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31. 发明申请

US20070022831A1 Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system 有权
标题翻译：半导体晶片和光掩模光学检测系统的原位扫描电子显微镜检查站
公开(公告)号：US20070022831A1
公开(公告)日：2007-02-01
申请号：US11359100
申请日：2006-02-22
申请人： Ron Naftali , Yoram Uziel , Ran Vered , Eitan Pinhasi , Igor Krivts (Krayvitz)
发明人： Ron Naftali , Yoram Uziel , Ran Vered , Eitan Pinhasi , Igor Krivts (Krayvitz)
IPC分类号： G01M19/00 , G21K5/08
CPC分类号： H01L21/67748 , G03F1/84 , H01J2237/162 , H01J2237/204 , H01J2237/2817 , H01L21/67126 , H01L21/6719 , H01L21/67751
摘要： A substrate inspection system includes two or more inspection modules supported on a plate. A chamber is supported beneath the plate by a translation system, which is configured to provide horizontal displacement of the chamber under the plate to permit loading and unloading of a substrate to/from the chamber. Thus, when the chamber is in a loading/unloading position it is at least partially uncovered from the plate. The translation system may be further configured to provide vertical displacement of the chamber with respect to the plate so as to position an upper surface of a wall of the chamber in close proximity to a lower surface of the plate when the chamber is in an inspection position. In such a position, the upper surface of the wall of the chamber and the lower surface of the plate may be separated by an air gap.
摘要翻译：基板检查系统包括支撑在板上的两个或更多个检查模块。通过平移系统在平板下方支撑室，该平移系统构造成提供室下方的水平位移，以允许将衬底装载到腔室或从腔室卸载。因此，当腔室处于装载/卸载位置时，其至少部分地从板上未被覆盖。翻译系统可以被进一步配置成提供腔室相对于板的垂直位移，以便当腔室处于检查位置时将腔室的壁的上表面定位成紧邻板的下表面。在这样的位置，室的壁的上表面和板的下表面可以由气隙分开。

32. 发明申请

US20050179891A1 Process and assmebly for non-destructive surface inspection 失效
标题翻译：非破坏性表面检查的过程和方法
公开(公告)号：US20050179891A1
公开(公告)日：2005-08-18
申请号：US11034422
申请日：2005-01-11
申请人： Gilad Almogy , Ron Naftali , Avishay Guetta , Doron Shoham
发明人： Gilad Almogy , Ron Naftali , Avishay Guetta , Doron Shoham
IPC分类号： G01N21/95 , G01N21/00
CPC分类号： G01N21/956 , G01N21/9501
摘要： An optical system for detecting defects on a wafer that includes a device for producing a beam and directing the beam onto the wafer surface, producing an illuminated spot on the wafer's surface. The system further includes a detector detecting light, and a mirrored assembly having together with the detector an axis of symmetry about a line perpendicular to the wafer surface. The assembly is configured to receive scattered light from the surface, where the scattered light including a first scattered light part being scattered from the pattern. The assembly is further configured to reflect and focus rotationally symmetrically about the axis of symmetry the scattered light to the detector. The system further includes a device operating with the detector for facilitating detection of a scattered light other than the specified scattered light due to pattern.
摘要翻译：一种用于检测晶片上的缺陷的光学系统，其包括用于产生光束并将光束引导到晶片表面上的装置，在晶片的表面上产生照明光斑。该系统还包括检测光的检测器和与检测器一起围绕垂直于晶片表面的线的对称轴的镜像组件。所述组件被配置为从所述表面接收散射光，其中所述散射光包括从所述图案散射的第一散射光部分。组件还被配置为将散射光的对称轴围绕旋转对称地反射并聚焦到检测器。该系统还包括利用检测器操作的装置，用于便于检测由于图案而导致的特定散射光之外的散射光。

