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31. 发明专利

JP2001284216A CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND METHOD FOR CONTROLLING IT 失效
公开(公告)号：JP2001284216A
公开(公告)日：2001-10-12
申请号：JP2000094128
申请日：2000-03-30
申请人： TOSHIBA CORP
发明人： HATTORI SEIJI , AKENO MASANOBU
IPC分类号： G03F7/20 , H01J37/20 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To improve the control accuracy of a charged particle beam exposure system when variations exist in exposing using a charged particle beam by well adjusting the exposure and the continuous moving amount of the stage. SOLUTION: This exposure system is provided with a charged particle beam generating section 1 which exposes an object by projecting the charged particle beam, the stage 16 which can continuously move while the object is placed on the stage 16, and a driving section 17 which continuously moves the stage 16. This system is also provided with a control section 20 which controls the projection of the beam and the continuous movement of the stage 16. The control section 20 is provided with a deflection control circuit 23 which calculates the deflected amount of the beam by finding the difference between the present position of the stage 16 and the spotted position of the beam, and a stage control circuit 25. The circuit 25 is provided with a deviation computing section 26 which computes the deviation between the deflected amount of the beam and the target in a deflection area in the continuously moving direction of the stage 16, and a speed compensation control section 27 which accelerates or decelerates the continuous moving speed of the stage 16 in the direction in which the deviation computed by the section 26 becomes zero.

32. 发明专利

JP2000174102A SAMPLE BASE AND SUBSTRATE EVALUATION DEVICE USING THE SAME 失效
公开(公告)号：JP2000174102A
公开(公告)日：2000-06-23
申请号：JP34816598
申请日：1998-12-08
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H01L21/68 , B65G49/07 , G01N21/00 , G01N21/13 , G03F1/66 , G03F1/84 , H01L21/027 , G03F1/08 , G03F1/14
摘要： PROBLEM TO BE SOLVED: To provide a sample base capable of holding substrates of plural sizes in an arbitrary direction with high accuracy even if a pellicle frame is mounted on the base. SOLUTION: A sample base has a base 2, a fixing support 3 fixed to the base 2, and a movable support 4 moved by a driving unit 6 mounted on the base 2 and can hold substrates of a plurality of sizes by moving the movable support 4, wherein the fixing support 3 and the movable support 4 are provided with the plurality of pairs of holding members 7a-10a and 17a-20a put into contact with and holding the substrates near both ends of each one side of each substrate.

33. 发明专利

JPH0887102A EVALUATING DEVICE FOR PATTERN AND EVALUATING METHOD FOR PATTERN 失效
公开(公告)号：JPH0887102A
公开(公告)日：1996-04-02
申请号：JP22187194
申请日：1994-09-16
申请人： TOSHIBA CORP , TOPCON CORP
发明人： TOJO TORU , TABATA MITSUO , AKENO MASANOBU , WATANABE TOSHIYUKI , WATANABE TOMOHIDE , YAMANAKA EIJI , ITO TSUTOMU , TAYA MAKOTO
IPC分类号： G01N21/956 , G03F1/84 , H01L21/027 , G03F1/08
摘要： PURPOSE: To provide a device and a method to evaluate a pattern with high sensitivity in a wide range even when a mask with a pellicle is used. CONSTITUTION: The device is equipped with a condensing means 4 to condense light from a light source 3 on a sample having a pattern, an objective lens 5 placed in the poststage of the sample to transmit the light which is transmitted through the sample, an aperture member placed in the poststage of the objective lens 5 to reduce the diameter of the light beam transmitted through the objective lens 5, a light-receiving element 6 placed in the poststage of the aperture member to receive the light reduced by the aperture member, and a judging means to evaluate the pattern received by the light-accepting element 6 according to the information corresponding to the pattern. In the aperture member, the numerical aperture can be changed according to whether a pellicle is used or not for the sample.

