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31. 发明专利

JP2001051724A FLOW RATE ABNORMALITY DETECTING METHOD OF PRESSURE TYPE FLOW PATE CONTROLLER 失效
公开(公告)号：JP2001051724A
公开(公告)日：2001-02-23
申请号：JP22602399
申请日：1999-08-10
申请人： OMI TADAHIRO , IIDA SEIICHI , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , IIDA SEIICHI , KAGATSUME SATORU , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI , UNO TOMIO , NISHINO KOJI , IKEDA SHINICHI , DOI RYOSUKE , IDETA EIJI
IPC分类号： G01F1/36 , F16K37/00 , G05B23/02 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To give notice of flow rate abnormality due to the clogging of an orifice with simple constitution by measuring the amplitude of varying pressure of upstream-side pressure in response to the opening and closing of a control valve and giving notice of the clogging of the orifice when the pressure amplitude becomes smaller than a limit amplitude. SOLUTION: The amplitude of the varying pressure of the upstream-side pressure is measured in response to the opening and closing of the control valve and when the pressure amplitude becomes smaller than the limit amplitude, notice of the clogging of the orifice is given. When a clogging detection start signal is inputted from an external circuit 44, a CPU outputs a signal to check circuit 31, which outputs a set flow rate QS(t)=QSO+ΔQS composed of a stationary set flow rate QSO and a signal ΔQS for examination. This signal controls a driving part 8 through an amplifier circuit 33 to open and close the control valve CV. Namely, the examining circuit 31 while holding an orifice passing flow rate at the stationary flow rate QSO checks the clogging of the orifice with the signal ΔQS for examination.

32. 发明专利

JP2000322130A METHOD FOR VARIABLE FLUID FLOW RATE CONTROL BY FLOW FACTOR AND ITS DEVICE 失效
公开(公告)号：JP2000322130A
公开(公告)日：2000-11-24
申请号：JP12910999
申请日：1999-05-10
申请人： FUJIKIN KK , OMI TADAHIRO , TOKYO ELECTRON LTD
发明人： OMI TADAHIRO , MORIMOTO AKIHIRO , UNO TOMIO , IKEDA SHINICHI , DOI RYOSUKE , NISHINO KOJI , IDETA EIJI , MATSUMOTO ATSUSHI , UENOYAMA TOYOMI , YAMAJI MICHIO , HIROSE TAKASHI , KAGATSUME SATORU , HIROSE JUN , FUKAZAWA KAZUO , KOIZUMI HIROSHI , NAGAOKA HIDEKI
IPC分类号： G01F1/42 , G05D7/06
摘要： PROBLEM TO BE SOLVED: To obtain the method for performing high-precision flow rate control over different kinds of gas by one flow rate controller by calculating a factor under specific conditions and calculating the flow rate of another gas kind when the gas kind is circulated through the same orifice under conditions of the same upstream pressure and the same upstream temperature on condition that the calculated flow rate of one gas kind is specific. SOLUTION: Flow factors FF is calculated by gas kinds from FF=(k/γs)(2/(κ+1))1/(κ-1)(κ/((κ+1)R))1/2 and on condition that the calculated flow rate of a gas kind A is QA, the flow rate QB of a gas kind B is calculated from QB=(FFB/FFA)QA when the gas kind B is circulated through the same orifice under the conditions of the same upstream side pressure and the same upstream temperature. Here, γs is the density of gas in a standard state, κ is the specific heat ratio of the gas, R is the gas constant, (k) is a proportion constant which does not depend upon the gas kind, FFA is the flow factor of the gas kind A, and FFB is the flow factor of the gas kind B.

