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    • 31. 发明申请
    • APPLICATION OF PHASE-LOCKED LOOP (PLL) IN OSCILLATION MONITORING FOR INTERCONNECTED POWER SYSTEMS
    • 相位锁定环路(PLL)在互连电源系统的振荡监测中的应用
    • US20130082753A1
    • 2013-04-04
    • US13280458
    • 2011-10-25
    • Kai SunQiang Zhou
    • Kai SunQiang Zhou
    • H03L7/08
    • H03L7/08
    • The present invention relates to a method for accurately detecting oscillations and improving stability of power systems. The method includes the steps of providing a phase-locked loop having a phase detector, a loop filter, and a number-controlled oscillator. The method further includes the steps of extracting an input signal from the power system, using the phase-locked loop to track the frequency and phase of a targeted mode in the input signal, and creating a locally generated reference signal to fit the input signal and to allow the input signal's modal information to be obtained. The method further includes the step of performing mode shape analysis utilizing the reference phase signals constructed from the tracked frequencies.
    • 本发明涉及一种精确检测振荡和提高电力系统稳定性的方法。 该方法包括提供具有相位检测器,环路滤波器和数控振荡器的锁相环的步骤。 该方法还包括以下步骤:使用锁相环来从电力系统提取输入信号,以跟踪输入信号中的目标模式的频率和相位,以及创建本地生成的参考信号以拟合输入信号和 以允许获得输入信号的模态信息。 该方法还包括利用由跟踪频率构成的参考相位信号来执行模式形状分析的步骤。
    • 33. 发明申请
    • APPARATUS AND METHODS FOR PRECOMPILING PROGRAM SEQUENCES FOR WAFER PROCESSING
    • 用于预处理过程的程序序列的装置和方法
    • US20090132062A1
    • 2009-05-21
    • US12338781
    • 2008-12-18
    • Jaideep JainQiang ZhouSteve Kleinke
    • Jaideep JainQiang ZhouSteve Kleinke
    • G05B15/02G06F9/455G05D7/00G05B9/02G05B17/02G06G7/66
    • G05B19/4148G05B2219/33104G05B2219/45031
    • Disclosed are apparatus and methods for embodiments for efficiently and flexibly controlling hardware devices in a semiconductor processing system are provided for use in a distributed control arrangement. In general, the distributed arrangement includes at least one upper-level controller that is configurable with a computer program sequence of instructions for controlling one or more hardware devices of a processing tool. The hardware devices are controlled through one or more lower-level controllers. Prior to execution of the program sequence of the upper-level controller, at least one instruction of this program is pre-compiled so as to translate the instruction for execution by a selected lower-level controller and to add an at least one interlock check to such pre-compiled instruction and make the translated instruction accessible to at least one lower-level controller. The interlock check specifies one or more condition(s) for the selected lower-level controller to execute the pre-compiled instruction. Any number of instructions of the upper-level controller may be translated for use by any number of selected lower-level controllers, where some of the translated instructions include one or more interlock checks.
    • 公开了用于有效和灵活地控制半导体处理系统中的硬件设备的实施例的装置和方法,用于分布式控制装置。 通常,分布式布置包括至少一个上级控制器,其可配置有用于控制处理工具的一个或多个硬件设备的计算机程序序列。 硬件设备通过一个或多个下级控制器进行控制。 在执行上级控制器的程序序列之前,对该程序的至少一个指令进行预编译,以便转换由所选择的下级控制器执行的指令,并将至少一个互锁检查添加到 这样的预编译指令并且使翻译的指令可访问至少一个下级控制器。 互锁检查指定所选下级控制器执行预编译指令的一个或多个条件。 上级控制器的任何数量的指令可以被翻译以供任何数量的所选择的下级控制器使用,其中一些转换的指令包括一个或多个互锁检查。
    • 34. 发明授权
    • Apparatus and methods for precompiling program sequences for wafer processing
    • 用于预编译用于晶片处理的程序序列的装置和方法
    • US07477948B1
    • 2009-01-13
    • US11556989
    • 2006-11-06
    • Jaideep JainQiang ZhouSteve Kleinke
    • Jaideep JainQiang ZhouSteve Kleinke
    • G05B15/02
    • G05B19/4148G05B2219/33104G05B2219/45031
    • Disclosed are apparatus and methods for embodiments for efficiently and flexibly controlling hardware devices in a semiconductor processing system are provided for use in a distributed control arrangement. In general, the distributed arrangement includes at least one upper-level controller that is configurable with a computer program sequence of instructions for controlling one or more hardware devices of a processing tool. The hardware devices are controlled through one or more lower-level controllers. Prior to execution of the program sequence of the upper-level controller, at least one instruction of this program is pre-compiled so as to translate the instruction for execution by a selected lower-level controller and to add an at least one interlock check to such pre-compiled instruction and make the translated instruction accessible to at least one lower-level controller. The interlock check specifies one or more condition(s) for the selected lower-level controller to execute the pre-compiled instruction. Any number of instructions of the upper-level controller may be translated for use by any number of selected lower-level controllers, where some of the translated instructions include one or more interlock checks.
    • 公开了用于有效和灵活地控制半导体处理系统中的硬件设备的实施例的装置和方法,用于分布式控制装置。 通常,分布式布置包括至少一个上级控制器,其可配置有用于控制处理工具的一个或多个硬件设备的计算机程序序列。 硬件设备通过一个或多个下级控制器进行控制。 在执行上级控制器的程序序列之前,对该程序的至少一个指令进行预编译,以便转换由所选择的下级控制器执行的指令,并将至少一个互锁检查添加到 这样的预编译指令并且使翻译的指令可访问至少一个下级控制器。 互锁检查指定所选下级控制器执行预编译指令的一个或多个条件。 上级控制器的任何数量的指令可以被翻译以供任何数量的所选择的下级控制器使用,其中一些转换的指令包括一个或多个互锁检查。