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31. 发明授权

US5993658A Method for biodegrading trichloroethylene and method for biodegrading chlorinated organic compound by microorganisms 失效
标题翻译：生物降解三氯乙烯的方法及微生物生物降解氯化有机化合物的方法
公开(公告)号：US5993658A
公开(公告)日：1999-11-30
申请号：US707497
申请日：1996-09-24
申请人： Kinya Kato , Shinya Kozaki , Takeshi Imamura , Toshiyuki Komatsu
发明人： Kinya Kato , Shinya Kozaki , Takeshi Imamura , Toshiyuki Komatsu
IPC分类号： A62D3/00 , A62D3/02 , B09C1/10 , C02F3/12 , C02F3/34 , C12N1/00 , C12N1/20 , C12P1/04 , C12R1/38 , C12S99/00 , C99Z99/00
CPC分类号： C02F3/1231 , B09C1/10 , C02F3/34 , C12P1/04 , C12R1/38 , Y02W10/15 , Y10S210/908 , Y10S210/909 , Y10S435/874
摘要： There are here provided a method for biodegrading trichloroethylene which comprises the step of bringing an aqueous medium containing trichloroethylene into contact with microorganisms having a trichloroethylene degrading ability derived from intestines of termites to degrade trichloroethylene; a method for obtaining the microorganisms; a method for remediating a soil by the use of the microorganisms; and a method for biodegrading an chlorinated organic compound with the microorganisms.
摘要翻译：这里提供了一种生物降解三氯乙烯的方法，其包括使含三氯乙烯的水性介质与来自白蚁肠的三氯乙烯降解能力的微生物接触以降解三氯乙烯的步骤; 获得微生物的方法; 一种通过使用微生物来补救土壤的方法; 以及用微生物生物降解氯化有机化合物的方法。

32. 发明授权

US5856868A Foreign substance inspecting apparatus and method thereof 失效
标题翻译：异物检查装置及其方法
公开(公告)号：US5856868A
公开(公告)日：1999-01-05
申请号：US889558
申请日：1997-07-08
申请人： Kinya Kato , Yumi Nakagawa
发明人： Kinya Kato , Yumi Nakagawa
IPC分类号： G01N21/94 , G01N21/88
CPC分类号： G01N21/94
摘要： A foreign substance inspecting apparatus and method for detecting a foreign substance on a surface, includes a light source for providing light; a plurality of condensing optical systems for collecting the light from the light source and for forming a plurality of light spots on the surface; a scanning system for scanning the surface using the light spots formed by the condensing optical systems; a detecting optical system for detecting light scattered from at least one of the light spots by the foreign substance on the surface; and a surface shape measuring system for measuring a shape of the surface, wherein a focus of each one of the condensing optical systems is individually adjusted according to the surface shape measured by the surface shape measuring system.
摘要翻译：用于检测表面上的异物的异物检查装置和方法包括：用于提供光的光源; 多个聚光系统，用于收集来自光源的光并在表面上形成多个光斑; 使用由聚光光学系统形成的光斑扫描表面的扫描系统; 检测光学系统，用于检测由表面上的异物从至少一个光斑散射的光; 以及用于测量表面形状的表面形状测量系统，其中根据由表面形状测量系统测量的表面形状单独地调整每个聚光光学系统的焦点。

