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    • 33. 发明授权
    • Semiconductor device having a multilayer interconnection structure that includes an etching stopper film
    • 具有包括蚀刻停止膜的多层互连结构的半导体器件
    • US08227922B2
    • 2012-07-24
    • US12289985
    • 2008-11-07
    • Satoshi Kageyama
    • Satoshi Kageyama
    • H01L23/48
    • H01L23/53238H01L23/53295H01L2924/0002H01L2924/00
    • A semiconductor device includes a lower layer wiring made of a conductive material; an etching stopper film laminated on the lower layer wiring and having a laminated structure including an SiCO layer and an SiCN layer; an interlayer insulating film laminated on the etching stopper film; an intermediate film laminated on the interlayer insulating film and made of a material having an etching selectivity with respect to a material of the etching stopper film; an upper wiring layer laminated on the intermediate film and having an upper groove formed in a top surface thereof; an upper layer wiring embedded in the upper groove and made of a metal material having Cu as a main component; and a via electrically connecting the lower layer wiring and the upper layer wiring and disposed in a via hole penetrating through the interlayer insulating film and the intermediate film.
    • 半导体器件包括由导电材料制成的下层布线; 层压在下层布线上并具有包括SiCO层和SiCN层的叠层结构的蚀刻阻挡膜; 层压在所述蚀刻停止膜上的层间绝缘膜; 中间膜,层压在层间绝缘膜上,由相对于蚀刻停止膜的材料具有蚀刻选择性的材料制成; 层叠在中间膜上并具有形成在其上表面中的上槽的上布线层; 上层布线,嵌入在上槽中,由以Cu为主要成分的金属材料制成; 以及通过电连接下层布线和上层布线并且布置在贯穿层间绝缘膜和中间膜的通孔中的通孔。
    • 36. 发明申请
    • Method of measuring superficial chemical species and apparatus for measuring the same
    • 测量表面化学物质的方法及其测量装置
    • US20070173725A1
    • 2007-07-26
    • US10590407
    • 2005-02-22
    • Takayuki SoutaKatsuo AizawaAtsushi NakamuraSatoshi KageyamaShinya OhtsuboFumihiko Ichikawa
    • Takayuki SoutaKatsuo AizawaAtsushi NakamuraSatoshi KageyamaShinya OhtsuboFumihiko Ichikawa
    • A61B5/00
    • A61B5/444A61B5/0059A61B5/0075
    • A method of processing skin surface observation measuring data able to address various sicknesses and reduce an error in sickness detection, and a measuring apparatus requiring no filter with a simple structure. The measuring apparatus comprises a means of applying a white light to a biological surface as a sample, a means of detecting the spectra of the white light reflected off a plurality of positions on the biological surface, a means of plotting the absorbances of the above spectra to a light spectrum multi-dimensional space, a means of subjecting data in the spectrum multi-dimension space obtained from the plurality of positions to multivariate analysis to determine the eigenvectors of at least first, second and third principal components, and a means of projecting data at respective positions in respective eigenvector directions to display their magnitudes on a two-dimension display screen on a gray scale or in colors corresponding to the magnitudes; and a measuring method by the apparatus.
    • 一种处理皮肤表面观察测量数据的方法,能够解决各种疾病并减少疾病检测中的误差,以及不需要具有简单结构的过滤器的测量装置。 测量装置包括将白光作为样品施加到生物表面的手段,检测从生物表面上的多个位置反射的白光的光谱的方法,绘制上述光谱的吸光度的方法 对于光谱多维空间,将从多个位置获得的光谱多维空间中的数据进行多变量分析的装置,以确定至少第一,第二和第三主要分量的特征向量,以及投影装置 在各个特征向量方向的各个位置处的数据在灰度或二维显示画面上显示其对应于幅度的颜色的幅度; 以及该装置的测量方法。
    • 38. 发明授权
    • Signal transmission system with an error control technique
    • 具有误差控制技术的信号传输系统
    • US4149142A
    • 1979-04-10
    • US826053
    • 1977-08-19
    • Satoshi KageyamaKeiji TakeuchiKeisuke Ogi
    • Satoshi KageyamaKeiji TakeuchiKeisuke Ogi
    • H03M7/00H04J1/00H04L1/16H04L1/18H04N1/32H04N7/00H04N19/00G08C25/02
    • H04L1/16H04N1/32619H04L1/1809
    • A signal transmission system embodying this invention which can control errors comprises a selective automatic repeat request (ARQ) system for controlling errors occurring in transmission of data on telephone data communication channels. With this selective ARQ system, an error-controlling signal conducted through a backward channel does not contain a check bit for detection or correction of errors, thereby preventing a time loss which might occur if a error-control signal was repeatedly issued between the transmission and receiving sides. The subject signal-transmitting apparatus is adapted to be used in a static image transmission having a large amount of data and has such a circuit arrangement as attains the efficient transmission of data and the display of an error-free image of good picture quality.
