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31. 发明授权

US09063098B2 Method of inspecting mask, mask inspection device, and method of manufacturing mask 有权
标题翻译：掩模检查方法，掩模检查装置以及制造掩模的方法
公开(公告)号：US09063098B2
公开(公告)日：2015-06-23
申请号：US13549482
申请日：2012-07-15
申请人： Tsuneo Terasawa , Osamu Suga
发明人： Tsuneo Terasawa , Osamu Suga
IPC分类号： G03F1/84 , G01N21/88 , G01N21/956
CPC分类号： G03F1/22 , G01N21/8806 , G01N21/95 , G01N21/956 , G01N2021/8822 , G01N2021/95676 , G01N2201/061 , G03F1/84
摘要： There is provided a method of high-sensitively detecting both of a phase defect existing in a mask blank and a phase defect remaining after manufacturing an EUVL mask. When the mask blank is inspected, EUV light having illumination NA to be within an inner NA but a larger value is irradiated. When the EUVL mask is inspected, by using a dark-field imaging optical system including a center shielding portion for shielding EUV light and a linear shielding portion for shielding the EUV light whose width is smaller than a diameter of the center shielding portion, the center shielding portion and the linear shielding portion being included in a pupil plane, the EUV light having illumination NA as large as or smaller than the width of the linear shielding portion is irradiated.
摘要翻译：提供了一种高灵敏度地检测存在于掩模坯料中的相位缺陷和在制造EUVL掩模之后剩余的相缺陷的方法。当检查掩模毛坯时，照射具有NA内但NA值越大的EUV光。当检查EUVL掩模时，通过使用包括用于屏蔽EUV光的中心屏蔽部分和用于屏蔽宽度小于中心屏蔽部分的直径的EUV光的线性屏蔽部分的暗视场成像光学系统，中心屏蔽部分和线性屏蔽部分包括在光瞳平面中，照射具有大于或等于线状屏蔽部分的宽度的照明NA的EUV光。

32. 发明申请

US20130244142A1 Method and Apparatus for Inspecting a Mask Substrate for Defects, Method of Manufacturing a Photomask, and Method of Manufacturing a Semiconductor Device 有权
标题翻译：用于检查缺陷的掩模基板的方法和装置，制造光掩模的方法以及制造半导体器件的方法
公开(公告)号：US20130244142A1
公开(公告)日：2013-09-19
申请号：US13840489
申请日：2013-03-15
申请人： KABUSHIKI KAISHA TOSHIBA , TSUNEO TERASAWA
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G01N21/956 , G03F1/00
CPC分类号： G01N21/956 , G01N2021/95676 , G03F1/00 , G03F1/24
摘要： According to one embodiment, a method of inspecting a mask substrate for defects, includes acquiring a defocus image of a partial region of a mask substrate using a dark-field optical system, acquiring a just-focus image of the partial region using the dark-field optical system, generating a set composed of first signals obtained from the defocus image and having signal intensities equal to or higher than a first threshold value, excluding, from the set, the first signals pertaining to parts in which signal intensities of signals obtained from the just-focus image are equal to or higher than a second threshold value, determining an inspection threshold value for signal intensities, on the basis of the first signals not excluded from, and remaining in, the sea.
摘要翻译：根据一个实施例，一种用于检查掩模基板的缺陷的方法包括使用暗视场光学系统获取掩模基板的部分区域的散焦图像，使用暗视场光学系统获取部分区域的正焦点图像，产生由散焦图像获得的具有等于或高于第一阈值的信号强度的由第一信号组成的集合，从集合中除去与从第一阈值获得的信号的信号强度相关的部分的第一信号，正焦点图像等于或高于第二阈值，基于未从集合中排除和保留的第一信号确定信号强度的检查阈值。

