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31. 发明授权

US08040099B2 Position device in gantry type of construction 有权
标题翻译：龙门式施工中的定位装置
公开(公告)号：US08040099B2
公开(公告)日：2011-10-18
申请号：US12440855
申请日：2007-05-11
申请人： Ralph Coleman , Laurent Heiniger
发明人： Ralph Coleman , Laurent Heiniger
IPC分类号： G05B1/06
CPC分类号： G01B5/0014 , G01D5/34746 , G05B2219/37193 , G05B2219/40293 , G05B2219/49207 , Y10T409/307728 , Y10T409/308288
摘要： In a positioning device in gantry type of construction, due to a special arrangement of the position-measuring devices used for the positioning, errors due to thermal expansion of the positioning device may be avoided to a great extent. In particular, attention is given to the advantageous placement of fixed point of a scale relative to a straightness track of a further scale.
摘要翻译：在台架式结构中的定位装置中，由于用于定位的位置测量装置的特殊布置，可以在很大程度上避免由于定位装置的热膨胀引起的误差。特别地，注意到相对于进一步刻度的直线轨迹的刻度的固定点的有利放置。

32. 发明申请

US20110232120A1 METHODS AND APPARATUS FOR COMPENSATING TEMPERATURE-DEPENDENT CHANGES OF POSITIONS ON MACHINE TOOLS 有权
标题翻译：用于补偿机床位置温度依赖性变化的方法和装置
公开(公告)号：US20110232120A1
公开(公告)日：2011-09-29
申请号：US13070290
申请日：2011-03-23
申请人： Udo Tüllmann , Christof Zenker
发明人： Udo Tüllmann , Christof Zenker
IPC分类号： G01B5/14
CPC分类号： G05B19/404 , G05B2219/49206 , G05B2219/49207 , G05B2219/49212
摘要： A disclosed example method for compensating a temperature-dependent change of position on a machine tool having at least one first linear axis involves detecting at least one first temperature at a first temperature measuring position of the first linear axis of the machine tool. The example method also involves obtaining a first difference in temperature between a first reference temperature and the first temperature and determining a first compensation value based on the first difference in temperature. In addition, the example method involves compensating a temperature-dependent change of position based on the first compensation value, the first compensation value is additionally determined based on an axis position of the first linear axis.
摘要翻译：用于补偿具有至少一个第一直线轴的机床上的温度依赖性位置变化的公开的示例性方法涉及检测机床的第一线性轴线的第一温度测量位置处的至少一个第一温度。该示例性方法还涉及获得第一参考温度和第一温度之间的温度的第一差异，并且基于温度的第一差异来确定第一补偿值。此外，该示例性方法包括基于第一补偿值来补偿位置的温度变化，基于第一线性轴的轴位置另外确定第一补偿值。

33. 发明申请

US20040066831A1 Method for determining effective coefficient of thermal expansion 有权
标题翻译：确定有效热膨胀系数的方法
公开(公告)号：US20040066831A1
公开(公告)日：2004-04-08
申请号：US10311574
申请日：2003-11-03
发明人： Satish Shivaswamy , Richard Curless
IPC分类号： G01K015/00 , G01K019/00 , G01N025/16
CPC分类号： G01N25/16 , G01B5/0014 , G05B2219/49206 , G05B2219/49207 , G05B2219/49212 , G05B2219/49218
摘要： A method for determining an nulleffectivenull thermal coefficient of a machine comprises the steps of installing one or more temperature sensors (110) at various locations on the machine, positioning a first machine member (60) at a nullknownnull reference Location, relative to a second machine member (42), installing a linear position measuring device (120) to detect changes in position of the first machine member (60) relative to the second machine member (42) along a first axis of movement, periodically acquiring readings from each of the temperature sensors (110) and from the linear position measuring device (120) during a test cycle and compiling the temperature and linear position data into a table. A statistical correlation analysis is performed to determine which of the temperature sensors (110) experiences changes in temperature are most linearly related to changes in the linear position of the first machine member (60) relative to the second machine member (42) and an nulleffectivenull coefficient of thermal expansion is thereafter determined as the rate of change of position, i.e. length, relative to change in temperature. The present method includes using the machine's nulleffectivenull thermal coefficient to calibrate the motion of the machine to compensate for the thermal characteristics thereof.
摘要翻译：用于确定机器“有效”热系数的方法包括以下步骤：在机器上的各个位置安装一个或多个温度传感器（110），将第一机器构件（60）定位在“已知”参考位置到第二机器构件（42），安装线性位置测量装置（120）以沿着第一移动轴线检测第一机器构件（60）相对于第二机器构件（42）的位置的变化，周期性地获取读数在测试循环期间从每个温度传感器（110）和线性位置测量装置（120）获取温度和线性位置数据，并将其编入表中。执行统计相关分析以确定哪个温度传感器（110）经历温度变化与第一机器构件（60）相对于第二机器构件（42）的线性位置的变化最直接相关，并且“ 然后将有效的“热膨胀系数”确定为相对于温度变化的位置变化率即长度。本方法包括使用机器的“有效”热系数来校准机器的运动以补偿其热特性。