    • 体现本发明的可以控制误差的信号传输系统包括一个选择性自动重复请求(ARQ)系统,用于控制电话数据通信信道上的数据传输中发生的错误。 利用这种选择性ARQ系统,通过反向信道传输的误差控制信号不包含用于检测或校正错误的校验位,从而防止在传输和传输之间重复发出错误控制信号时可能发生的时间损失 接收方。 主体信号发送装置适用于具有大量数据的静态图像传输,并且具有实现数据的有效传输和良好图像质量的无差错图像的显示的电路结构。
    • 39. 发明授权
    • Data transmission system
    • 数据传输系统
    • US4110558A
    • 1978-08-29
    • US764073
    • 1977-01-31
    • Satoshi KageyamaKunihiko Sekiya
    • Satoshi KageyamaKunihiko Sekiya
    • H04L1/00H04L1/16H04L1/18H04L7/00H04L7/10H04L29/08
    • H04L1/245H04L1/0002H04L1/0015H04L1/1607H04L1/1803H04L7/10H04L1/0025H04L1/0061
    • A data-transmission system using a continuous ARQ system, wherein a block (word) synchronization code is transmitted through a transmission line from a transmitter to a receiver repeatedly at a predetermined time interval, until the transmitter receives a signal (ACK) denoting the detection of the synchronization code from the receiver. Upon receipt of the synchronization code detection signal, the transmitter issues data blocks each having a fixed length to the receiver continuously from the point of time at which the succeeding synchronization code is to be transmitted. In the invention a predetermined number of test data blocks are further transmitted to the receiver in succession to the synchronization code. The receiver examines a block error rate concerning the test data blocks and supplies the transmitter with not only the synchronization code detection signal but also a data rate-specifying signal. The transmitter delivers data at a rate dependent on the data rate-specifying signal.
    • 一种使用连续ARQ系统的数据传输系统,其中通过传输线以预定的时间间隔重复地从发射机到接收机传输块(字)同步码,直到发射机接收到表示检测的信号(ACK) 的来自接收器的同步码。 在接收到同步码检测信号时,发射机从发送后续同步码的时间点连续向接收机发送每个具有固定长度的数据块。 在本发明中,预定数量的测试数据块被连续地发送到接收机,同步码。 接收机检查与测试数据块相关的块错误率,并向发送器提供不仅同步码检测信号,而且提供数据速率指定信号。 发射机以取决于数据速率指定信号的速率传送数据。
    • 40. 发明申请
    • Semiconductor device
    • 半导体器件
    • US20100244264A1
    • 2010-09-30
    • US12801388
    • 2010-06-07
    • Satoshi Kageyama
    • Satoshi Kageyama
    • H01L23/522
    • H01L23/53295H01L23/522H01L23/53238H01L2924/0002H01L2924/00
    • A semiconductor device including a first wire made of a material mainly composed of Cu, two second wires made of a material mainly composed of Cu, an interlayer dielectric film formed between the first wire and the two second wires, two vias made of a material mainly composed of Cu and each penetrating through the interlayer dielectric film and connecting the first wire and a respective one of the two second wires, and a dummy via formed between the two second wires. The dummy via is made of a material mainly composed of Cu, has a diameter smaller than a diameter of each of the two vias, and is connected to the first wire while not contributing to electrical connection between the first wire and the two second wires.
    • 一种半导体器件,包括由主要由Cu构成的材料制成的第一线,由主要由Cu组成的材料制成的两条第二线,形成在第一线和两条第二线之间的层间绝缘膜,主要由材料制成的两个通孔 由Cu构成,并且每个穿过层间绝缘膜并连接第一线和两个第二线中的相应一个,以及形成在两个第二线之间的虚拟通孔。 虚拟通孔由主要由Cu组成的材料制成,其直径小于两个通孔中的每一个的直径,并且连接到第一导线,而不会在第一导线和两个第二导线之间的电连接作用。