33. 发明授权

US06657714B2 Defect detection with enhanced dynamic range 有权
标题翻译：缺陷检测具有增强的动态范围
公开(公告)号：US06657714B2
公开(公告)日：2003-12-02
申请号：US10050889
申请日：2002-01-15
申请人： Gilad Almogy , Boris Goldberg , Ron Naftali
发明人： Gilad Almogy , Boris Goldberg , Ron Naftali
IPC分类号： G01N2100
CPC分类号： G01N21/9501
摘要： Apparatus for optical inspection includes a source of optical radiation, which is adapted to scan a spot of the radiation over a sample, whereby the radiation is scattered from the spot. A detection system includes at least first and second detectors optically coupled to receive the scattered radiation and to generate respective first and second outputs responsive thereto, the detection system being configured so that the first detector detects variations in the scattered radiation with a greater sensitivity than the second detector, while the second detector saturates at a higher intensity of the scattered radiation than does the first detector. A signal processor is coupled to receive the first and second outputs and to determine, responsive to the outputs, locations of defects on the sample.
摘要翻译：用于光学检查的装置包括光辐射源，其适于扫描样品上的辐射点，由此辐射从该点散射。检测系统包括至少第一和第二检测器，其被光学耦合以接收散射的辐射并且响应于此产生相应的第一和第二输出，所述检测系统被配置为使得第一检测器以更高的灵敏度检测散射辐射的变化，第二检测器，而第二检测器以比第一检测器更高的散射辐射强度饱和。信号处理器被耦合以接收第一和第二输出并且响应于输出来确定样本上缺陷的位置。

34. 发明授权

US07924419B2 Illumination system for optical inspection 有权
标题翻译：光学检查照明系统
公开(公告)号：US07924419B2
公开(公告)日：2011-04-12
申请号：US12626592
申请日：2009-11-25
申请人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
发明人： Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/47 , G01N21/4788 , G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/1772 , G01N2021/4711 , G01N2021/4735 , G01N2021/479 , G01N2021/4792 , G01N2021/8822 , G01N2021/8845 , G01N2201/0697
摘要： Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
摘要翻译：用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生以第一散斑对比为特征的输入光束。输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

35. 发明授权

US07498557B2 Cascaded image intensifier 有权
标题翻译：级联图像增强器
公开(公告)号：US07498557B2
公开(公告)日：2009-03-03
申请号：US11516667
申请日：2006-09-07
申请人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
发明人： Iddo Pinkas , Tal Kuzniz , Avishay Guetta , Helmut Banzhoff , Ron Naftali
IPC分类号： H01J40/14 , H01J43/00
CPC分类号： H01J31/508
摘要： A cascaded image intensifier device is presented. In one embodiment the device comprises: at least two sections in cascade, each of a first section and a last section out of the at least two sections including a photocathode unit adapted to convert photons to electrons and a screen unit adapted to convert electrons to photons; wherein the first section includes a reducing element adapted to: (i) reduce ion-caused degradation of a photocathode unit of the first section, and (ii) reduce a number of photons exiting from the first section from a first value to a second value; and wherein the last section outputs a number of photons that equals or exceeds the first value. Also disclosed are methods and systems using the disclosed cascaded image intensifier device.
摘要翻译：提出了一种级联图像增强器件。在一个实施例中，该装置包括：级联的至少两个部分，至少两个部分中的第一部分和最后部分中的每个部分，包括适于将光子转换成电子的光电阴极单元和适于将电子转换成光子的屏幕单元 ; 其中所述第一部分包括还原元件，所述还原元件适于：（i）减少所述第一部分的光电阴极单元的离子引起的退化，以及（ii）将从所述第一部分退出的光子数量从第一值减少到第二值 ; 并且其中最后部分输出等于或超过第一值的多个光子。还公开了使用所公开的级联图像增强器装置的方法和系统。

36. 发明授权

US07460221B2 Method and system for detecting defects 有权
标题翻译：检测缺陷的方法和系统
公开(公告)号：US07460221B2
公开(公告)日：2008-12-02
申请号：US11625611
申请日：2007-01-22
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.
摘要翻译：用于扫描表面的系统，包括产生照明光束的光源; 位于光源和表面之间的物镜组件; 多个可互换望远镜，所述可互换望远镜中的所选择的一个位于光源和物镜组件之间; 和至少一个光检测器，其中至少一个光检测器检测从表面反射并从所选择的望远镜接收的反射光束的至少一部分。

