IPC分类号： B05C011/00 , B05C013/00 , B05C013/02 , B05B001/24 , B05C005/04 , B05C005/00 , B05B015/04
CPC分类号： B05B13/0442 , B05B7/226 , B05B12/36 , C23C4/12 , C23C4/14
摘要： The invention concerns a method which consists in maintaining the two ends (2, 4) of the bar (1) on the end supports (3, 5) of a frame (10), one of the ends (2) being maintained fixed, and in driving the bar in rotation. The invention is characterised in that it consists further in drawing the bar (1) while spraying a coat on the bar, the drawing of the bar corresponding to an elongation of about 0.2 to 0.001%.
摘要翻译：本发明涉及一种方法，其包括将杆（1）的两端（2,4）保持在框架（10）的端部支撑件（3,5）上，其中一个端部（2）保持固定，并在旋转中驱动杆。本发明的特征在于，它进一步在拉伸棒材（1）的同时在棒材上喷涂涂层，拉伸棒材对应于约0.2至0.001％的伸长率。

36. 发明申请

US20030049380A1 Method and device in a paper machine, coating machine, intermediate winder, unwind stand of a slitter-winder, or in any other device for treatment of a web 失效
公开(公告)号：US20030049380A1
公开(公告)日：2003-03-13
申请号：US10234605
申请日：2002-09-04
申请人： METSO PAPER, INC.
发明人： Jorma Kinnunen , Silvo Mikkonen , Jukka Linnonmaa
IPC分类号： B05C013/00
CPC分类号： B65H19/107 , B65H26/00 , B65H2301/41361 , B65H2301/4148 , B65H2301/41734
摘要： The invention concerns a method and a device in a paper machine, coating machine, intermediate winder, unwind stand of a slitter-winder, or in any other device for treatment of a web. In the event of disturbance, the web (P) is made to be wound in a controlled way around at least one web guide roll (18a).

37. 发明申请

US20020174829A1 Exhaust flow control system 有权
标题翻译：排气流量控制系统
公开(公告)号：US20020174829A1
公开(公告)日：2002-11-28
申请号：US10196787
申请日：2002-07-17
申请人： LSI Logic Corporation
发明人： Richard C. Gimmi , James E. Cossitt
IPC分类号： B05C013/00
CPC分类号： G03F7/162
摘要： A method of applying a layer of a flowable material to a substrate. The substrate is received with a rotatable chuck, and an amount of the flowable material is dispensed on to the substrate. The substrate is spun on the rotatable chuck, thereby spreading the flowable material across the substrate and conveying a surplus amount of the flowable material away from the substrate. An exhaust stream is created with a vacuum source. At least a portion of the surplus amount of the flowable material conveyed away from the substrate is entrained into the exhaust stream, which exhaust stream is conveyed into an exhaust system. A pressure drop is created in the exhaust stream across a vane anemometer within the exhaust system. The blow back of the entrained portion of the surplus amount of the flowable material from a downstream position in the exhaust system to the substrate is thereby reduced. Thus, positioning the vane anemometer in the exhaust system tends to create a sudden and distinct pressure drop across the vane anemometer, which tends to reduce the occurrence of blow back of the flowable material from the portion of the exhaust system that is downstream from the vane anemometer, and which is at a relatively lower pressure, to the portion of the exhaust system that is upstream from the vane anemometer, and which is at a relatively higher pressure, and which is where the substrate is processed.
摘要翻译：将可流动材料层施加到基材的方法。用可旋转卡盘接收基板，并将一定量的可流动材料分配到基板上。基板在可旋转卡盘上旋转，从而将可流动材料铺展在基板上，并将多余的可流动材料输送离开基板。用真空源产生排气流。从基板输送的剩余量的可流动材料的至少一部分被夹带到排气流中，该排气流被输送到排气系统中。在排气系统内的叶片风速计排气流中产生压降。从而排气系统的下游位置到基板的剩余量的可流动材料的夹带部分的吹回减少。因此，将叶片风速计定位在排气系统中倾向于在叶片风速计上产生突然且明显的压降，这倾向于减少可流动材料从叶片下游的排气系统的部分的吹回的发生风速计，其处于相对较低的压力下，与位于叶片风速计上游的排气系统的部分相对较高的压力下，并且其中衬底被处理。