33. 发明授权

US5764361A Interferometer, adjusting method therefor, stage apparatus having the interferometer, and exposure apparatus having the stage apparatus 失效
标题翻译：干涉仪，其调节方法，具有干涉仪的舞台装置，以及具有舞台装置的曝光装置
公开(公告)号：US5764361A
公开(公告)日：1998-06-09
申请号：US734078
申请日：1996-10-21
申请人： Kinya Kato , Shigeru Takemoto
发明人： Kinya Kato , Shigeru Takemoto
IPC分类号： G01B9/02 , G03F7/20
CPC分类号： G01B9/02021 , G01B9/02058 , G03F7/70358 , G03F7/70716 , G01B2290/70
摘要： This invention relates an interferometer having a structure for suppressing measurement errors arising from leakage light by minimizing nonlinear errors due to the leakage light in a polarization beam splitter for splitting incident light into a first polarized light component and a second polarized light component, and apparatuses to which the interferometer is applied. The interferometer includes an adjustment mechanism for adjusting the angle of light incidence on the beam splitting surface of the polarization beam splitter such that the extinction ratio of the polarization beam splitter is minimized by using the dependence of the polarization beam splitter on the incident angle.
摘要翻译：本发明涉及一种干涉仪，其具有通过使入射光分离为第一偏振光分量和第二偏振光分量的偏振分束器中的漏光引起的非线性误差最小化，抑制由漏光引起的测量误差的结构，应用干涉仪。该干涉仪包括调节机构，用于调节偏振分束器的分束表面上的光入射角，使得偏振分束器的消光比通过使用偏振分束器对入射角的依赖性来最小化。

34. 发明授权

US5726757A Alignment method 失效
标题翻译：对齐方法
公开(公告)号：US5726757A
公开(公告)日：1998-03-10
申请号：US719315
申请日：1996-09-25
申请人： Masaki Kato , Kinya Kato , Kei Nara
发明人： Masaki Kato , Kinya Kato , Kei Nara
IPC分类号： G03F7/20 , G03F9/00 , G01B11/00
CPC分类号： G03F7/70275 , G03F7/70358 , G03F9/70
摘要： In an exposure apparatus, an alignment-detecting light component of a mask and that of a plate are spatially separated from each other, thereby enabling highly accurate alignment with little influence of the light from the plate on detection of the mask position. An alignment optical system comprises a light source means for supplying a luminous flux; a scan beam forming optical system for forming, based on the luminous flux, a scan beam at a visual field area on a first substrate with respect to a predetermined optical system; a scanning means for optically scanning, in a predetermined direction, the scan beam formed on the first substrate; a first detection means for detecting a diffracted and reflected light component from a first mark generated when optically scanned with the scan beam formed on the first substrate; and a second detection means for detecting, by way of the predetermined optical system and through a path different from the path through which the diffracted and reflected light component from the first mark is detected, a diffracted and reflected light component from a second mark generated when optically scanned with the scan beam which is formed on the second substrate by way of the predetermined optical system.
摘要翻译：在曝光装置中，掩模的对准检测光分量和板的对准检测光分量在空间上彼此分离，从而在对掩模位置的检测时几乎不受来自板的光的影响。对准光学系统包括用于提供光通量的光源装置; 扫描光束形成光学系统，用于基于光通量，相对于预定光学系统在第一基板上的视野区域处形成扫描光束; 扫描装置，用于在预定方向上光扫描形成在第一基板上的扫描光束; 第一检测装置，用于从由形成在第一基板上的扫描光束进行光扫描时产生的第一标记中检测衍射和反射光分量; 以及第二检测装置，用于通过预定的光学系统和通过不同于检测到来自第一标记的衍射和反射光分量的路径的路径来检测来自第二标记的衍射和反射光分量，通过预定的光学系统用形成在第二基板上的扫描光束进行光学扫描。

35. 发明授权

US5658795A Method for biodegradation of polluting substance 失效
标题翻译：污染物质生物降解方法
公开(公告)号：US5658795A
公开(公告)日：1997-08-19
申请号：US571739
申请日：1995-12-13
申请人： Kinya Kato , Kazumi Tanaka , Masanori Sakuranaga , Shinya Kozaki
发明人： Kinya Kato , Kazumi Tanaka , Masanori Sakuranaga , Shinya Kozaki
IPC分类号： A62D3/02 , A62D3/00 , B09B3/00 , B09C1/10 , C02F3/00 , C02F3/10 , C02F3/34 , C12N1/00 , C12N1/20 , C07C61/00
CPC分类号： C02F3/34 , B09C1/10 , C02F3/108 , Y02W10/15
摘要： A method of biodegradation of a polluting substance by a microorganism is disclosed, wherein the microorganism is an auxotrophic microorganism and the action of the auxotrophic microorganism is controlled by the amount of a required nutrient for the auxotrophic microorganism. A carrier for supporting an auxotrophic microorganism for use for biodegradation contains a required nutrient for the auxotrophic microorganism.
摘要翻译：公开了一种微生物对污染物质进行生物降解的方法，其中微生物是营养缺陷型微生物，营养缺陷型微生物的作用是由营养缺陷型微生物所需营养素的量控制的。用于支持用于生物降解的营养缺陷型微生物的载体包含营养缺陷型微生物所需的营养物质。