34. 发明授权

US06345213B1 Control method for an industrial robot 有权
标题翻译：工业机器人的控制方法
公开(公告)号：US06345213B1
公开(公告)日：2002-02-05
申请号：US09700438
申请日：2001-02-14
申请人： Ralf-Gunter Graeser , Robert Klingel
发明人： Ralf-Gunter Graeser , Robert Klingel
IPC分类号： G06F1900
CPC分类号： B25J9/1692 , G05B2219/39008 , G05B2219/39033 , G05B2219/49206 , G05B2219/49207 , Y10S414/13
摘要： A method provides an exact measurement of the tool center point (TCP) being carried out, preferably in the whole working area of the robot. In this measurement, the robot moves very slowly so that little heat is generated by the driving assemblies and the temperature gradients are as low as possible. The measurement can be made, for example, using a high-precision laser distance and angle measurement system. The measurement is carried out such that a measuring point is moved to working area points and then the deviations of the positions and/or orientations of the measuring point are determined using the laser distance and angle measurement system, i.e. a nominal/actual comparison is made. The TCP can preferably serve as the measuring point. The point must always be selected so that the positioning and orientation deviations of the kinematic chain with respect to the PCT can be determined with sufficient accuracy.
摘要翻译：一种方法提供了正在进行的刀具中心点（TCP）的精确测量，优选地在机器人的整个工作区域中。在此测量中，机器人运动非常缓慢，因此驱动组件产生的热量很小，温度梯度尽可能低。可以例如使用高精度的激光距离和角度测量系统进行测量。进行测量，使得测量点移动到工作区域点，然后使用激光距离和角度测量系统确定测量点的位置和/或取向的偏差，即进行标称/实际比较。 TCP可以优选地用作测量点。必须始终选择该点，使得可以以足够的精度确定运动链相对于PCT的定位和定向偏差。

35. 发明授权

US5581467A Displacement correcting device and method for a machine tool 失效
标题翻译：机床位移校正装置及方法
公开(公告)号：US5581467A
公开(公告)日：1996-12-03
申请号：US364243
申请日：1994-12-27
申请人： Shouki Yasuda
发明人： Shouki Yasuda
IPC分类号： B23Q15/18 , G05B19/404 , G06F19/00
CPC分类号： G05B19/404 , G05B2219/34072 , G05B2219/37405 , G05B2219/37526 , G05B2219/37542 , G05B2219/41055 , G05B2219/49207
摘要： The ratio of executed to skipped measurement movement commands required for actual measurement and a correction value when skipping a measurement movement command are determined and then updated according to past (hysteresis) measurement data. The actual thermal displacement measurement during an executed measurement movement command is performed at a proper rate to improve the machining efficiency of an NC machine tool and minimize an error due to the correction.
摘要翻译：确定实际测量所需的跳跃测量移动命令的比例和跳过测量移动命令时的校正值，然后根据过去（滞后）测量数据更新。在执行的测量移动命令期间的实际热位移测量以适当的速率进行，以提高NC机床的加工效率，并使由于校正引起的误差最小化。