33. 发明授权

US08435702B2 Manufacturing method of semiconductor device and manufacturing method of mask 有权
标题翻译：半导体器件的制造方法和掩模的制造方法
公开(公告)号：US08435702B2
公开(公告)日：2013-05-07
申请号：US12563265
申请日：2009-09-21
申请人： Tsuneo Terasawa , Takeshi Yamane
发明人： Tsuneo Terasawa , Takeshi Yamane
IPC分类号： G03F1/00
CPC分类号： G03F1/24 , B82Y10/00 , B82Y40/00 , Y10T403/13
摘要： Provided is a technique capable of improving the dimensional accuracy of a transfer pattern in a lithography technique in which EUV light is used and the EUV light is incident obliquely on a mask and an image of the EUV light reflected from the mask is formed on a semiconductor substrate (resist film), thereby transferring the pattern formed on the mask onto the semiconductor substrate. The present invention is based on a lithography technique in which EUV light is used and an exposure optical system in which the EUV light is obliquely incident on a mask is used. In this lithography technique, an absorber and a difference in level are formed on the mask, and a projective component projected on a mask surface out of a direction cosine component of the incident light is set to be almost orthogonal to an extending direction of the difference in level.
摘要翻译：提供了一种技术，其能够提高使用EUV光的光刻技术中的转印图案的尺寸精度，并且EUV光倾斜地入射到掩模上，并且在半导体上形成从掩模反射的EUV光的图像衬底（抗蚀剂膜），从而将形成在掩模上的图案转印到半导体衬底上。本发明基于使用EUV光的光刻技术和其中EUV光倾斜入射在掩模上的曝光光学系统。在该光刻技术中，在掩模上形成吸收体和水平差，并且投射到入射光的方向余弦分量的掩模表面上的投射分量被设定为与差异的延伸方向几乎正交在水平。

34. 发明申请

US20120224051A1 MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS 审中-公开
标题翻译：屏蔽检查方法和面罩检查装置
公开(公告)号：US20120224051A1
公开(公告)日：2012-09-06
申请号：US13409846
申请日：2012-03-01
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： H04N7/18
CPC分类号： G03F1/84 , G03F1/22
摘要： According to one embodiment, a method of inspecting a defect of a semiconductor exposure mask by using an optical system, which is configured to acquire an image by an imaging module by making light of an arbitrary wavelength incident on the semiconductor exposure mask, includes acquiring a control condition for elongating a point image acquired by the optical system in a read-out direction of the imaging module, acquiring an image of a desired area of the mask under the control condition, and determining, when a peak signal with a signal intensity which is a first threshold or more.
摘要翻译：根据一个实施例，通过使用被配置为通过使入射在半导体曝光掩模上的任意波长的光获取成像模块的图像的光学系统来检查半导体曝光掩模的缺陷的方法包括：控制条件，用于在所述摄像模块的读出方向上延伸由所述光学系统获取的点图像，在所述控制条件下获取所述掩模的期望区域的图像，以及当将具有信号强度的峰值信号是第一个门槛以上。

35. 发明申请

US20120218543A1 MASK INSPECTION METHOD AND MASK INSPECTION APPARATUS 有权
标题翻译：屏蔽检查方法和面罩检查装置
公开(公告)号：US20120218543A1
公开(公告)日：2012-08-30
申请号：US13403105
申请日：2012-02-23
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G01J3/00 , G01N21/00
CPC分类号： G01N21/956 , G01N2021/8822 , G01N2021/95676
摘要： According to one embodiment, a method of detecting a defect of a semiconductor exposure mask includes acquiring a background intensity from a surface height distribution of the mask, acquiring a standard background intensity distribution from the background intensity, making light of an arbitrary wavelength incident on the mask, and acquiring an image at a position of interest of the mask, acquiring background intensity raw data, based on a signal intensity of the acquired image at the position of interest and a mean value of image intensity data in a peripheral area of the position of interest, finding a correction coefficient of the signal intensity, based on a ratio of the background intensity raw data to the standard background intensity distribution, correcting the signal intensity by multiplying the signal intensity.
摘要翻译：根据一个实施例，一种检测半导体曝光掩模的缺陷的方法包括从掩模的表面高度分布获取背景强度，从背景强度获取标准背景强度分布，使入射到掩模，并且获取所述掩模的感兴趣位置处的图像，基于感兴趣位置处获取的图像的信号强度和所述位置的周边区域中的图像强度数据的平均值来获取背景强度原始数据根据背景强度原始数据与标准背景强度分布的比率，求出信号强度的校正系数，通过乘以信号强度来校正信号强度。

