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31. 发明专利

JP2009140607A Magnetic head for perpendicular magnetic recording and method of manufacturing same 有权
标题翻译：磁性记录用磁头及其制造方法
公开(公告)号：JP2009140607A
公开(公告)日：2009-06-25
申请号：JP2008185706
申请日：2008-07-17
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , ARAKI HIRONORI , HORINAKA TAKEHIRO , LIU KOWANG , SCHRECK ERHARD
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/112 , G11B5/3116 , G11B5/3136 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To suppress protrusion of an end face of a shield provided on a medium facing surface due to heat generated by a coil. SOLUTION: A magnetic head includes a pole layer 12 and a shield 13. The shield 13 includes a first layer 13B1 having a front end face located in the medium facing surface 30 at a forward position of an end face of the pole layer 12 along a direction of travel of the recording medium. The magnetic head further includes a stopper layer 61 for suppressing protrusion of the front end face of the first layer 13B1, the stopper layer being disposed adjacent to the first layer 13B1 and made of a nonmagnetic material having a linear thermal expansion coefficient of 5×10 -6 /°C or smaller at a temperature of 25°C to 100°C. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了抑制由于线圈产生的热而设置在面向介质的表面上的屏蔽的端面的突出。解决方案：磁头包括极层12和屏蔽13.屏蔽层13包括第一层13B1，第一层13B1的前端面位于介质对向表面30中，位于极层的端面的前部位置 12沿着记录介质的行进方向。磁头还包括用于抑制第一层13B1的前端面的突出的止挡层61，该阻挡层与第一层13B1相邻设置，并且由线性热膨胀系数为5×10的非磁性材料制成 -6 /℃或更低，温度为25℃至100℃。版权所有（C）2009，JPO＆INPIT

32. 发明专利

JP2009117027A Perpendicular magnetic recording head and manufacturing method thereof 审中-公开
标题翻译：全能磁记录头及其制造方法
公开(公告)号：JP2009117027A
公开(公告)日：2009-05-28
申请号：JP2008283461
申请日：2008-11-04
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SHO RIKIKATSU , SMYTH JOE , DOVEK MORIS , SASAKI YOSHITAKA , HAN CHERNG-CHYI
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3163
摘要： PROBLEM TO BE SOLVED: To provide a perpendicular magnetic recording head improving recording performance by suppressing saturation of magnetic fluxes in a trailing shield. SOLUTION: The perpendicular magnetic recording head includes: a tapered main pole layer 21 having a slope 21s, a tapered non-magnetic top-shaping layer 22 having a slope 22s positioned in the same plane as the slope 21s, a recording gap layer 23, and a trailing shield 24, which are stacked in this order. Since the tapered main pole layer 21 has a tapered portion, intensity of a recording magnetic field is increased. Since the tapered non-magnetic top-shaping layer 22 is inserted between the trailing shield 24 and the tapered main pole layer 21, saturation of magnetic fluxes in the trailing shield 24 is prevented. Since both the tapered main pole layer 21 and the tapered non-magnetic top-shaping layer 22 have tapered portions, effective throat height is easily controlled more than when there is no tapered portion. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供垂直磁记录头，通过抑制后挡板中的磁通量的饱和度来改善记录性能。解决方案：垂直磁记录头包括：具有斜面21s的锥形主极层21，具有位于与斜面21s相同的平面中的斜面22s的锥形非磁性顶部成形层22，记录间隙层23和后挡板24，其按顺序堆叠。由于锥形主极层21具有锥形部分，所以记录磁场的强度增加。由于锥形非磁性顶部成形层22插入在后屏蔽件24和锥形主极层21之间，所以防止尾部屏蔽件24中的磁通量的饱和。由于锥形主极层21和锥形非磁性顶部成形层22都具有锥形部分，所以与没有锥形部分相比，有效喉部高度容易受到控制。版权所有（C）2009，JPO＆INPIT

