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31. 发明授权

US08574946B1 Multi-element packaging of concentrator photovoltaic cells 有权
标题翻译：聚光光伏电池的多元封装
公开(公告)号：US08574946B1
公开(公告)日：2013-11-05
申请号：US13586182
申请日：2012-08-15
申请人： Yves C. Martin , Theodore G. van Kessel , Brent A. Wacaser
发明人： Yves C. Martin , Theodore G. van Kessel , Brent A. Wacaser
IPC分类号： H01L31/18
CPC分类号： H01L31/02008 , H01L29/24 , H01L31/0508 , H01L31/0543 , H05K1/0201 , Y02E10/52
摘要： A method for forming a photovoltaic structure includes forming a stack, from bottom to top, of a conductive substrate, at least one electrical isolation layer, and a patterned conductive material layer. At least one solar concentrator receiver plate configured to mount a photovoltaic concentrator cells and at least one metallic wiring structure are formed in the patterned conductive material layer. The at least one electrical isolation layer can include a stack of an electrically insulating metal-containing compound layer and an organic or inorganic dielectric material that provides thermal conduction and electrical isolation. The at least one solar concentrator receiver plate can be thicker than the at least one metallic wiring structure so as to provide enhanced thermal spreading and conduction through the at least one electrical isolation layer and into the conductive substrate.
摘要翻译：一种用于形成光伏结构的方法包括从底部到顶部形成导电基板，至少一个电隔离层和图案化导电材料层的堆叠。构造成安装光伏聚光器电池和至少一个金属布线结构的至少一个太阳能集热器接收板形成在图案化的导电材料层中。所述至少一个电隔离层可包括电绝缘的含金属化合物层和提供导热和电隔离的有机或无机电介质材料的叠层。所述至少一个太阳能集中器接收板可以比所述至少一个金属布线结构更厚，以便通过所述至少一个电隔离层和导电基板提供增强的热扩散和传导。

32. 发明授权

US08137996B2 Method and system for tone inverting of residual layer tolerant imprint lithography 有权
标题翻译：残余层容忍压印光刻的色调反转方法和系统
公开(公告)号：US08137996B2
公开(公告)日：2012-03-20
申请号：US12787417
申请日：2010-05-26
申请人： Matthew E. Colburn , Theodore G. van Kessel , Yves C. Martin , Dirk Pfeiffer
发明人： Matthew E. Colburn , Theodore G. van Kessel , Yves C. Martin , Dirk Pfeiffer
IPC分类号： H01L21/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A method (and apparatus) of imprint lithography, includes imprinting, via a patterned mask, a pattern into a resist layer on a substrate, and overlaying a cladding layer over the imprinted resist layer. A portion of the cladding layer is used as a hard mask for a subsequent processing.
摘要翻译：压印光刻的方法（和装置）包括通过图案化掩模将图案压印到衬底上的抗蚀剂层中，并在覆盖的抗蚀剂层上覆盖覆层。包覆层的一部分用作后续处理的硬掩模。

33. 发明申请

US20120006318A1 METHOD OF CONCETRATING SOLAR ENERGY 有权
标题翻译：考虑太阳能的方法
公开(公告)号：US20120006318A1
公开(公告)日：2012-01-12
申请号：US13237386
申请日：2011-09-20
申请人： Supratik Guha , Philip C. Hobbs , Yves C. Martin , Robert L. Sandstrom , Theodore G. van Kessel
发明人： Supratik Guha , Philip C. Hobbs , Yves C. Martin , Robert L. Sandstrom , Theodore G. van Kessel
IPC分类号： F24J2/38
CPC分类号： H02S20/00 , F24S23/12 , F24S23/30 , F24S23/77 , F24S40/55 , H01L31/0543 , H01L31/0547 , H02S20/32 , H02S40/22 , H02S40/425 , Y02E10/40 , Y02E10/52
摘要： A method of concentrating solar energy includes receiving solar energy through a surface of an optically clear shell, guiding the solar energy through a liquid contained in the optically clear shell, folding the solar energy back through the liquid toward a solar receiver, and shifting the solar receiver within the optically clear shell to track the sun, wherein the solar energy collected by the solar receiver is converted into electrical energy.
摘要翻译：集中太阳能的方法包括：通过光学透明壳体的表面接收太阳能，引导太阳能通过包含在光学透明壳体中的液体，将太阳能通过液体向太阳能接收器反射，并使太阳能接收器在光学透明外壳内以跟踪太阳，其中由太阳能接收器收集的太阳能被转换成电能。