33. 发明专利

JPH11236652A GASKET AND PIPE JOINT 失效
公开(公告)号：JPH11236652A
公开(公告)日：1999-08-31
申请号：JP4003898
申请日：1998-02-23
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , SHINOHARA TSUTOMU , IKEDA SHINICHI , MORIMOTO AKIHIRO
IPC分类号： F16L19/03 , C22C38/00 , C22C38/44 , F16J15/08 , F16L19/02
摘要： PROBLEM TO BE SOLVED: To provide a gasket which is not reacted with gas such as CO and furthermore prevents the flawing of a pipe joint member whose exchange is difficult compared to the case of a gasket. SOLUTION: This pipe joint 10 is provided with a pair of pipe joint members 11 and 12, an annular gasket 13 to be interposed on the abutting faces of both joint members 11 and 12 and a screw means 14 connecting both joint members 11 and 12. Each joint member 11 and 12 is made of a stainless steel in which Vickers hardness on the surface is regulated to >=300. The gasket 13 is made of a stainless steel having components of, by weight, 12.90 to 15.005 Ni, 16.50 to 18.00% Cr, 2.00 to 3.00% Mo,

34. 发明专利

JPH11118049A FIXED DISPLACEMENT TYPE FLUID CONTROLLER 失效
公开(公告)号：JPH11118049A
公开(公告)日：1999-04-30
申请号：JP28592797
申请日：1997-10-20
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , NISHIMURA RYUTARO , IKEDA SHINICHI , YAMAJI MICHIO
IPC分类号： F16K7/12 , F16K7/16
摘要： PROBLEM TO BE SOLVED: To make up for an increase or decrease in content volume in a valve chest due to displacement in a valve element holder, and to control any volumetric change in a fluid passage by connecting this valve element holder and a volumetric adjuster holder via a connecting rod, and imparting any displacement commensurate to the displacement of this valve element holder, to the volumetric adjuster holder by operation of a drive unit. SOLUTION: In a controller body 1 opposingly installed with those of both fluid inlet and outlet ports 1a, 1b and upper and lower insertion holes 1d and 1e respectively, a valve chest 1f equipped with a valve seat 2 is formed in a bottom part of the upper insertion hole 1d, and a volumetric adjusting chamber 1g in a bottom part of the lower insertion hole 1e, respectively. Those of fluid inlet and outlet ports. 1a and 1b the valve chest 1f and the volumetric adjusting chamber 1g are interconnected with one another by a fluid passage 1c. Then, a valve element 3 is inset in the upper insertion hole 1d, wile a volumetric adjuster 4 is inset in the lower insertion hole 1e, and then each of two holders 5 and 6 is inset in each back of the valve element 3 and the volumetric adjuster 4. These holders 5 and 6 are interlocked by a driving shaft 8 as well as a shaft 10 via an external connecting pipe 17 through operation of a drive unit 7.

35. 发明专利

JPH1158266A ELECTRICALLY-DRIVEN TOOL 失效
公开(公告)号：JPH1158266A
公开(公告)日：1999-03-02
申请号：JP22655197
申请日：1997-08-22
申请人： FUJIKIN KK , OMI TADAHIRO
发明人： OMI TADAHIRO , IKEDA SHINICHI , NISHINO KOJI , YASUMOTO TADASHI , FUKUDA HIROYUKI , DOI RYOSUKE
IPC分类号： B25B21/00 , B25F5/02
摘要： PROBLEM TO BE SOLVED: To obviate any adverse effect by interrupting a leakage magnetic field out of an electric motor by installing a magnetic shielding cover shielding this electric motor in a body cover, in this power tool consisting of a body, a spindle, the electric motor and the body cover. SOLUTION: An electric motor 4 rotates a spindle 3, and it is installed at the rear side of a spindle head 7 of a body 2 via a gear head 11, decelerating the rotation and linking so as to transmit it to the spindle 3. An encoder 12 to detect the rotation is installed at the rear side of the electric motor 4. A body cover 5 is installed in the body 2, covering the electric motor 4, and it assumes a square cylindrical form whose front is opened, and it is equipped with a rear wall closing the peripheral wall and the rear, thereby attaching the front side detachably to the spindle head 7 of the body 2 so as to cover the gear head 11, the motor 4 and the encoder 12. A magnetic shielding cover 6 is installed in the body cover 5, covering the outside of the motor 4, and it is composed of a cylinder at the specified interval. With this constitution, any leakage magnetic field out of the electric motor is interrupted, whereby any adverse effect to other machinery and equipment is obviable in this way.