33. 发明专利

JP2008300817A Production process of electronic component package, production process of wafer for the electronic component package, and production process of basic structure for the electronic component package 有权
标题翻译：电子元件封装的生产流程，电子元器件封装的生产工艺流程以及电子元器件封装的基本结构的生产过程
公开(公告)号：JP2008300817A
公开(公告)日：2008-12-11
申请号：JP2007322711
申请日：2007-12-14
申请人： Headway Technologies Inc , Shinka Jitsugyo Kk , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , SHIMIZU TATSUJI
IPC分类号： H01L21/60 , H01L23/12 , H01L25/04 , H01L25/18
CPC分类号： H01L23/5389 , H01L23/13 , H01L23/147 , H01L23/498 , H01L23/49805 , H01L24/24 , H01L24/82 , H01L24/97 , H01L2224/24137 , H01L2224/73267 , H01L2224/92244 , H01L2224/97 , H01L2924/01006 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01044 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/09701 , H01L2924/14 , H01L2924/1461 , H01L2924/15153 , H01L2924/15165 , H01L2924/1517 , H01L2924/15787 , H01L2924/15788 , H01L2924/1579 , H01L2924/15798 , H01L2924/181 , Y10T29/49128 , Y10T29/49135 , Y10T29/49146 , Y10T29/49149 , H01L2224/82 , H01L2924/00
摘要： PROBLEM TO BE SOLVED: To mass-produce electronic components at low cost, in a short time. SOLUTION: In a production process of the electronic component package, two or more sets of external connection terminals 11 corresponding to two or more electronic packages are formed, on a substrate 10 in a plating method so that a wafer 1 is formed. In the wafer 1, two or more base scheduled portions 2, which become each base of the electronic package through mutual separation are included. Then, at least one electronic part chip 3 is jointed to each base schedule portion 2 in the wafer 1. The electrode of the electronic part chip 3 is connected to the external connection terminal 11, and the electronic component chip 3 is sealed. Then, the wafer 1 is cut so that each base schedule portion 2 is separated from each other, to form two or more bases. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：在短时间内以低成本批量生产电子元件。解决方案：在电子部件封装的生产过程中，以电镀方法在基板10上形成对应于两个或更多个电子封装的两组或多组外部连接端子11，从而形成晶片1。在晶片1中，包括通过相互分离成为电子封装的每个基底的两个或更多个基本调度部分2。然后，将至少一个电子部件芯片3连接到晶片1中的每个基准程序部分2.电子部件芯片3的电极连接到外部连接端子11，并且电子部件芯片3被密封。然后，切割晶片1，使得每个基本计划部分2彼此分离，以形成两个或更多个基座。版权所有（C）2009，JPO＆INPIT

34. 发明专利

JP2008300027A Perpendicular magnetic recording head and method of manufacturing the same 有权
标题翻译：全能磁记录头及其制造方法
公开(公告)号：JP2008300027A
公开(公告)日：2008-12-11
申请号：JP2008142684
申请日：2008-05-30
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： HAN CHERNG-CHYI , LI MIN , LIU FENGLIN , SHO RIKIKATSU
IPC分类号： G11B5/31
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , Y10T29/49032 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a perpendicular magnetic recording head for achieving high recording area densities up to 500 Gbit/in 2 . SOLUTION: A pair of bottom side shields 20 and a pair of non-magnetic material layers 30 are formed by forming non-magnetic layers on a lower side shield forming layer, selectively etching them, and forming a groove 800 having a truncated wedge-shaped sectional shape. Next, a magnetic pole tip part 10 of a magnetic pole 100 is formed inside the groove 800 so as to be separated from the pair of lower side shields 20 via a side gap layer 50. Finally, an upper shield 80 is formed above the magnetic pole tip part 10 so as to be separated from the magnetic pole tip part 10 via a recording gap layer 70. The magnetic pole tip part 10 is shielded from three directions of lower parts of both sides and the upper side by the pair of lower side shields 20 and the upper shield 80. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于实现高达500Gbit / in 2 的高记录面积密度的垂直磁记录头的制造方法。解决方案：一对底侧屏蔽20和一对非磁性材料层30通过在下侧屏蔽形成层上形成非磁性层而形成，选择性地蚀刻它们，并且形成具有截断的凹槽800 楔形截面形状。接下来，磁极100的磁极尖部10形成在槽800的内部，以便经由侧间隙层50与一对下侧屏蔽件20分离。最后，在屏蔽层80的上方形成有上屏蔽件80 磁极尖部10经由记录间隙层70与磁极末端部10分离。磁极末端部10从两侧的下部和上侧的三个方向被一对下侧屏蔽20和上护罩80.版权所有（C）2009，JPO＆INPIT