36. 发明申请

WO2016150986A1 VERFAHREN ZUM BETREIBEN EINER VERZAHNUNGSBEARBEITENDEN MASCHINE 审中-公开
标题翻译：一种用于操作齿轮EDITED机
公开(公告)号：WO2016150986A1
公开(公告)日：2016-09-29
申请号：PCT/EP2016/056310
申请日：2016-03-23
申请人： KLINGELNBERG AG
发明人： WEBER, Jürgen , RIBBECK, Karl-Martin , BLASBERG, Herbert
IPC分类号： G05B19/404 , B23Q15/22
CPC分类号： G05B19/404 , B23Q15/22 , G05B2219/49207 , G05B2219/50282 , G05B2219/50307
摘要： Verfahren zum Betreiben einer verzahnungsbearbeitenden Maschine mit den folgenden Schritten: - Durchführen der Bearbeitung eines ersten Werkstücks (1) in der Maschine, wobei sich das erste Werkstück (1) aufgrund der Bearbeitung erwärmt, - Ermitteln mindestens einer charakteristischen Werkstückgröße an dem ersten Werkstück (1) im erwärmten Zustand, wobei zum Ermitteln eine Messvorrichtung der Maschine zum Einsatz kommt, - Durchführen einer Kompensationsermittlung anhand der mindestens einen charakteristischen Werkstückgröße des ersten Werkstücks (1) und mindestens einer charakteristischen Werkstückgröße eines Referenzwerkstücks, wobei - die charakteristische Werkstückgröße des Referenzwerkstücks in der Maschine nach dem Erreichen einer Beharrungstemperatur ermittelt wurde, - im Rahmen der Kompensationsermittlung mindestens ein Kompensationswert ermittelt wird, - Anpassen der Maschineneinstellung unter Berücksichtigung des mindestens einen Kompensationswerts, - Durchführen der Bearbeitung eines weiteren Werkstücks (2) in der Maschine.
摘要翻译：操作的齿轮加工机器，包括以下步骤的方法： - 执行在机器中的第一工件（1），其中，所述第一工件（1）由于加热到加工的机械加工， - 确定所述工件的至少一个特征的尺寸，以在第一工件（1 ）在加热状态下，所述机器的测量装置来确定要使用， - 执行补偿确定所述第一工件（1）和参考工件的至少一个特征的工件尺寸，工件的至少一个特征的尺寸的基础上 - 基准工件的特性工件尺寸的机达到稳态温度后测定， - 至少一个补偿值被确定为补偿确定的一部分， - 调整机器的设置要考虑到所述至少一个补偿值， - DUR chführen处理在机器中的另一工件（2）。

37. 发明申请

WO03007349A3 HIGH TEMPERATURE SUBSTRATE TRANSFER ROBOT 审中-公开
标题翻译：高温基板传输机器人
公开(公告)号：WO03007349A3
公开(公告)日：2003-09-18
申请号：PCT/US0222127
申请日：2002-07-12
申请人： APPLIED MATERIALS INC
发明人： PENCIS CHRIS HOLT , HUDGENS JEFFREY C , COX DAMON KEITH , RICE MICHAEL , CIULIK JAMES R , FREEMAN MARVIN L , VAN GOGH DAVID A
IPC分类号： B25J9/00 , B25J9/10 , B25J9/16 , G05B19/404 , H01L21/00 , H01L21/677 , H01L21/68 , B23Q15/18 , G05D3/00
CPC分类号： H01L21/67748 , B25J9/0009 , B25J9/107 , B25J9/1628 , G05B19/404 , G05B2219/39192 , G05B2219/45031 , G05B2219/49169 , G05B2219/49207 , H01L21/67103 , H01L21/67259 , H01L21/67742 , H01L21/68
摘要： Generally, a robot for transferring a substrate in a processing system and a method of determining a position of the robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot. The robot maybe comprised of linkages fabricated from materials selected to minimize the effects of thermal changes.
摘要翻译：通常，提供了用于在处理系统中传送基板的机器人以及确定机器人的位置的方法。在一个实施例中，确定机器人的位置的方法包括获取第一组位置度量，获取第二组位置度量以及使用第一组和第二组位置解析由于热膨胀引起的机器人的位置指标。获取第一和第二组位置度量可以发生在处理系统内的相同位置处，或者可以发生在不同位置处。例如，在另一个实施例中，该方法可以包括：在靠近处理室的第一位置处获取第一组位置度量并且在另一位置处获取第二组位置度量。在另一个实施例中，使用所确定的机器人的位置来校正基板中心信息。机器人可能由选择材料制成的链接组成，以最大限度地减少热变化的影响。

38. 发明申请

WO1993019876A1 MACHINE AND METHOD UTILIZING THERMAL COMPENSATION 审中-公开
标题翻译：使用热补偿的机器和方法
公开(公告)号：WO1993019876A1
公开(公告)日：1993-10-14
申请号：PCT/US1992003886
申请日：1992-05-18
申请人： HARDINGE BROTHERS, INC.
发明人： HARDINGE BROTHERS, INC. , SHEEHAN, Terrence, M. , SOROKA, Daniel, P. , MATSUBARA, Takahiro , CADY, Raymond, C. , AYZENSHTOK, Gregory , COMSTOCK, Gary, L.
IPC分类号： B23B01/00
CPC分类号： G05B19/404 , G05B2219/49207 , Y10S82/90 , Y10T29/4976 , Y10T82/2502 , Y10T82/2533 , Y10T409/303976
摘要： In summary, therefore, this invention is directed to a thermal growth detector and compensator for detecting and compensating for relative movement between a work holder (12) of a machine tool (M) and a tool holder (130), that includes an elongated rod (20) made of a material having a coefficient of thermal expansion of substantially zero that is attached at one end (22) thereof to a part of a machine tool (M), and is attached at another end (24) thereof to a part of a work holder (12) on the machine tool (M). There is an element (60) disposed at one end of the elongated rod (20) for detecting movement of the rod (20), and an automatic compensation means is operatively connected to the movement detection element (60) for automatically moving a tool holder (130) relative to the work holder (12) as a function of the movement of the rod (20) detected by the movement detection element (60) to compensate for movement of the work holder (12) relative to the machine tool (M), whereby any movement of the work holder (12) relative to the tool holder (130) is detected and compensated for by moving the tool holder (130) to compensate for movement of the work holder (12) relative to another part of the machine tool (M).

