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31. 发明申请

US20130049647A1 Force Distribution Method for Stage Systems Utilizing Dual Actuators 审中-公开
标题翻译：使用双驱动器的舞台系统的力分配方法
公开(公告)号：US20130049647A1
公开(公告)日：2013-02-28
申请号：US13597592
申请日：2012-08-29
申请人： Pai-Hsueh Yang
发明人： Pai-Hsueh Yang
IPC分类号： H02K41/035
CPC分类号： G03F7/70725
摘要： According to one aspect, a method for controlling a stage that is a part of a stage apparatus and is coupled to a voice coil motor (VCM) and an EI-core actuator arrangement includes driving the stage, identifying a frequency associated with the stage, and determining whether the frequency is below a frequency setpoint. The method also includes providing a first control force on the stage using the EI-core actuator arrangement when it is determined that the frequency is below the frequency setpoint, and providing the first control force on the stage using the VCM when it is determined that the frequency is not below the frequency setpoint.
摘要翻译：根据一个方面，一种用于控制作为舞台装置的一部分并且耦合到音圈电动机（VCM）和EI-芯致动器装置的舞台的方法包括驱动舞台，识别与舞台相关联的频率，以及确定频率是否低于频率设定点。该方法还包括当确定频率低于频率设定点时，使用EI-芯致动器装置在舞台上提供第一控制力，并且当确定第一控制力被确定为频率设定点时，使用VCM在舞台上提供第一控制力频率不低于频率设定值。

32. 发明申请

US20120060582A1 METHOD FOR CALIBRATING A FORCE CONSTANT OF A MOTORIZED STAGE USED FOR SUPPORTING AND MOVING A WORKPIECE 有权
标题翻译：用于校准用于支持和移动工作的电动舞台的持续时间的方法
公开(公告)号：US20120060582A1
公开(公告)日：2012-03-15
申请号：US13228401
申请日：2011-09-08
申请人： Pai-Hsueh Yang
发明人： Pai-Hsueh Yang
IPC分类号： G01L25/00
CPC分类号： G01L25/00 , G01M99/008
摘要： Methods are disclosed for calibrating a force constant of a movable stage. In an exemplary method, in first and second preliminary pre-stepping motions of the stage, a baseline force and a calibration force, respectively, as exerted by the stage are measured. From a force-variation ratio of the baseline force and calibration force an inverse closed loop factor is estimated. In at least one subsequent pre-stepping motion of the stage before a respective use of the stage for holding an object, a residual force-variation ratio is estimated, a force-compensation factor is updated from the residual force-variation ratio, and a respective force-variation coefficient is determined from the force-compensation factor.
摘要翻译：公开了用于校准可移动台的力常数的方法。在示例性方法中，在阶段的第一和第二初步预先步进运动中，分别测量由平台施加的基准力和校准力。从基线力和校准力的力变化率估计反向闭环系数。在相应使用用于保持物体的平台之前的阶段的至少一个随后的预先步进运动中，估计残余力变化比，从残余力变化比更新力补偿系数，并且根据力补偿系数确定各自的力变化系数。

33. 发明申请

US20100222898A1 Stage-control systems and methods including inverse closed loop with adaptive controller 审中-公开
标题翻译：阶段控制系统和方法，包括具有自适应控制器的反向闭环
公开(公告)号：US20100222898A1
公开(公告)日：2010-09-02
申请号：US12657806
申请日：2010-01-27
申请人： Pai-Hsueh Yang
发明人： Pai-Hsueh Yang
IPC分类号： G05D3/12 , G05B13/04
CPC分类号： G05B13/04 , G03F7/70725
摘要： Stage assemblies and control methods are disclosed. An exemplary stage assembly includes a movable stage and a control system. The stage-control system has first and second control loops. In the first control loop a first controller is programmed with a feedback-control transfer-function that determines a feedback-control output from an input including a following-error of the stage. The second control loop includes an inverse closed loop having an inverse plant model and a second controller programmed with an adaptive transfer-function connected to receive inputs including the following-error and the feedback-control output. The second controller determines, from the inputs, an adapted control output to the stage. The adaptive transfer-function can be, e.g., an AFC transfer-function producing an AFC controlled output or an ILC transfer-function producing an ILC controlled output.
摘要翻译：公开了舞台组件和控制方法。示例性的台组件包括可移动台和控制系统。舞台控制系统具有第一和第二控制回路。在第一控制回路中，第一控制器被编程有反馈控制传递函数，该反馈控制传递函数确定来自包括级的跟随误差的输入的反馈控制输出。第二控制回路包括具有逆工厂模型的反向闭合回路和用自适应传递函数编程的第二控制器，该自适应传递函数被连接以接收包括跟随误差和反馈控制输出的输入。第二控制器从输入端确定适应的控制输出到该级。自适应传递函数可以是例如产生AFC控制输出的AFC传递函数或产生ILC控制输出的ILC传递函数。

34. 发明授权

US06917412B2 Modular stage with reaction force cancellation 失效
标题翻译：具有反作用力取消的模块级
公开(公告)号：US06917412B2
公开(公告)日：2005-07-12
申请号：US10375785
申请日：2003-02-26
申请人： Alex Ka Tim Poon , Leonard Wai Fung Kho , Pai-Hsueh Yang , Ping-Wei Chang
发明人： Alex Ka Tim Poon , Leonard Wai Fung Kho , Pai-Hsueh Yang , Ping-Wei Chang
IPC分类号： G03F7/20 , G03B27/58 , G03B27/42 , G03B27/62 , G03B27/32
CPC分类号： G03F7/70766 , G03F7/70716 , G03F7/70758
摘要： Methods and apparatus for providing a stage apparatus which is modular and allows for reaction force cancellation are described. According to one aspect of the present invention, a stage apparatus includes a table assembly and a first stage. The table assembly supports an object, e.g., a wafer or a reticle, which is to be moved. The first stage includes a counter mass arrangement, a plurality of carriages, and a plurality of linkages. The plurality of carriages is coupled to the table assembly through the plurality of linkages such that a first carriage and a second carriage are arranged to move in substantially opposite directions along a first axis to cause the table assembly to move along a second axis while reaction forces generated when the first carriage and the second carriage are substantially cancelled by the counter mass arrangement.
摘要翻译：描述了用于提供模块化并允许反作用力抵消的平台装置的方法和装置。根据本发明的一个方面，一种台架装置包括台组件和第一台。桌子组件支撑要移动的物体，例如，晶片或掩模版。第一阶段包括对质量布置，多个托架和多个连杆。多个滑架通过多个连杆联接到工作台组件，使得第一滑架和第二滑架被布置成沿着第一轴线在基本上相反的方向上移动，以使台面组件沿着第二轴线移动，同时反作用力当第一托架和第二托架基本上被反质量布置取消时产生。

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