35. 发明专利

JP2008034077A Magnetic head for vertical magnetic recording, and its manufacturing method 有权
标题翻译：用于垂直磁记录的磁头及其制造方法
公开(公告)号：JP2008034077A
公开(公告)日：2008-02-14
申请号：JP2007038797
申请日：2007-02-20
申请人： Headway Technologies Inc , Shinka Jitsugyo Kk , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , SHIMIZU TATSUJI , SHIMIZU TATSUYA
IPC分类号： G11B5/31
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/1871 , G11B5/3116 , G11B5/315
摘要： PROBLEM TO BE SOLVED: To determine a throat height correctly, to suppress the protrusion of an edge on a medium facing surface of a shield due to heat produced by a coil, and to suppress the occurrence of a wide area adjacent track erasure. SOLUTION: The shield 13 has a first layer 13A1, a second layer 13A2, a third layer 13B, a first connecting section 13C and a second connecting section 13D. The first layer 13A1 has a first surface that is arranged on the front side in a travelling direction of a recording medium with respect to an edge of a magnetic pole layer 12 on the medium facing surface, a second surface that faces the magnetic pole layer 12, and a third surface that is on the opposite side of the second surface. The second layer 13A2 is in contact with the third surface. The third layer 13B is arranged so that the magnetic pole layer 12 is sandwiched by the first layer 13A1 and the third layer 13B. The first connecting section 13C connects the first layer 13A1 and the third layer 13B without contact with the magnetic pole layer 12. The second connecting section 13D connects the magnetic pole layer 12 and the third layer 13B at the position farther from the medium facing surface than the first connecting section 13C. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了正确地确定喉部高度，为了抑制由于线圈产生的热量而导致的屏蔽物的面向介质的表面上的边缘的突出，并且抑制相邻轨道擦除的广泛区域的发生。解决方案：屏蔽13具有第一层13A1，第二层13A2，第三层13B，第一连接部13C和第二连接部13D。第一层13A1具有相对于介质对向表面上的磁极层12的边缘沿着记录介质的行进方向的前侧布置的第一表面，面对磁极层12的第二表面，以及位于第二表面的相反侧的第三表面。第二层13A2与第三表面接触。第三层13B被布置成使得磁极层12被第一层13A1和第三层13B夹在中间。第一连接部分13C连接第一层13A1和第三层13B，而不与磁极层12接触。第二连接部分13D将磁极层12和第三层13B连接在比介质面向表面更远的位置处，比第一连接部13C。版权所有（C）2008，JPO＆INPIT

36. 发明专利

JP2007323797A Magnetic head and method for manufacturing the same, and method for forming patterned layer 有权
标题翻译：磁头及其制造方法及形成图案的方法
公开(公告)号：JP2007323797A
公开(公告)日：2007-12-13
申请号：JP2006330350
申请日：2006-12-07
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： SASAKI YOSHITAKA , ISHIZAKI KAZUO , ITO HIROYUKI
IPC分类号： G11B5/31
CPC分类号： G01R33/093 , B82Y25/00 , G11B5/1278 , G11B5/3116 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To provide a magnetic head having a pole layer of shape accuracy. SOLUTION: The method for forming a magnetic head includes the steps of: selectively exposing through the use of a photomask 40 a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask 40 includes first to third regions 41 to 43. The first region 41 has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region 42 touches the perimeter of the first region 41, and is located outside the first region 41. The third region 43 is located inside the first region 41 without touching the perimeter of the first region 41. The third region 43 suppresses deviation of the pole layer from its desired shape caused by the effect of light reflected while the photoresist layer is exposed. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供具有形状精度的极点的磁头。解决方案：用于形成磁头的方法包括以下步骤：通过使用光掩模40选择性曝光未图案化的光致抗蚀剂层; 通过在曝光后显影光致抗蚀剂层，形成用于形成极层的图案; 并通过使用图案形成极层。光掩模40包括第一至第三区域41至43.第一区域41具有这样的周边，使得其投影图像沿着极层顶表面的理想形状的周边成形。第二区域42接触第一区域41的周边，并且位于第一区域41的外侧。第三区域43位于第一区域41的内部，而不接触第一区域41的周边。第三区域43抑制在光致抗蚀剂层暴露时由反射的光的影响引起的极化层从其期望的形状。版权所有（C）2008，JPO＆INPIT

