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    • 33. 发明授权
    • Surface acoustic waveguide device and manufacturing method
    • 表面声波导装置及其制造方法
    • US5187756A
    • 1993-02-16
    • US758608
    • 1991-09-12
    • Masataka ShibaAkira InagakiMinoru YoshidaKenchi ItoKazumi Kawamoto
    • Masataka ShibaAkira InagakiMinoru YoshidaKenchi ItoKazumi Kawamoto
    • H03H9/25G02F1/125
    • G02F1/125
    • The present invention relates to a surface acoustic wave element comprising a substrate, an optical waveguide layer formed on the aforesaid substrate to guide laser light from a laser light source, a surface acoustic wave portion for deflecting or modulating the laser light traveling through the aforesaid optical waveguide layer, a comb-shaped SAW electrode provided on the aforesaid optical waveguide layer to cause the aforesaid surface acoustic wave portion to generate surface acoustic wave, and a terminal provided on the aforesaid optical waveguide layer and connected to the aforesaid SAW electrode to apply a high-frequency alternating voltage thereto, wherein a protection cover is bonded by a viscoelastic adhesive having a refractive index smaller than that of the aforesaid optical waveguide layer to cover the aforesaid SAW electrode and surface acoustic wave portion with air space in such a manner that the aforesaid terminal is positioned outside thereof, and the manufacturing method of the surface acoustic wave element.
    • 本发明涉及一种弹性表面波元件,包括基板,形成在上述基板上的用于引导来自激光光源的激光的光波导层,用于偏转或调制通过前述光学器件行进的激光的表面声波部分 波导层,设置在上述光波导层上的梳形SAW电极,使上述声表面波部分产生声表面波;以及端子,设置在上述光波导层上,并与上述SAW电极连接, 高频交流电压,其中保护盖通过具有比上述光波导层的折射率小的折射率的粘弹性粘合剂粘结,以覆盖上述SAW电极和具有空气空间的表面声波部分,使得 上述端子位于其外侧, 声表面波元件。
    • 35. 发明授权
    • Method and apparatus for alignment
    • 对准方法和装置
    • US4777641A
    • 1988-10-11
    • US918004
    • 1986-10-14
    • Akira InagakiYukio KemboRyuichi FunatsuAsahiro KuniKeiichi OkamotoYoshihiro Komeyama
    • Akira InagakiYukio KemboRyuichi FunatsuAsahiro KuniKeiichi OkamotoYoshihiro Komeyama
    • G02B7/00G03F9/00H01L21/027H01L21/30H01L21/67H01L21/68G21K5/00
    • G03F9/70
    • A method and apparatus for alignment for use in X-ray exposure or the like wherein a mask is provided having a formation of an alignment pattern made up of at least one linear segment formed in a peripheral section of the mask and a wafer is provided having a formation of an alignment pattern formed in a same direction as the alignment pattern of the mask and made up of linear segments. An illuminating arrangement illuminates a light to the mask alignment pattern along a direction inclined to the alignment direction and the mask alignment pattern and the wafer alignment pattern are imaged and transformed into a video signal. An A/D converts the video signal into a digital signal and stores the digital signal in a memory. The digital video signal is read out from the memory and averaged in a mask alignment pattern by removing a shadow portion caused by the mask alignment pattern and additionally averaged in a wafer alignment pattern area with an averaged wafer alignment pattern signal and an averaged wafer alignment pattern signal being provided. Relative displacement between the mask and the wafer is detected from the averaged mask alignment pattern signal and the averaged wafer alignment pattern signal and the mask and wafer are aligned by moving at least one of the mask and wafer so that displacement between the mask and the wafer does not exist.
    • 一种用于X射线曝光等的对准用的方法和装置,其中提供具有由形成在掩模的周边部分中的至少一个线性部分构成的取向图案的掩模和晶片,其具有: 形成与由掩模的对准图形相同的方向形成并由直线段构成的对准图案。 照明装置沿着对准方向倾斜的方向照射到掩模对准图案,并且将掩模对准图案和晶片对准图案成像并变换为视频信号。 A / D将视频信号转换为数字信号,并将数字信号存储在存储器中。 从存储器中读出数字视频信号,并通过去除由掩模对准图形引起的阴影部分并以平均的晶片对准图案信号和平均的晶片对准图案在晶片对准图案区域中平均化,以掩模对准图案平均化 提供信号。 从平均的掩模对准图案信号中检测掩模和晶片之间的相对位移,并且通过移动掩模和晶片中的至少一个来对准平均的晶片对准图案信号并且掩模和晶片,使得掩模和晶片之间的位移 不存在。