34. 发明授权

US08026439B2 Solar concentration system 有权
标题翻译：太阳能集中系统
公开(公告)号：US08026439B2
公开(公告)日：2011-09-27
申请号：US12622504
申请日：2009-11-20
申请人： Supratik Guha , Philip C. Hobbs , Yves C. Martin , Robert L. Sandstrom , Theodore G. van Kessel
发明人： Supratik Guha , Philip C. Hobbs , Yves C. Martin , Robert L. Sandstrom , Theodore G. van Kessel
IPC分类号： H01L31/00
CPC分类号： H02S20/00 , F24S23/12 , F24S23/30 , F24S23/77 , F24S40/55 , H01L31/0543 , H01L31/0547 , H02S20/32 , H02S40/22 , H02S40/425 , Y02E10/40 , Y02E10/52
摘要： A solar concentration system includes an optically clear shell member having an outer surface and an inner surface, with the inner surface defining a hollow interior portion, a liquid contained within the hollow interior portion of the optically clear shell, and a solar collection system contained within the hollow interior portion of the optically clear shell. The solar collection system includes a tracking system configured and disposed to selectively shift within the hollow interior portion, a reflector member mounted to the tracking system, and a solar receiver mounted to the tracking system. The tracking system being configured and disposed orient the reflector member and the solar receiver to follow a path of the sun enhancing the collection of solar energy.
摘要翻译：太阳能集中系统包括具有外表面和内表面的光学透明壳体构件，其中内表面限定中空内部部分，容纳在光学透明壳体的中空内部部分内的液体以及包含在其中的太阳能收集系统光学透明外壳的中空内部。太阳能收集系统包括配置和设置成在中空内部部分内有选择地移动的跟踪系统，安装到跟踪系统的反射器部件和安装到跟踪系统的太阳能接收器。跟踪系统被配置和布置成使得反射器构件和太阳能接收器沿着太阳能路径收集太阳能。

35. 发明授权

US07883832B2 Method and apparatus for direct referencing of top surface of workpiece during imprint lithography 有权
标题翻译：用于在压印光刻期间直接参考工件顶面的方法和装置
公开(公告)号：US07883832B2
公开(公告)日：2011-02-08
申请号：US11028798
申请日：2005-01-04
申请人： Matthew E. Colburn , Yves C. Martin , Theodore G. van Kessel , Hematha K. Wickramasinghe
发明人： Matthew E. Colburn , Yves C. Martin , Theodore G. van Kessel , Hematha K. Wickramasinghe
IPC分类号： G03F7/26 , H02N1/04
CPC分类号： G03F7/0002 , B29C33/20 , B29C33/30 , B29C33/303 , B29C43/021 , B29C2043/025 , B29C2043/5841 , B82Y10/00 , B82Y40/00 , G03F9/00 , G03F9/703 , G03F9/7042 , G03F9/7053
摘要： An apparatus (and method) for referencing a surface of a workpiece during imprint lithography, includes an air bearing for mechanically referencing a surface of the workpiece, and a lithographic template coupled to the air bearing.
摘要翻译：在压印光刻期间用于参考工件表面的装置（和方法）包括用于机械地参考工件的表面的空气轴承和耦合到空气轴承的光刻模板。

36. 发明授权

US07528939B2 Method and apparatus for real-time measurement of trace metal concentration in chemical mechanical polishing (CMP) slurry 失效
标题翻译：化学机械抛光（CMP）浆料中痕量金属浓度的实时测量方法和设备
公开(公告)号：US07528939B2
公开(公告)日：2009-05-05
申请号：US11875987
申请日：2007-10-22
申请人： Theodore G. van Kessel
发明人： Theodore G. van Kessel
IPC分类号： G01N21/00
CPC分类号： G01N23/06 , G01N23/223 , G01N2223/076
摘要： A system (and method) for real-time measurement of trace metal concentration in a chemical mechanical polishing (CMP) slurry, includes an electromagnetic radiation flow cell carrying a CMP slurry, a slurry pickup head coupled to the flow cell, and an analyzer for measuring properties of the slurry flowing through the flow cell.
摘要翻译：用于在化学机械抛光（CMP）浆料中实时测量痕量金属浓度的系统（和方法）包括携带CMP浆料的电磁辐射流动池，耦合到流动池的浆料拾取头，以及用于测量流过流动池的浆料的性质。

37. 发明申请

US20080118645A1 Method and system for tone inverting of residual layer tolerant imprint lithography 失效
标题翻译：残余层容忍压印光刻的色调反转方法和系统
公开(公告)号：US20080118645A1
公开(公告)日：2008-05-22
申请号：US11600140
申请日：2006-11-16
申请人： Matthew E. Colburn , Theodore G. van Kessel , Yves C. Martin , Dirk Pfeiffer
发明人： Matthew E. Colburn , Theodore G. van Kessel , Yves C. Martin , Dirk Pfeiffer
IPC分类号： B05D3/12 , B05C11/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A method (and apparatus) of imprint lithography, includes imprinting, via a patterned mask, a pattern into a resist layer on a substrate, and overlaying a cladding layer over the imprinted resist layer. A portion of the cladding layer is used as a hard mask for a subsequent processing.
摘要翻译：压印光刻的方法（和装置）包括通过图案化掩模将图案压印到衬底上的抗蚀剂层中，并在覆盖的抗蚀剂层上覆盖覆层。包覆层的一部分用作后续处理的硬掩模。