37. 发明专利

JP2007287313A Thin film magnetic head, its manufacturing method, and head gimbal assembly, and hard disk drive 审中-公开
标题翻译：薄膜磁头，其制造方法和头盖组件和硬盘驱动器
公开(公告)号：JP2007287313A
公开(公告)日：2007-11-01
申请号：JP2007102149
申请日：2007-04-09
申请人： Headway Technologies Inc , Shinka Jitsugyo Kk , ヘッドウェイテクノロジーズインコーポレイテッド , 新科實業有限公司SAE Magnetics(H.K.)Ltd.
发明人： SASAKI YOSHITAKA , ITO HIROYUKI , HORINAKA TAKEHIRO , KAMIKAMA TAKEHIRO , SHIMIZU TATSUJI
IPC分类号： G11B5/31
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3123 , G11B5/3163 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： PROBLEM TO BE SOLVED: To form a main magnetic pole layer with a uniform dimension without variation and to improve a yield. SOLUTION: The thin film magnetic head is manufactured in the following manner: first, a base insulating layer having a recessed part for magnetic pole formation recessed to a shape corresponding to the main magnetic pole layer is formed and the stop film for polishing by CMP is so formed as to embed the recessed part for magnetic pole formation and thereafter, a magnetic layer is formed on the stop film. Next, a groove part for separation roughly surrounding the recessed part for magnetic pole formation is formed on the outer side of the recessed part for magnetic pole formation, and thereby the cover insulating film capable of separating the magnetic layer and covering the entire surface on the upper side is formed on the separated magnetic layer. Also, the surface on which the stop film appears is polished by CMP and the portion left on the inner side of the recessed part for magnetic pole formation of the magnetic layer is used as the main magnetic pole layer. Furthermore, a record gap layer, a light shield layer and a thin film coil are formed respectively. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：形成均匀尺寸的主磁极层而不变化并提高产量。
解决方案：薄膜磁头的制造方法如下：首先，形成具有凹陷到与主磁极层相对应的形状的磁极形成用凹部的基底绝缘层，并且形成抛光用止挡膜通过CMP形成为嵌入用于磁极形成的凹部，此后在止挡膜上形成磁性层。接下来，在用于磁极形成用凹部的外侧形成用于大致围绕用于磁极形成用凹部的用于分离的槽部，由此能够分离磁性层并覆盖整个表面的覆盖绝缘膜上侧形成在分离的磁性层上。此外，通过CMP抛光停止膜出现的表面，并且将用于磁性层的磁极形成的凹部的内侧剩余的部分用作主磁极层。此外，分别形成记录间隙层，遮光层和薄膜线圈。版权所有（C）2008，JPO＆INPIT

38. 发明专利

JP2007172824A Magnetic read head and its manufacturing process 有权
标题翻译：磁读头及其制造工艺
公开(公告)号：JP2007172824A
公开(公告)日：2007-07-05
申请号：JP2006348401
申请日：2006-12-25
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： ZHANG KUNLIANG , WANG HUI-CHUAN , ZHAO TONG , CHEN YU-HSIA , LI MIN , HAN CHERNG-CHYI
IPC分类号： G11B5/39
CPC分类号： G11B5/3906 , B82Y25/00 , G01R33/093 , Y10T29/49021
摘要： PROBLEM TO BE SOLVED: To provide a high performance magnetic read head having excellent spatial resolution and its manufacturing process. SOLUTION: Improved magnetic devices have been fabricated by replacing the conventional seed layer (typically Ta) with a bilayer structured seed layer 40 having a Ru layer 31 on Ta layer 21. Although both Ru and Ta layers 31 and 21 are ultra thin (between 0. 5 and 2. 0 nm), good exchange bias field between the seed layer 40 and antiferromagnetic pinning layer 22 (IrMn about 7.0 nm thick) is retained. This arrangement facilitates minimum shield-to-shield spacing and gives excellent performance in a CPP device, CCP-CPP device, or TMR device. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供具有优异的空间分辨率及其制造工艺的高性能磁读头。解决方案：通过用Ta层21上具有Ru层31的双层结构化种子层40代替常规晶种层（通常为Ta）来制造改进的磁性器件。尽管Ru和Ta层31和21都是超薄的（在0.5至2.0nm之间），保留种子层40和反铁磁钉扎层22之间的良好的交换偏置场（IrMn约为7.0nm厚）。这种布置有助于最小屏蔽间隔，并在CPP设备，CCP-CPP设备或TMR设备中提供出色的性能。版权所有（C）2007，JPO＆INPIT