36. 发明授权

US5078495A Monochromator 失效
标题翻译：单色器
公开(公告)号：US5078495A
公开(公告)日：1992-01-07
申请号：US478568
申请日：1990-02-12
申请人： Tatsuo Harada , Toshiei Kurosaki , Tsuneo Terasawa , Toshiaki Kita
发明人： Tatsuo Harada , Toshiei Kurosaki , Tsuneo Terasawa , Toshiaki Kita
IPC分类号： G01J3/18 , G02B5/18
CPC分类号： G01J3/1804 , G01J2003/1847
摘要： A plane grating, particularly for a monochronomator, is provided with varied-spaced straight and parallel grooves in a light beam path to compensate for other light affecting components, for example a spherical mirror used for collimating or focusing the light beam. The angle of incidence with respect to the light for each of the grooves may vary and the angle of diffraction with respect to the light for each groove may be required to vary with the imperfection of collimation and focusing of the beam. The grooves are varied in their spacing to compensate for the variation of both incidence and diffraction direction.
摘要翻译：特别是用于单声道同步器的平面光栅在光束路径中设置有不同间隔的直的和平行的凹槽，以补偿其它影响光的部件，例如用于准直或聚焦光束的球面镜。相对于每个凹槽的光的入射角可以变化，并且可能需要相对于每个凹槽的光的衍射角度随着光束的准直和聚焦的不完善而变化。凹槽的间距是变化的，以补偿入射和衍射方向的变化。

37. 发明授权

US4597669A Pattern detector 失效
标题翻译：图案检测器
公开(公告)号：US4597669A
公开(公告)日：1986-07-01
申请号：US539760
申请日：1983-10-07
申请人： Tsuneo Terasawa , Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka
发明人： Tsuneo Terasawa , Shinji Kuniyoshi , Akihiro Takanashi , Toshiei Kurosaki , Yoshio Kawamura , Sumio Hosaka
IPC分类号： G01B11/00 , G03F9/00 , G05D3/12 , H01L21/027 , H01L21/30 , G01N21/86
CPC分类号： G03F9/70 , H01L21/30
摘要： A pattern detector according to the present invention adopts a processing method wherein means is provided anew with which the intensity distribution of light reflected from or transmitted through an illuminated specimen is photoelectrically converted, and a pattern position is detected at high speed from the ratio between the primary moment and integral value of a detection signal thus derived, whereupon a symmetry calculation is executed within a narrow range around the detected value, whereby the pattern position is found fast and precisely.
摘要翻译：根据本发明的图案检测器采用一种处理方法，其中重新提供装置，其中从被照射的样品反射或透射的光的光强分布被光电转换，并且以高速的比例检测图案位置这样得到的检测信号的初始矩和积分值，由此在检测值附近的窄范围内执行对称计算，从而快速且精确地找到图案位置。

38. 发明申请

US20130244143A1 Optimum Imaging Position Detecting Method, Optimum Imaging Position Detecting Device, Photomask Manufacturing Method, and Semiconductor Device Manufacturing Method 有权
标题翻译：最佳成像位置检测方法，最佳成像位置检测装置，光掩模制造方法和半导体装置制造方法
公开(公告)号：US20130244143A1
公开(公告)日：2013-09-19
申请号：US13841049
申请日：2013-03-15
申请人： Tsuneo Terasawa , KABUSHIKI KAISHA TOSHIBA
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G03F1/22 , H04N7/18
CPC分类号： G03F1/22 , H04N7/18
摘要： According to one embodiment, an optimum imaging position detecting method includes acquiring an image of a predetermined area of a substrate surface, calculating, on the basis of the image of the predetermined area, peak intensity corresponding to a value obtained by subtracting average signal intensity of an area outside an intensity acquisition part from signal intensity of the intensity acquisition part, calculating variation of the peak intensity, executing acquiring the image of the predetermined area, calculating the peak intensity, and calculating the variation of the peak intensity at each of a plurality of imaging positions, and determining that a position of the maximum variation of the peak intensity is an optimum imaging position.
摘要翻译：根据一个实施例，最佳成像位置检测方法包括获取基板表面的预定区域的图像，基于预定区域的图像计算与通过减去平均信号强度减去获得的值相对应的峰值强度强度获取部分的强度获取部分之外的区域，计算峰值强度的变化，执行获取预定区域的图像，计算峰值强度，以及计算多个峰值强度的变化并且确定峰值强度的最大变化的位置是最佳成像位置。