36. 发明专利

JPH1151298A FLUID CONTROL DEVICE 失效
公开(公告)号：JPH1151298A
公开(公告)日：1999-02-26
申请号：JP21025497
申请日：1997-08-05
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , MINAMI YUKIO , MORIMOTO AKIHIRO , IKEDA SHINICHI , HIRAO YOSHIYUKI , HIROSE TAKASHI , YAMAJI MICHIO , YOSHIKAWA KAZUHIRO
IPC分类号： F17D1/02 , F16K27/00
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device which can make fluid replacement in a short time by taking in consideration the positional relationship of passages to one another. SOLUTION: A fluid control device is equipped with the first passage 14 and the second passage 18 which is in communication with the first passage 14 and whose termination part is blocked with an apparatus 6 for fluid control and is configured so that different fluids flow in the first passage 14 in the condition the second 18 passage is filled with fluid in stagnation. The first passage 14 is composed of an upstream part 17 and a downstream part 16 in continuity thereto approx. at a right angle, and the second passage 18 is arranged as extending from the end of the upstream part 17 of the first passage 14 to the extension line drawn from the end of upstream part 17.

37. 发明专利

JPH1111902A GENERATION OF WATER FOR PRODUCTION OF SEMICONDUCTOR PRODUCTION 失效
公开(公告)号：JPH1111902A
公开(公告)日：1999-01-19
申请号：JP15957197
申请日：1997-06-17
申请人： OMI TADAHIRO , FUJIKIN KK , HITACHI LTD
发明人： OMI TADAHIRO , MINAMI YUKIO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA SHINICHI , MORIMOTO AKIHIRO
IPC分类号： C01B5/00
摘要： PROBLEM TO BE SOLVED: To decrease an unreacted hydrogen quantity in generated water at a start time and a stop time of a reactor for water generation, to enhance stability of a semiconductor production device, and to prevent the film formation of an Si oxidized film, etc., by a water oxidation method from being hindered. SOLUTION: In the generation method of the water for semiconductor production, hydrogen and oxygen are fed into a reactor main body 1 provided with a Pt coating film 13 on a wall surface of the internal space 1a, and reaction activities of the hydrogen and the oxygen are enhanced with a catalystic work of the Pt and also the hydrogen and oxygen of which reaction activities are activated are allowed to instantly react at a lower temp. than an ignition temp. of a hydrogen mixture gas to generate the water without combustion at a high temp. The feed of hydrogen is started later than the feed of the oxygen at a start time of the water generation.

38. 发明专利

JPH10311450A COUPLING FOR FLUID CONTROL UNIT 失效
公开(公告)号：JPH10311450A
公开(公告)日：1998-11-24
申请号：JP11770297
申请日：1997-05-08
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , YAMAJI MICHIO , SHINOHARA TSUTOMU , ITOI SHIGERU , HIRAO YOSHIYUKI , KAWANO YUJI , TANAKA SHIGEAKI , YOKOYAMA KOSUKE , TOSHI YUJI , IKEDA SHINICHI
IPC分类号： F16L15/00 , F16K27/00 , F16L39/00 , F16L41/02 , F17D1/02
摘要： PROBLEM TO BE SOLVED: To provide a coupling which can improve the easy manufacture and realize a light weight, as well as can standardize the member, in a fluid control device. SOLUTION: A coupling 80 consists of a holding member 40 with a U-shape cross section; and a passage forming member 41 held to the holding member 40. A screw hole 84 for installing to a fluid control unit is provided to the upper wall 81 of the holding member 40. The passage forming member 41 furnishes a main body 91 having a passage at the inner side, and inserting between the upper and the lower walls 81 and 82 of the holding member 40; a tube form upper side projection 92 which is communicated to the passage in the main body, and communicated to the downward passage of the fluid control unit, whose upper end is inserted to a through hole 85 provided to the upper wall 81 of the holding member 40; and a tube form side projection 94 communicated to the passage in the main body, and extending to the side. An outward flange 93 is provided to the upper end of the passage forming member 41, and an inward flange 85a to receive the above flange 93 is provided to the through hole 85 of the upper wall 81 of the holding member 40.

