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    • 31. 发明申请
    • IMPROVED MACHINE FOR HEATING AN ARTICLE OR PRODUCT BY VAPOUR CONDENSATION
    • 改进的机器通过蒸汽冷凝来加热物品或产品
    • WO1985001791A1
    • 1985-04-25
    • PCT/FR1984000226
    • 1984-10-10
    • PIEZO-CERAM ELECTRONIQUEPESCATORE, RichardBOUMENDIL, Jean-Jack
    • PIEZO-CERAM ELECTRONIQUE
    • F28D15/00
    • B23K1/015F28C3/005
    • The invention relates to heat treating machines. It relates to a machine of the in line type which comprises a tunnel (1), displacement means (2) for conveying the articles or products to be heated from the inlet of said tunnel to its outlet and, in the following order, a first chamber (10) for the condensation of secondary vapour, a second chamber (20) for the vaporization of secondary liquid and for the complementary condensation of the primary vapour, a third chamber (30) for heating the article or product to be heated and which is filled with primary vapour, a fourth chamber (40) for the vaporization of secondary liquid and for the complementary condensation of the primary vapour, and a fifth chamber (50) for the condensation of the secondary vapour, said chambers having a cross-section larger than that of the tunnel, and being distributed along said tunnel and being interconnected by sections of said tunnel. Utilization particularly in the electronic industry.
    • 本发明涉及热处理机。 它涉及一种在线型机器,其包括通道(1),用于将待加热的物品或产品从所述隧道的入口输送到其出口的移动装置(2),并且按照以下顺序将第一 用于二次蒸气冷凝的室(10),用于二次蒸发蒸发二次液体的第二室(20)和用于第一蒸汽的互补冷凝的第二室(30),用于加热被加热物品或产品的第三室(30) 填充有初级蒸气,第二室(40),用于二次蒸发蒸发和第一蒸汽的互补冷凝;以及第五室(50),用于使二次蒸汽冷凝,所述室具有横截面 大于隧道,并且沿着所述隧道分布并且通过所述隧道的部分相互连接。 尤其在电子工业中的应用。
    • 32. 发明专利
    • Cooling apparatus and heating apparatus
    • 冷却装置和加热装置
    • JP2012031504A
    • 2012-02-16
    • JP2011045872
    • 2011-03-03
    • Canon Anelva Corpキヤノンアネルバ株式会社
    • NISHIMURA HIDEKAZUMAJIMA KAZUYUKI
    • C23C14/34
    • G11B5/8404F25B21/02F28C3/005F28F3/12H01L21/67109H01L21/67173
    • PROBLEM TO BE SOLVED: To provide a cooling apparatus capable of improving cooling efficiency and achieving high-speed cooling processing and to provide a heating apparatus capable of improving heating efficiency and achieving high-speed heating processing.SOLUTION: The cooling apparatus includes: a chamber 211; a substrate carrier 2 for holding a substrate 1, which is carried from a carry-out port of the chamber 211 into a stop position in the chamber 211 and carried out from a carry-out port of the chamber 211; a first cooling plate 3a and a second cooling plate 3b which are respectively arranged on both sides of the substrate carrier 2 carried into the stop position in the chamber 211; a gas discharge port 4 formed at least on either one of the first cooling plate 3a and the second cooling plate 3b to discharge gas to the substrate 1; a gas supply means for supplying gas to the gas discharge port 4; and a moving means for moving the first cooling plate 3a and the second cooling plate 3b so as to be close to the substrate carrier 2.
    • 要解决的问题:提供一种能够提高冷却效率和实现高速冷却处理的冷却装置,并提供能够提高加热效率并实现高速加热处理的加热装置。 解决方案:冷却装置包括:室211; 用于保持基板1的基板载体2,其从室211的进出口运送到室211中的停止位置并从室211的进出口进行运送; 第一冷却板3a和第二冷却板3b分别布置在承载在室211中的停止位置的基板载体2的两侧; 至少形成在第一冷却板3a和第二冷却板3b中的任一个上的气体排出口4,以将气体排出到基板1; 用于向气体排出口4供给气体的气体供给装置; 以及用于使第一冷却板3a和第二冷却板3b靠近基板载体2移动的移动装置。(C)2012年,JPO和INPIT
    • 40. 发明申请
    • THERMAL RECUPERATION METHODS, SYSTEMS, AND DEVICES
    • 热重建方法,系统和设备
    • US20160187065A1
    • 2016-06-30
    • US14865727
    • 2015-09-25
    • Rebound Technologies, Inc.
    • Russell MurenLuke Erickson
    • F28C3/00F28D7/00
    • F28C3/005F28D7/0008F28D20/0056F28D2020/0069Y02E60/142
    • Thermal recuperation methods, systems, and devices are provided. The methods, systems, and/or devices may provide for: introducing a first fluid into at least a portion of a tank containing a solid; exchanging heat between the solid contained within the tank and the first fluid as the first fluid passes at least around or through the solid; extracting the heated first fluid from at least the portion of the tank containing the solid; and/or passing the heated first fluid with respect to a heat exchanger thermally coupled with a second fluid. The heated first fluid may be cooled as it passes with respect to the heat exchanger and heat may be thermally recuperated between the solid and the second fluid.
    • 提供热回收方法,系统和设备。 方法,系统和/或装置可以提供:将第一流体引入到包含固体的罐的至少一部分中; 当第一流体至少在固体周围或穿过固体时,在容纳在容器内的固体与第一流体之间进行热交换; 从至少包含固体的罐的部分中提取加热的第一流体; 和/或使加热的第一流体相对于与第二流体热耦合的热交换器通过。 加热的第一流体可以在其相对于热交换器通过时被冷却,并且热量可以在固体和第二流体之间热回收。