39. 发明授权

KR101280088B1 공작기계에 있어서의 주축장치의 변위 및 편향측정장치 有权
标题翻译：用于测量加工工具中的主轴装置的位移和偏移的测量装置
公开(公告)号：KR101280088B1
公开(公告)日：2013-07-05
申请号：KR1020070041056
申请日：2007-04-27
申请人： 코마츠 엔티씨 가부시끼가이샤
发明人： 니시자키테루히로 , 오야베마사하루 , 무라이시로
IPC分类号： B23Q17/09 , B23Q17/00
CPC分类号： G05B19/404 , B23Q17/2233 , G01B13/12 , G05B2219/37409 , G05B2219/49207 , Y02P90/265 , Y10T408/16 , Y10T408/175 , Y10T408/46 , Y10T409/303976 , Y10T409/306832 , Y10T409/30728 , Y10T409/308064 , Y10T409/3098
摘要： 주축장치의 열변위량과 공구의 회전편향량을 모두 측정할 수 있는 동시에 측정정밀도를 향상할 수 있는 공작기계에서의 주축장치의 변위 및 회전편향측정장치를 제공한다.
공작기계 베드(bed)의 소정위치에 에어분사노즐(25)을 배치한다. 주축장치(20)의 하우징(20a)의 외주면에 부착된 기준블록(30)을 주축장치(30)와 함께 측정개시위치(A1)로 이동하고, 기준블록(30)을 상기 에어분사노즐(25)에서 분사되는 에어를 가로지르도록 Z축 방향으로 이동하며, 이 행정(行程)으로 측정된 압력의 변화에 따라서 주축장치(20)의 열변위량을 연산한다. 또 상기 주축장치(20)에 장착된 공구의 외주면을 상기 에어분사노즐(25)의 선단면에 접근시켜서 이 공구를 소정위치에서 회전하면서 에어를 공구의 외주면에 분사해서 에어의 압력을 측정하고, 이 측정압력의 변화에 따라 공구의 회전편향량을 연산한다.
주축장치, 에어분사노즐, 하우징, 기준블록

40. 发明公开

KR1020090067172A 선반 및 선반에 의한 가공 방법 有权
标题翻译： LATHE和LATHE加工方法
公开(公告)号：KR1020090067172A
公开(公告)日：2009-06-24
申请号：KR1020097007535
申请日：2007-09-13
申请人： 가부시기가이샤 츠가미
发明人： 테라이히로시 , 타테미타카오 , 사토히데노리 , 카자마히로아키
IPC分类号： B23B25/06 , B23Q17/22 , B23Q17/00
CPC分类号： B23Q11/0007 , B23B25/06 , B23Q39/021 , B23Q2039/008 , G05B19/404 , G05B2219/49207 , Y10T82/10 , Y10T82/2502 , Y10T82/2514 , Y10T82/2524 , Y10T82/2541 , Y10T82/2566 , Y10T82/2568 , Y10T82/2571 , Y10T82/2597 , Y10T408/8588
摘要： In a lathe for machining work (W) by a tool (421), the position of the tool (421) varies according to the progress of the machining. The lathe has a displacement sensor (200) for measuring the distance between a reference point and a variation point in which a variation in the position of the tool (421) is reflected. The reference point is a point immovable relative to the varying position of the tool and is determined by a guide bush (90). The distance measured by the displacement sensor (200) determines a relative positional relationship between the position of the tool and the reference point. Based on the result of the measurement by the displacement sensor (200), the tool (421) is moved so that the height of the axis of the tool and the centerline of the work have a predetermined relative positional relationship. Consequently, the amount of displacement of the height of the axis of the tool due to thermal deformation can be corrected.
摘要翻译：在通过工具（421）加工加工的车床（W）中，刀具（421）的位置根据加工的进度而变化。车床具有位移传感器（200），用于测量反映工具（421）的位置变化的基准点与变化点之间的距离。参考点是相对于工具的变化位置不可移动的点，并且由引导衬套（90）确定。由位移传感器（200）测量的距离确定了刀具的位置与参考点之间的相对位置关系。基于位移传感器（200）的测量结果，工具（421）移动，使得工具的轴线高度和工件的中心线具有预定的相对位置关系。因此，可以校正由于热变形引起的工具的轴心高度的位移量。

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