37. 发明申请

US20080231845A1 HIGH RESOLUTION WAFER INSPECTION SYSTEM 有权
标题翻译：高分辨率波浪检测系统
公开(公告)号：US20080231845A1
公开(公告)日：2008-09-25
申请号：US11952010
申请日：2007-12-06
申请人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
发明人： Dan Grossman , Moshe Langer , Roman Kris , Silviu Reinhorn , Ron Naftali , Haim Feldman
IPC分类号： G01N21/95
CPC分类号： G01N21/17 , G01N21/1717 , G01N21/9501 , G01N2021/1719
摘要： A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region
摘要翻译：一种用于检查区域的方法，包括通过具有泵浦波长的泵浦光束的光学系统照射该区域。探测波长的探测光束照射该区域，以产生从该区域返回的探测光束辐射。以扫描速率跨越该区域扫描光束。检测器接收返回的探针辐射，并且形成对应于分辨率的区域的图像优于光学系统的泵浦和探针阿贝限制。泵和探针光束的作用可以交替变化，并且可以改变泵浦光束的调制频率，以产生更多的信息。从探测信号中提取的信息也可以区分该区域上的不同材料

38. 发明授权

US07268343B2 Method and system for detecting defects 有权
标题翻译：检测缺陷的方法和系统
公开(公告)号：US07268343B2
公开(公告)日：2007-09-11
申请号：US11066879
申请日：2005-02-25
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01J1/04 , G02B6/00 , G02B6/12
CPC分类号： G03F7/7065 , G01N21/9501 , G01N21/95623 , G02B21/0016 , G02B21/002 , G02B27/58 , H01L21/67288
摘要： System for scanning a surface, including a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; at least one light detector; an apodizator located between the light source and the objective lens assembly; and a relay lens assembly located between the apodizator and the objective lens assembly, wherein the light source produces an image of the illuminating light beam on the apodizator, the apodizator blocks at least a portion of the illuminating light beam, the relay lens assembly images the blocked illuminating light beam at an entrance pupil of the objective lens assembly, and wherein at least one of said at least one light detector, detects light reflected from said surface.
摘要翻译：用于扫描表面的系统，包括产生照明光束的光源; 位于光源和表面之间的物镜组件; 至少一个光检测器; 位于光源和物镜组件之间的遮光器; 以及位于所述脱模器和所述物镜组件之间的中继透镜组件，其中所述光源在所述脱模器上产生所述照明光束的图像，所述遮蔽器阻挡所述照明光束的至少一部分，所述中继透镜组件将所述中继透镜组件在所述物镜组件的入射光瞳处阻挡照明光束，并且其中所述至少一个光检测器中的至少一个检测从所述表面反射的光。

39. 发明授权

US07173694B2 Method and system for detecting defects 有权
标题翻译：检测缺陷的方法和系统
公开(公告)号：US07173694B2
公开(公告)日：2007-02-06
申请号：US11365371
申请日：2006-02-28
申请人： Boris Goldberg , Ron Naftali
发明人： Boris Goldberg , Ron Naftali
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501
摘要： System for scanning a surface, comprising a light source producing an illuminating light beam; an objective lens assembly, located between the light source and the surface; a plurality of interchangeable telescopes, a selected one of the interchangeable telescopes being located between the light source and the objective lens assembly; and at least one light detector, wherein at least one of the light detectors detects at least a portion of a reflected light beam, reflected from the surface and received from the selected telescope.
摘要翻译：用于扫描表面的系统，包括产生照明光束的光源; 位于光源和表面之间的物镜组件; 多个可互换望远镜，所述可互换望远镜中的所选择的一个位于光源和物镜组件之间; 和至少一个光检测器，其中至少一个光检测器检测从表面反射并从所选择的望远镜接收的反射光束的至少一部分。

40. 发明授权

US07109463B2 Amplifier circuit with a switching device to provide a wide dynamic output range 失效
标题翻译：放大器电路采用开关器件提供宽动态输出范围
公开(公告)号：US07109463B2
公开(公告)日：2006-09-19
申请号：US10208157
申请日：2002-07-29
申请人： Erel Milshtein , Ron Naftali
发明人： Erel Milshtein , Ron Naftali
IPC分类号： H01J40/14 , H01J43/18
CPC分类号： H01J43/30
摘要： An amplifier circuit having an amplifier chain comprising an input port and output port with a plurality of interconnected gain stages positioned in between. The output of one interconnected gain stage provides an input to the next stage within the amplifier chain. The output port coupled to the plurality of interconnected gain stages such that the amplifier circuit output is generated from any one or more of the interconnected gain stages.
摘要翻译：一种具有放大器链的放大器电路，该放大器链包括输入端口和输出端口，多个互连增益级位于其间。一个互连增益级的输出为放大器链中的下一级提供输入。所述输出端口耦合到所述多个互连增益级，使得所述放大器电路输出从所述互连增益级中的任一个或多个产生。

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