38. 发明申请

US20020150680A1 Manufacturing process of christmas tree decorations and racks for their fixing during this process 失效
标题翻译：在这个过程中，圣诞树装饰和架子的制造过程用于固定
公开(公告)号：US20020150680A1
公开(公告)日：2002-10-17
申请号：US10089573
申请日：2002-03-29
发明人： Jan Gajdosik , Jaroslav Trtik
IPC分类号： C23C016/00 , B05D001/36 , B05D007/00 , B05C013/00 , B05C021/00
CPC分类号： C03C17/001 , A47G33/08 , C03C17/09 , C03C2217/25 , C03C2217/27 , C03C2217/72 , C03C2218/15
摘要： A manufacturing process of Christmas tree decorations where glass half-products are first blown to required dimensions and shapes, including the process stem. This glass half-product is fixed into the rack and placed into the metal-coating device where, under vacuum conditions, a thin (1 to 7 microns) layer of metals and/or their alloys is coated on its surface by vacuum plating or vacuum powder coating processes. The metal-coated surfaces created this way may be finished in various colors using clear and color varnishes either gloss or matt. The glass half-products for Christmas tree decorations may be provided with shading in the place of intended decor before the half-product is put into the vacuum metal-coating device. After the shading elements are removed, clear non-coated spots are created on the decoration surfaces. The rack accommodating the glass half-products of decorations is for their placement into the metal-coating device when above methods are performed.
摘要翻译：圣诞树装饰的制造过程，其中玻璃半成品首先被吹制成所需的尺寸和形状，包括工艺杆。将这种玻璃半成品固定在机架上并放置在金属涂层装置中，在真空条件下，通过真空电镀或真空将薄（1至7微米）的金属和/或其合金涂覆在其表面上粉末涂料工艺。以这种方式制造的金属涂层表面可以用各种颜色完成，使用透明和彩色清漆，无论是光泽还是无光泽。圣诞树装饰品的玻璃半制品在半成品放入真空金属涂层装置之前，可以在预期装饰的地方设置阴影。在去除遮光元件之后，在装饰表面上形成清晰的未涂覆的斑点。当进行上述方法时，容纳玻璃半装饰品的架子被放置在金属涂覆装置中。

39. 发明申请

US20020033133A1 Substrate processing pallet and related substrate processing method and machine 有权
公开(公告)号：US20020033133A1
公开(公告)日：2002-03-21
申请号：US09916643
申请日：2001-07-27
发明人： Martin P. Klein , David Felsenthal , Piero Sferlazzo
IPC分类号： B05C013/00
CPC分类号： H01L21/67346 , C23C14/50 , C23C14/568 , H01L21/68 , Y10S414/139
摘要： A substrate processing pallet has a top surface and a plurality of side surfaces. The top surface has at least one recess adapted to receive a substrate. The recess includes a support structure adapted to contact a portion of a substrate seated in the recess and a plurality of apertures each adapted to accommodate a lift pin. Lift pins can extend through the apertures initially to support the substrate and retract to deposit the substrate onto the support structure. A side surface includes a process positioning feature adapted to engage with a feature located in a process chamber to position the pallet. A side surface includes a positioning feature adapted to engage with an end effector alignment feature to position the pallet with respect to the end effector during transport. A side surface includes support features adapted to engage with end effector support features to support the pallet during transport.

40. 发明申请

US20020005165A1 Coating installation for disk-form workpieces 失效
标题翻译：圆盘形工件涂层安装
公开(公告)号：US20020005165A1
公开(公告)日：2002-01-17
申请号：US09886678
申请日：2001-06-21
发明人： Thomas Matt
IPC分类号： B05C013/00
CPC分类号： H01L21/67126 , C23C14/564 , C23C14/566
摘要： Coating installation and method for disk-shaped workpieces having a transport chamber (3) with a workpiece transport configuration (11) and at least two linearly extendable and retractable transport rams (15) driven under control and connected to a rotational axis (A) that is also driven under control. The rams are within shell lines of a rotation body about the rotational axis (A) and can be extended and retracted in the same direction with respect to a direction on the rotational axis. A workpiece receiver (17) is at the ends of each ram (15) and at least two operating openings (19B, 19S) by which the transport chamber (3) communicates with stations (21, 23) are provided, of which one is a coating station and wherein the surface normals (N) of the operating openings are in the direction of shell lines of the rotation body. A pump unit (34) communicates via a pump opening (30) with the transport chamber (3) as well as for the coating station (21). At least one of the rams (15) has, at its end, a closure configuration (17) or can be equipped with one, orientable toward the pump opening and the closure configuration, and, with orientation of the ram (15) onto the pump opening (30) and subsequently its extension (F), enters into an operational connection forming a sealed closure.
摘要翻译：具有具有工件输送构造（11）的输送室（3）和至少两个可直线驱动和可伸缩的输送柱塞（15）的盘形工件的涂覆装置和方法，所述输送室（15）在控制下被驱动并连接到旋转轴线（A）也受到控制。公制件围绕旋转轴线（A）旋转体的壳线内，并且可以相对于旋转轴线上的方向沿相同方向延伸和缩回。工件接收器（17）位于每个压头（15）的端部，并且设置有运送室（3）与站（21,23）连通的至少两个操作开口（19B，19S），其中一个涂覆站，并且其中操作开口的表面法线（N）在旋转体的外壳线的方向上。泵单元（34）经由泵开口（30）与输送室（3）以及涂布站（21）连通。所述柱塞（15）中的至少一个在其端部处具有闭合构造（17），或者可以配备有朝向泵开口和闭合构造定向的一个，并且随着冲头（15）的定向到泵开口（30）和随后的其延伸部（F）进入形成密封盖的操作连接。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式