36. 发明授权

US5288517A Method of forming planar membrane 失效
标题翻译：形成平面膜的方法
公开(公告)号：US5288517A
公开(公告)日：1994-02-22
申请号：US835025
申请日：1992-02-18
申请人： Tsunehiro Kanno , Kinya Kato , Harumi Iwashita , Junji Ohyama , Nobuko Yamamoto , Masanori Sakuranaga
发明人： Tsunehiro Kanno , Kinya Kato , Harumi Iwashita , Junji Ohyama , Nobuko Yamamoto , Masanori Sakuranaga
IPC分类号： A61K9/127 , A61K47/48 , B01D69/12 , G01N33/543 , G01N33/545 , B05D5/00 , C07K17/08
CPC分类号： B82Y30/00 , A61K47/48238 , A61K47/48815 , A61K9/1277 , B01D69/122 , G01N33/5432 , B01J2219/00734 , Y10S436/829
摘要： A method of forming a lipid planar membrane of a bilayer membrane composed of lipid and protein comprises the step of immersing a substrate, which has a long-chain hydrocarbon group at least on the surface of one side thereof, in a suspension of liposome or proteoliposome, respectively. The long-chain hydrocarbon group is introduced into the substrate by bonding a long-chain alkylsilane coupling agent or a long-chain alkyltitanate coupling agent.
摘要翻译：形成由脂质和蛋白质组成的双层膜的脂质平面膜的方法包括将具有长链烃基的基材至少在其一面的表面上浸渍在脂质体或蛋白脂质体的悬浮液中的步骤，分别。通过键合长链烷基硅烷偶联剂或长链烷基钛酸酯偶联剂将长链烃基引入基材。

37. 发明授权

US5177564A Apparatus for measuring thickness of plate-shaped article 失效
标题翻译：用于测量板状制品厚度的装置
公开(公告)号：US5177564A
公开(公告)日：1993-01-05
申请号：US806298
申请日：1991-12-13
申请人： Kinya Kato , Kazuhiro Takaoka
发明人： Kinya Kato , Kazuhiro Takaoka
IPC分类号： G01B11/06
CPC分类号： G01B11/06
摘要： An apparatus for measuring the thickness of a plate-shaped article with a substantially rectangular lateral face, comprises a measuring optical system including a light-emitting unit for emitting a measuring light beam along an optical axis in a predetermined plane, and a light-receiving unit provided on said optical axis and adapted to generate an output signal corresponding to the amount of detected measuring light, support system for supporting the article in such a manner that the article is substantially parallel to the predetermined plane and the measuring light enters obliquely the lateral face of the article, relative movement unit for moving, in a direction crossing said predetermined plane, either of said article and the measuring light relative to the other, and determination unit for determining the thickness of the article, based on the output signal of the measuring optical system and the amount of movement by the relative movement unit.
摘要翻译：一种用于测量具有大致矩形侧面的板状物品的厚度的装置，包括测量光学系统，该测量光学系统包括用于沿预定平面沿光轴发射测量光束的发光单元，以及光接收单元，其设置在所述光轴上并且适于产生对应于检测到的测量光量的输出信号，所述支撑系统用于以使得所述制品基本上平行于所述预定平面的方式支撑所述物品，并且所述测量光倾斜地进入所述外侧所述物品的表面，相对运动单元，用于在与所述预定平面交叉的方向上相对于另一物体和所述测量光中的任一个移动;以及确定单元，用于基于所述物品的输出信号测量光学系统和相对运动单元的移动量。