39. 发明专利

JP2007156496A Method of forming photoresist pattern, and method of electrically forming isolated shape 审中-公开
标题翻译：形成光电子图案的方法以及电气形成隔离形状的方法
公开(公告)号：JP2007156496A
公开(公告)日：2007-06-21
申请号：JP2006330285
申请日：2006-12-07
申请人： Headway Technologies Inc , ヘッドウェイテクノロジーズインコーポレイテッド
发明人： LAUCHLAN LAURIE J
IPC分类号： G03F7/20 , G03F7/30 , H01L21/027
CPC分类号： G11B5/3163 , G03F1/36
摘要： PROBLEM TO BE SOLVED: To provide a method of forming a photoresist pattern capable of precisely forming an isolated hole pattern image having a high aspect ratio for the photoresist layer.
SOLUTION: Additional hole shapes 21 as narrower dummy hole shapes are disposed additionally, next to a main isolated hole shape 11 of a binary mask 12. The photoresist layer, formed on a substrate, is exposed and developed using the binary mask 12. Accordingly, the isolated hole pattern (main trench), having the high aspect ratio is formed, in a region corresponding to the isolated hole shape 11. The ratio of the isolated hole shape width to the thickness of the photoresist layer is set so that the resist does not remain at the bottom of the main trench after development, but will remain at the bottom of the additional hole pattern (additional trench) made by the additional hole shapes 21. If the substrate is made conductive to perform electroplating processing, a plating film is grown only on the substrate at the inner side of the main trench, and the isolated shape, having a high aspect ratio (e.g., magnetic pole or the like), can be formed.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种形成能够精确地形成光致抗蚀剂层具有高纵横比的孤立孔图案图像的光致抗蚀剂图案的方法。解决方案：在二进制掩模12的主隔离孔形状11附近另外设置作为较窄的虚拟孔形状的附加孔形21.在基板上形成的光致抗蚀剂层使用二进制掩模12曝光和显影因此，在与孤立孔形状11对应的区域中形成具有高纵横比的隔离孔图案（主沟槽）。隔离孔形状宽度与光致抗蚀剂层的厚度的比例被设定为抗蚀剂在显影后不会保留在主沟槽的底部，而是保留在由附加孔形21形成的附加孔图案（附加沟槽）的底部。如果使基底导电以进行电镀处理，则电镀膜仅在主沟槽的内侧的基板上生长，并且可以形成具有高纵横比的隔离形状（例如，磁极等）。版权所有（C）2007，JPO＆INPIT

40. 发明专利

JP2006344352A METHOD OF FORMING RECESS, METHOD OF FORMING FRAME, AND FRAME 审中-公开
公开(公告)号：JP2006344352A
公开(公告)日：2006-12-21
申请号：JP2006158878
申请日：2006-06-07
申请人： HEADWAY TECHNOLOGIES INC
发明人： LI DONGHONG , SASAKI YOSHITAKA
IPC分类号： G11B5/31
摘要： PROBLEM TO BE SOLVED: To provide a frame forming method capable of producing a high-performance perpendicular magnetic recording head. SOLUTION: In order to form a frame 10 having a recess 60 (a magnetic chip formation area 61 and a yoke formation area 62), first and second tantalum layers 12 and 42 are laminated in this order in the yoke formation area. In addition, after an alumina layer 21 and the second tantalum layer 42 are laminated in this order in the magnetic chip formation area, the first and second tantalum layers 12 and 42 and the alumina layer 21 are collectively and selectively etched by RIE. In this etching step, due to a difference in etching rate between the first and second tantalum layers 12 and 42 and the alumina layer 21, an inner wall 16 is tilted at a larger angle (sufficiently tilted) in the magnetic chip formation area 61, while an inner wall 26 is tilted at a smaller angle (nearly perpendicularly) in the yoke formation area 62. COPYRIGHT: (C)2007,JPO&INPIT

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