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    • 34. 发明授权
    • Charged particle beam drawing apparatus and article manufacturing method
    • 带电粒子束拉制装置及制品的制造方法
    • US08476607B2
    • 2013-07-02
    • US13534044
    • 2012-06-27
    • Tomonori IshikawaNobushige Korenaga
    • Tomonori IshikawaNobushige Korenaga
    • H01J37/304
    • H01J37/20B82Y10/00B82Y40/00H01J37/09H01J37/3177H01J2237/0264H01J2237/20221
    • The drawing apparatus includes an optical system housing configured to emit a charged particle beam toward the substrate, a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing, a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage, and a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field. Here, the magnetic shield member is provided to the stage at a region, in a direction of the axis, other than a region where the detection device is provided.
    • 所述绘制装置包括构造成向所述基板发射带电粒子束的光学系统壳体,被配置为保持所述基板并且至少沿垂直于所述光学系统壳体的轴线的方向移动的台架;检测装置,包括检测器 以及用于支撑所述检测器的支撑件,使得所述检测器面向所述台的侧表面并且被配置为用于测量所述台的位置;以及磁屏蔽构件,其设置在所述台上并且被配置为屏蔽所述光学系统壳体的开口, 从磁场面向舞台的顶面。 这里,除了设置有检测装置的区域以外,在轴的方向上的区域设置有磁屏蔽构件。
    • 35. 发明申请
    • CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD
    • 充电颗粒光束绘图设备和制品制造方法
    • US20130011797A1
    • 2013-01-10
    • US13534044
    • 2012-06-27
    • Tomonori IshikawaNobushige Korenaga
    • Tomonori IshikawaNobushige Korenaga
    • G03F7/20G21K5/10
    • H01J37/20B82Y10/00B82Y40/00H01J37/09H01J37/3177H01J2237/0264H01J2237/20221
    • The drawing apparatus of the present invention includes an optical system housing configured to emit a charged particle beam toward the substrate; a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing; a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage; and a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field. Here, the magnetic shield member is provided to the stage at a detection region, in a direction of the axis, other than a region where the detection device is provided.
    • 本发明的绘图装置包括一个配置成向基片发射带电粒子束的光学系统壳体; 其被配置为保持所述基板并且至少沿垂直于所述光学系统壳体的轴线的方向移动; 检测装置,包括检测器和用于支撑所述检测器的支撑件,使得所述检测器面向所述台的侧表面,并且被配置用于测量所述台的位置; 以及磁屏蔽构件,其设置在所述平台上并被配置为将所述光学系统壳体的面向所述平台顶表面的开口与磁场隔离。 这里,除了设置有检测装置的区域以外,在轴的方向上的检测区域处将磁屏蔽构件设置在台架上。
    • 37. 发明授权
    • Medical stereo observation system
    • 医疗立体观察系统
    • US07768702B2
    • 2010-08-03
    • US11517714
    • 2006-09-08
    • Kenji HiroseTomonori IshikawaKazuo Morita
    • Kenji HiroseTomonori IshikawaKazuo Morita
    • G02B21/22G02B21/00
    • G02B27/2228A61B1/00193A61B90/20G02B21/22H04N13/239H04N13/30H04N13/31H04N13/332H04N13/344H04N13/363
    • A medical stereo observation system includes a stereo imaging unit producing a first image for a left eye and a second image for a right eye that mutually have parallax and a stereo display unit capable of displaying stereoscopically the images produced by the stereo imaging unit. The stereo imaging unit has a first imaging optical system producing the first image for the left eye and a second imaging optical system producing the second image for the right eye, and focal positions of these imaging optical systems are located far away from the intersection of optical axes of the imaging optical systems, viewed from the stereo imaging unit. Whereby, a large-depth space can be comfortably observed in a wide range and a viewer can observe an observation object without bringing about a feeling of fatigue.