39. 发明申请

US20120063667A1 MASK DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS 有权
标题翻译：掩蔽缺陷检查方法和缺陷检查装置
公开(公告)号：US20120063667A1
公开(公告)日：2012-03-15
申请号：US13230030
申请日：2011-09-12
申请人： Takeshi YAMANE , Tsuneo Terasawa
发明人： Takeshi YAMANE , Tsuneo Terasawa
IPC分类号： G06K9/00
CPC分类号： G01N21/956 , G01N2021/95676
摘要： According to one embodiment, in a method for inspecting a defect of an exposure mask, using an optical system which acquires a dark-field image, an arbitrary partial region where a uniform dark-field image is obtained on the mask is allocated at a defocus position to acquire an image. A detection threshold is decided using signal intensities of the acquired image and an area ratio between a desired inspection region and the partial region, so that a signal count indicating signal intensities greater than the detection threshold in the inspection region is less than a target false detection count. The mask is allocated in a just-in-focus position to acquire an image of the inspection region. A signal having a signal intensity of the acquired image, which indicates an intensity greater than the detection threshold, is determined as a defect.
摘要翻译：根据一个实施例，在用于检查曝光掩模的缺陷的方法中，使用获取暗视场图像的光学系统，在掩模上获得均匀的暗场图像的任意部分区域被分配在散焦获取图像的位置。使用所获取的图像的信号强度和期望检查区域和部分区域之间的面积比来确定检测阈值，使得指示在检查区域中大于检测阈值的信号强度的信号计数小于目标错误检测计数。掩模被分配在刚刚聚焦位置以获取检查区域的图像。具有指示强度大于检测阈值的获取图像的信号强度的信号被确定为缺陷。

40. 发明申请

US20050196059A1 Image input apparatus and inspection apparatus 审中-公开
标题翻译：图像输入装置和检查装置
公开(公告)号：US20050196059A1
公开(公告)日：2005-09-08
申请号：US11064014
申请日：2005-02-24
申请人： Hiromu Inoue , Tsuneo Terasawa , Shinichi Imai , Takehiko Nomura
发明人： Hiromu Inoue , Tsuneo Terasawa , Shinichi Imai , Takehiko Nomura
IPC分类号： G01B11/24 , G01N21/956 , G06K9/36 , G06T1/00 , H01L21/66
CPC分类号： G03F7/70616 , G01N21/9501 , G01N21/956 , G01N2021/95676
摘要： An image input apparatus for inputting an image of an object and outputting the image as an electric signal, the image input apparatus comprises a stage which supports the object, a laser interferometer which measures a position of the stage, a light source which emits a pulse light, an illumination optical system which irradiates the object with an illuminating light, a sensor which converts an image-formed optical image into an electric image signal, an imaging optical system which forms an image of the object on the sensor, a synchronization control circuit which controls a light-emission interval of the light source and synchronization of the sensor on the basis of position information of the laser interferometer, a light quantity monitor which measures a quantity of light, and a light quantity correction circuit which corrects the electric image signal on the basis of an output of the light quantity monitor.
摘要翻译：一种用于输入对象的图像并输出图像作为电信号的图像输入装置，所述图像输入装置包括支撑所述对象的平台，测量所述平台位置的激光干涉仪，发出脉冲的光源光，将照明光照射到物体上的照明光学系统，将图像形成的光学图像转换为电子图像信号的传感器，在传感器上形成物体的图像的成像光学系统，同步控制电路其基于激光干涉仪的位置信息，测量光量的光量监视器和校正电图像信号的光量校正电路来控制光源的发光间隔和传感器的同步基于光量监视器的输出。

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