39. 发明专利

JPH10297907A REACTIONAL FURNACE FOR GENERATING MOISTURE 失效
公开(公告)号：JPH10297907A
公开(公告)日：1998-11-10
申请号：JP10998997
申请日：1997-04-28
申请人： OMI TADAHIRO , FUJIKIN KK , HITACHI LTD
发明人： OMI TADAHIRO , KAWADA KOJI , TANABE YOSHIKAZU , IKEDA SHINICHI , MORIMOTO AKIHIRO , MINAMI YUKIO
IPC分类号： H01L21/02 , B01J12/00 , B01J23/42 , B01J23/89 , C01B5/00 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To improve the miniaturization and safety of a reactional furnace for generating moisture, further enhance the moisture generating efficiency and reduce the unreacted gas. SOLUTION: This reactional furnace for generating moisture is composed of a reactional furnace body 1 formed by combining two furnace body members 2 and having a spatial part 1a in the interior thereof, a gas feed passage 2c, bored in one of the furnace body members 2 and used for introducing a raw material gas into the spatial part 1a, a moisture gas outlet passage 5a, bored in the other furnace body member and used for leading out the produced moisture from the spatial part 1a, a reflector 9 on the inlet side, secured in the form opposite to the gas feed passage 2c to the side of the spatial part 1a of the one furnace body member 2 and used for diffusing the raw material gas from the gas feed passage 2c into the spatial part 1a, a filter 10 arranged in the spatial part 1a of the reactional furnace body 1, a reflector 12 on the outlet side, secured in the form opposite to the moisture gas outlet passage 5a to the side of the spatial part 1a of the other furnace body member 2 and holding a gap G from the inner wall surface of the furnace body member 2 and a platinum coating film 13 formed on the inner wall surface of the reactional furnace body 1.

40. 发明专利

JPH10176772A FLUID JOINT 失效
公开(公告)号：JPH10176772A
公开(公告)日：1998-06-30
申请号：JP16422697
申请日：1997-06-20
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , SHINOHARA TSUTOMU , YAMAJI MICHIO , IKEDA SHINICHI , HIRAO YOSHIYUKI
IPC分类号： F16L17/00
摘要： PROBLEM TO BE SOLVED: To prevent the deterioration of sealing caused by shifting by forming retainer holding cylindrical parts respectively in the butting end surfaces of first and second joint members, forming a gasket provided between the cylindrical parts to be a staged structure and holding a retainer covering the gasket by one of the cylindrical parts. SOLUTION: A fluid joint 27 provided between upper and lower passage blocks 10 and 12 as first and second joint members is provided for fluid-tightly connecting the flow passages 51 and 49 of the joint members 10 and 12 together, and retainer holding cylindrical parts 14 and 15 are formed respectively in the butting end surfaces of the joint members 10 and 12. An annular gasket 32 is provided between the cylindrical parts 14 and 15, this gasket 32 is composed of small and large diameter parts 61 and 62, and its outer peripheral surface is covered with a retainer 33 for holding a holding part 73 fitted and held by the cylindrical part 14 of the small diameter part 61. Thus, the joint members are used without any separation between male and female parts and the deterioration of sealing caused by shifting is prevented.

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