    • 医疗立体观察系统包括立体成像单元,其产生用于左眼的第一图像和相互具有视差的右眼第二图像,以及立体显示单元,其能够立体地显示立体成像单元产生的图像。 立体成像单元具有产生左眼第一图像的第一成像光学系统和产生右眼第二图像的第二成像光学系统,并且这些成像光学系统的焦点位置远离光学交叉点 从立体成像单元观察成像光学系统的轴线。 因此,可以在宽范围内舒适地观察到大深度的空间,并且观察者可以观察观察对象而不产生疲劳感。
    • 38. 发明申请
    • Image observation apparatus
    • 图像观察装置
    • US20060023324A1
    • 2006-02-02
    • US11190615
    • 2005-07-27
    • Satoshi OtsukaTakashi FukayaJunichi NozawaTomonori Ishikawa
    • Satoshi OtsukaTakashi FukayaJunichi NozawaTomonori Ishikawa
    • G02B7/182
    • F16M11/28A61B90/37A61B90/50A61B2090/372F16M11/10F16M11/2014F16M11/2021F16M11/2092F16M11/42F16M2200/048G02B7/001G02B27/0149
    • An image observation apparatus comprising an image display unit for displaying an observation image and a supporting mechanism for supporting the image display unit movably and adjustably in the directions of three, substantially perpendicular axes. Since the supporting mechanism of this image observation apparatus can move and adjust the image display unit in three orthogonal axial directions, an operator need not select a plurality of articulates for operating them when he/she wants to move the image display unit to a desired axial direction. Further, one of the three axes can be a rotational axis for turnably supporting the image display unit around the operator. According to this configuration, the image display unit can be independently moved and adjusted in three axial directions, while the observation angle of the observer with respect to the display face of the image display unit is kept constant.
    • 一种图像观察装置,包括用于显示观察图像的图像显示单元和用于以三个基本上垂直的轴线可移动地和可调节地支撑图像显示单元的支撑机构。 由于该图像观察装置的支撑机构能够在三个正交的轴向方向上移动和调整图像显示单元,所以当他/她想要将图像显示单元移动到期望的轴向时,操作者不需要选择多个用于操作它们的关节 方向。 此外,三个轴中的一个可以是用于可转动地支撑操作者周围的图像显示单元的旋转轴。 根据该结构,图像显示单元可以在三个轴向独立地移动和调整,而观察者相对于图像显示单元的显示面的观察角度保持恒定。
    • 40. 发明授权
    • Hologram
    • 全息图
    • US5654116A
    • 1997-08-05
    • US314501
    • 1994-09-28
    • Tetsuya KatoToshiki SaburiNaoyuki KawazoeYasuhiro MizutaniTomonori Ishikawa
    • Tetsuya KatoToshiki SaburiNaoyuki KawazoeYasuhiro MizutaniTomonori Ishikawa
    • G03H1/02
    • G03H1/0256G03H1/0486G03H2223/18G03H2240/54G03H2240/55G03H2250/37
    • A hologram comprising a diffraction grating film with an interference fringe recorded thereon, a substrate provided on one side of said diffraction grating film, and cover plates provided on the surfaces of the aforesaid diffraction grating film by use of an adhesive, wherein the lateral face portion of the aforesaid hologram is covered with a water repellent layer, or a hologram comprising a diffraction grating film with an interference fringe recorded thereon and a substrate provided on one side of said diffraction grating film, the surface of the aforesaid diffraction grating film being covered with an adhesive, wherein the aforesaid adhesive contains an epoxy resin mixture consisting of an alicyclic epoxy and novolak type epoxy and an alicyclic acid anhydride type curing agent, a chief ingredient composed of an aromatic epoxy resin(s) and a curing agent comprising a mixture of an alicyclic amine and an aliphatic amine, or a chief ingredient composed of an aromatic epoxy resin(s) and a curing agent comprising a mixture of an alicyclic amine and an aromatic amine.
    • 一种全息图,包括其上记录有干涉条纹的衍射光栅膜,设置在所述衍射光栅膜的一侧上的基板和通过使用粘合剂设置在上述衍射光栅膜的表面上的盖板,其中侧面部分 上述全息图被覆盖有防水层,或包括其上记录有干涉条纹的衍射光栅膜和设置在所述衍射光栅膜一侧的基板的全息图,上述衍射光栅膜的表面被覆盖 粘合剂,其中所述粘合剂包含由脂环族环氧树脂和酚醛清漆型环氧树脂组成的环氧树脂混合物和脂环酸酐型固化剂,由芳族环​​氧树脂组成的主要成分和包含以下物质的混合物的固化剂: 脂环胺和脂族胺,或由芳族环氧树脂a组成的主要成分 d包含脂环胺和芳族胺的混合物的固化剂。