38. 发明授权

US09523918B2 Illumination optical assembly, exposure device, and device manufacturing method 有权
标题翻译：照明光学组件，曝光装置和器件制造方法
公开(公告)号：US09523918B2
公开(公告)日：2016-12-20
申请号：US14126126
申请日：2011-11-25
申请人： Norio Miyake , Kinya Kato
发明人： Norio Miyake , Kinya Kato
IPC分类号： G03B27/54 , G03F7/20 , G02B5/30 , G02B26/08 , G02B27/09 , G02B27/28
CPC分类号： G03F7/7015 , G02B5/3083 , G02B26/0816 , G02B27/0927 , G02B27/286 , G03F7/20 , G03F7/70075 , G03F7/70116 , G03F7/70566
摘要： There is provided an illumination optical system for illuminating an illumination objective surface. The illumination optical system includes a first spatial light modulator which has a plurality of optical elements arranged on a first plane, a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a polarization state change to a first light beam passes through a first area in a plane intersecting an optical axis of the illumination optical system, the polarization state change being different from a polarization state change given to a second light beam passes through a second area in the intersecting plane, and a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.
摘要翻译：提供了一种用于照明照明物镜表面的照明光学系统。照明光学系统包括：第一空间光调制器，其具有布置在第一平面上的多个光学元件;偏振构件，其布置在相对于第一平面的照明物镜表面侧上的光路中，并且具有偏振对第一光束的状态变化通过与照明光学系统的光轴相交的平面中的第一区域，与给予第二光束的偏振态变化不同的偏振态变化通过相交的第二区域平面和第二空间光调制器，其具有单独控制并且布置在第二平面上的多个光学元件，并且可变地在照明光学系统的照明光瞳上形成光强度分布。

39. 发明授权

US07372544B2 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
标题翻译：曝光装置，光学投影装置和调整光学投影装置的方法
公开(公告)号：US07372544B2
公开(公告)日：2008-05-13
申请号：US11797605
申请日：2007-05-04
申请人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
发明人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
IPC分类号： G03B27/32 , G03B27/42 , G03B27/44 , G03B27/54
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
摘要翻译：曝光装置包括多个投影光学系统，每个投影光学系统具有布置在第一表面和第二表面之间的光路中的光学元件，并且通过光学器件从第一表面形成辐射图案到第二表面上的曝光场元素。所述装置还包括相对于所述多个投影光学系统设置在所述第二表面的侧面中的可移动部分，所述多个投影光学系统在所述物体与所述投影光学系统的扫描曝光期间在第一方向上相对于所述曝光场保持要移动的物体辐射图。多个投影光学系统中的每一个在第二表面的一侧是远心的，并且曝光区域在与第一方向交叉的第二方向上布置在不同的位置。

40. 发明申请

US20070216885A1 Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus 失效
标题翻译：曝光装置，光学投影装置和调整光学投影装置的方法
公开(公告)号：US20070216885A1
公开(公告)日：2007-09-20
申请号：US11797605
申请日：2007-05-04
申请人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
发明人： Masashi Tanaka , Masato Kumazawa , Kinya Kato , Masaki Kato , Hiroshi Chiba , Hiroshi Shirasu
IPC分类号： G03B27/32
CPC分类号： G02B17/0892 , G02B13/22 , G02B17/002 , G02B17/008 , G02B17/045 , G02B17/0605 , G02B17/08 , G02B17/0812 , G02B17/082 , G02B17/0828 , G02B17/086 , G02B27/144 , G02B27/145 , G03B27/32 , G03F7/70066 , G03F7/70216 , G03F7/70225 , G03F7/70241 , G03F7/70275 , G03F7/70358 , G03F7/70791
摘要： An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
摘要翻译：曝光装置包括多个投影光学系统，每个投影光学系统具有布置在第一表面和第二表面之间的光路中的光学元件，并且通过光学器件从第一表面形成辐射图案到第二表面上的曝光场元素。所述装置还包括相对于所述多个投影光学系统设置在所述第二表面的侧面中的可移动部分，所述多个投影光学系统在所述物体与所述投影光学系统的扫描曝光期间在第一方向上相对于所述曝光场保持要移动的物体辐射图。多个投影光学系统中的每一个在第二表面的一侧是远心的，并且曝光区域在与第一方向交叉的第二方向上布置在不同的位置。

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