38. 发明授权

US07288840B2 Structure for cooling a surface 失效
标题翻译：用于冷却表面的结构
公开(公告)号：US07288840B2
公开(公告)日：2007-10-30
申请号：US11037670
申请日：2005-01-18
申请人： Bruce K. Furman , Yves Martin , Theodore G. van Kessel
发明人： Bruce K. Furman , Yves Martin , Theodore G. van Kessel
IPC分类号： H01L23/34
CPC分类号： H01L23/473 , H01L2924/0002 , H01L2924/00
摘要： An apparatus for cooling a surface having a metal structure made of a material with high thermal conductivity, and designed to provide efficient cooling of the surface while minimizing mechanical stress between the metal structure and the surface.
摘要翻译：一种用于冷却表面的装置，其具有由具有高导热性的材料制成的金属结构，并且被设计成在使金属结构和表面之间的机械应力最小化的同时提供有效的表面冷却。

39. 发明授权

US07186977B2 Method for non-destructive trench depth measurement using electron beam source and X-ray detection 失效
标题翻译：使用电子束源和X射线检测的非破坏性沟槽深度测量方法
公开(公告)号：US07186977B2
公开(公告)日：2007-03-06
申请号：US11035932
申请日：2005-01-14
申请人： Yves C. Martin , Anthony Santiago , Theodore G. van Kessel
发明人： Yves C. Martin , Anthony Santiago , Theodore G. van Kessel
IPC分类号： H01J37/256 , G01N23/223
CPC分类号： G01N23/2252 , H01J2237/2807 , H01J2237/281
摘要： A method (and system) for non-destructive measurement of a depth of a feature in a structure, includes using a scanning electron microscope (SEM) image to navigate to find the feature in an X-ray image, using an electron beam to produce a fluorescent emission in the feature, and using an X-ray count made at a position of the feature in the X-ray image, to determine a depth of the feature.
摘要翻译：一种用于对结构中的特征深度的非破坏性测量的方法（和系统）包括使用扫描电子显微镜（SEM）图像导航以在X射线图像中找到特征，使用电子束产生特征中的荧光发射，以及使用在X射线图像中的特征的位置处进行的X射线计数来确定特征的深度。

40. 发明授权

US5691540A Assembly for measuring a trench depth parameter of a workpiece 失效
标题翻译：用于测量工件的沟槽深度参数的组件
公开(公告)号：US5691540A
公开(公告)日：1997-11-25
申请号：US643090
申请日：1996-04-30
申请人： Scott D. Halle , Philip Charles Danby Hobbs , Tadashi Mitsui , Theodore G. van Kessel , Hemantha Kumar Wickramasinghe
发明人： Scott D. Halle , Philip Charles Danby Hobbs , Tadashi Mitsui , Theodore G. van Kessel , Hemantha Kumar Wickramasinghe
IPC分类号： G01B11/22
CPC分类号： G01B11/22
摘要： An assembly for measuring a trench depth parameter of a workpiece is disclosed. The assembly has an ultra-violet radiation source; a split fiber bundle having a first branch for propagating the ultra-violet radiation from the radiation source to a lens, and a second branch; a lens for focusing the UV radiation to the workpiece and refocusing an ultra-violet interference signal to the second branch; and a detector responsive to the ultra-violet interference signal received through the second branch. The detector transforms the ultra-violet interference signal to an electrical signal which is a measure of a trench depth of the workpiece. The ultra-violet interference signal is developed when ultra-violet radiation propagates through the workpiece and reflects from its base region to thereby interfere with ultra-violet radiation that is directly reflected by a workpiece surface which is different from the base region.
摘要翻译：公开了一种用于测量工件的沟槽深度参数的组件。该组件具有紫外辐射源; 具有用于将紫外辐射从辐射源传播到透镜的第一分支的分裂光纤束和第二分支; 用于将UV辐射聚焦到工件并将紫外干涉信号重新聚焦到第二分支的透镜; 以及响应于通过第二分支接收的紫外干涉信号的检测器。检测器将紫外线干涉信号转换成电信号，该电信号是工件的沟槽深度的量度。当紫外线辐射传播通过工件并从其底部区域反射时，紫外线干涉信号被开发，从而干扰由与基底区域不同的工件表面直接反射的紫外辐射。

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