34. 发明专利

JPH06123787A MOVING DEVICE AND ITS PRODUCING METHOD AND POSITIONING DEVICE AND TABLE DEVICE USING THEM 失效
公开(公告)号：JPH06123787A
公开(公告)日：1994-05-06
申请号：JP6119993
申请日：1993-02-26
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： B23Q1/00 , B23Q1/34 , B23Q1/36 , G03F7/20 , G12B5/00 , H01L21/027 , H01L21/30 , H01L21/68 , B23Q1/02
摘要： PURPOSE:To provide a moving device capable of improving response characteristic for a small displacement and simultaneously constituting a compact small displacement mechanism and its producing method and positioning device and a table device using them. CONSTITUTION:A table device is constituted of a moving device 2 of which fixed part 15 for holding a substrate holder 3 via a support mechanism 11 provided for elastically holding a substrate holder 3 holding a substrate 5 in the state free of displacement, is formed into one body with a single member, and positioning devices 4a, 4b provided for slightly displacing the sample holder 3 in the direction of the light axis 9 of an optical system 10.

35. 发明专利

JPH05337766A 失效
公开(公告)号：JPH05337766A
公开(公告)日：1993-12-21
申请号：JP15257892
申请日：1992-06-12
申请人： TOSHIBA CORP
发明人： SANADA YASUSHI , AKENO MASANOBU
IPC分类号： B23Q1/00 , G12B5/00 , H01L21/68 , B23Q1/18
摘要： PURPOSE:To provide a precision locating device which can secure good strokes for a moving stage without enlarging the size of the whole device contour, is free from resulting inconvenience in the locating mechanism under affection of thermal stresses and influence of different coefficient of thermal expansion from material to material, allows shortening of the locating setting time, and is not likely to be influenced by external turbulence. CONSTITUTION:A precision locating device comprises a base 1, moving stage 2, the second guide 3 to guide the movement of the stage 2, a driving mechanism 4 to move the stage 2 along the second guide 3, and a guide mechanism 5 to support the second guide 3 in the condition capable of parallel movement on the base 1. The arrangement is further equipped with a slider 7 with which one end of the second guide 3 is connected through the connection part 6, the first guide 8 secured onto the base 1 to guide the movement of the slider 7, a driving mechanism 9 to move the slider 7 along the first guide 8, and a fixing mechanism 11 which is installed on the bottom surface of the second guide 3 through an up-and-down changeable mechanism 10.

36. 发明专利

JPH0412696A CONTROLLER FOR VARIABLE GAP MOTOR 失效
公开(公告)号：JPH0412696A
公开(公告)日：1992-01-17
申请号：JP11439890
申请日：1990-04-28
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H02P8/00 , H02P7/00 , H02P25/08
摘要： PURPOSE:To obtain a controller for a variable gap motor, which can produce a large torque, can perform precise speed control or position control and can be used as a servo motor, by utilizing rolling motion information of a rotor in the exciting phase control for optimizing production of torque. CONSTITUTION:Rolling position of a rotor, driven through a variable gap motor 3, is detected through a rotor rolling position detecting means 5 and the detection results are provided to a rotor rolling speed detecting means 11 and an excitation center calculating means 9. The excitation center calculating means 9 calculates the center of excitation of a stator for maintaining the excitation phase constant and an excitation pattern generating means 15 determines the excitation pattern of the stator for realizing constant excitation phase. On the other hand, the rotor rolling speed detecting means 11 determines the rolling speed of rotor which is then fed to an excitation center correcting means 13. The excitation center correcting means 13 calculates a correction amount for optimizing the excitation phase thus correcting the excitation pattern of the stator.

37. 发明专利

JPS63287350A ELECTRICALLY-DRIVEN MOTOR 失效
公开(公告)号：JPS63287350A
公开(公告)日：1988-11-24
申请号：JP11892487
申请日：1987-05-18
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H02K21/12
摘要： PURPOSE:To generate high torque, by changing the thickness in the radial direction of a rotor, in the direction of a rotary shaft, and by changing the outer and inner diameters of inner and outer stators orthogonal to the rotary shaft. CONSTITUTION:A rotor 1 placed between an outer stator 2 and an inner stator 3 is coaxially set. The outer and inner stators 2, 3 are formed of laminated sheets, and the rotor 1 is composed by arranging a plurality of permanent magnets 6 on a section confronted with both the stators 2, 3. In this case, the thickness in the radial direction of the rotor 1 is linearly changed so that the section of a bearing section 7 may be the largest and the end section may be the smallest. Also on the outer and inner stators 2, 3, the inner and outer diameters are changed so that the space 20 between the stators 2, 3 and the rotor 1 may be constant according to the change of the thickness of the rotor 1. As a result, a magnetic gap 22 between the stator 2 and the rotor 1 is made smaller than the mechanical space 20, and high torque can be generated.

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